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SEMI F55-0600 © SEMI 2000 7 A P PENDIX 1 TEST REPORT CORROSION TEST NOT E: T he mate rial in this a ppendix is an offic ial part of SEMI F55 and w as approved by full letter ba llot procedur es on April 10, 2000 by the N…

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SEMI F55-0600 © SEMI 2000 6
Start
Install DUT
Exit
Condition
Basline Data
1 Hour
Flow Dry N
2
Collect Data
10 Minutes
Flow Dry HCl
7 Minutes
Flow Dry N
2
Collect Data
10 Minutes
Flow Wet N
2
3 Minutes
Purge DUT
Remove DUT
Exit
Yes
No
Figure 2
Test Flowchart
SEMI F55-0600 © SEMI 20007
APPENDIX 1
TEST REPORT CORROSION TEST
NOTE: The material in this appendix is an official part of SEMI F55 and was approved by full letter ballot procedures on April
10, 2000 by the North American Regional Standards Committee.
MFC Identification: Wxyz Instruments, Model 123, Serial 230967
Calibrated for: 100 scm
3
HCl
Reference Flowmeter: Mnop Company, Model 1023, Serial 37863, 100 sccm N
2
Test dates: March 28 to May 5, 1993
Test Laboratory: Flow Test and S.D. Associates, Inc.
Test supervised by: George Smith
Table A1-1 Data in tabular format
ABC D E F G H J
TEST
CYCLE #
TEST
CYCLE
HOURS
DUT
SET-
POINT %
DUT
INDICATED %
DUT
ZERO
%
REFERENCE
FLOW ZERO
%
ACTUAL
FLOW %
CALIBRATION
SHIFT %
CHANGE
VALVE
DRIVE
VOLTS
base
line
base
line
75.04 75.05 -0.13 0.03 71.12 0.0 -7.062
100 50 75.01 74.8 0.14 0.04 71.56 0.6 -7.066
200 100 75.00 74.82 0.13 -0.04 71.38 0.4 -7
300 150 74.99 75.1 -0.01 -0.03 71.26 0.2 -7.056
400 200 75.02 75.01 0.02 0.01 71.3 0.3 -7.049
500 250 74.98 74.96 -0.01 -0.03 71.36 0.3 -7.009
600 300 75.02 74.96 0.00 0.03 71.18 0.1 -6.997
700 350 74.99 74.92 0.11 -0.04 71.32 0.3 -7.042
800 400 75.00 75.15 -0.06 -0.04 71.37 0.4 -7.010
900 450 75.02 74.9 0.04 0.01 71.69 0.8 -6.997
1000 500 74.99 75.01 -0.09 0.04 71.96 1.2 -7.056
1100 550 75.01 74.82 0.13 0.04 72.55 2.0 -7.136
1200 600 75.03 75.1 -0.13 -0.02 72.92 2.5 -7.100
1300 650 75.05 75.19 -0.15 -0.03 74.17 4.3 -7.277
1400 700 74.96 75.09 -0.12 -0.01 76.15 7.1 -7.348
1500 750 75.04 75.05 -0.09 -0.01 79.86 12.3 -7.666
1600 800 74.96 75.15 -0.13 0.05 88.36 24.2 -8.278
1700 850 74.96 74.99 0.03 -0.02 110.53 55.4 -9.732
SEMI F55-0600 © SEMI 2000 8
MFC Corrision Test
0.71
0.72
0.73
0.74
0.75
0.76
0.77
0.78
0.79
0.8
0.81
0.82
0.83
0.84
0.85
0.86
0.87
0.88
0.89
0 100 200 300 400 500 600 700 800 900 1000 1100 1200 1300 1400 1500 1600
Test Cycles Completed
Full Scale Percent
DUT Indicated Flow
DUT Setpoint
Actual Flow
Figure A1-1
Test Results Graph
NOTICE: SEMI makes no warranties or representations as to the suitability of the standard set forth herein for any
particular application. The determination of the suitability of the standard is solely the responsibility of the user.
Users are cautioned to refer to manufacturer’s instructions, product labels, product data sheets, and other relevant
literature respecting any materials mentioned herein. These standards are subject to change without notice.
The user’s attention is called to the possibility that compliance with this standard may require use of copyrighted
material or of an invention covered by patent rights. By publication of this standard, SEMI takes no position
respecting the validity of any patent rights or copyrights asserted in connection with any item mentioned in this
standard. Users of this standard are expressly advised that determination of any such patent rights or copyrights, and
the risk of infringement of such rights, are entirely their own responsibility.
Copyright by SEMI® (Semiconductor Equipment and Materials
International), 3081 Zanker Road, San Jose, CA 95134. Reproduction o
f
the contents in whole or in part is forbidden without express written
consent of SEMI.