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SEMI F56-0600 © SEMI 2000 7 Span (Actu al Flow ) Span of MFC ZERO Ideal Respo nse 0 Positiv e Voltage V ariation -3 -2 -1 0 1 2 3 Flow Chang es (%FS) A similar plot w ould be obtain ed: Zero and sp an e ffects as a res u…

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SEMI F56-0600 © SEMI 2000 6
MFC
Under Test
DC Power Supply
Monitor/Recorder
DC
Power Supply
Flow Output
Monitor/Recorder
+ COM -
Current Meter
Figure 2
Test Setup for DC Supply Voltage effects
P1
MFC
FLOW
STANDARD
Pressure
Regulator
Inlet
Valve
Outlet
Valve
Nitrogen
Source
Figure 3
Flow Setup
SEMI F56-0600 © SEMI 20007
Span (Actual Flow)
Span of MFC
ZERO
Ideal Response
0
Positive Voltage Variation
-3
-2
-1
0
1
2
3
Flow Changes (%FS)
A
similar plot would be obtained:
Zero and span effects as a result of varying the negative power
l
zero and span effects as a results of varying both power supplies
tth
Figure 4
Data Plots
SEMI F56-0600 © SEMI 2000 8
Table 1 Data Sheet
Data Sheet 1 Data from Steady State Power Supply Effects
Column A Column B Column C Column D Column E Column F Column G Column H Column L Column M
Data
Pnts
MFC
Setpoint
MFC
Indicated
Flow (V)
Flow
Standard
Output
(V)
Positive
Power
Supply
Level (V)
Negative
Power
Supply
Level (V)
Power
Supply
Current
Level (mA)
MFC
Indicated
Flow %FS
Flow
Standard
%FS
Positive
Power
Supply
Var. (%)
Negative
Power
Supply
Var. (%)
10 0 0 15-15 30 0 0 0 0
20 0 0 15-15 30 0 0
30 0 0 15-15 30 0 0
.
.
.
4 0 0.015 0 15.15 -15 30 0.3 0 1.0 0
5 0 0.010 0 15.15 -15 30 0.3 0
6 0 0.010 0 15.15 -15 30 0.3 0
.
.
.
7 0 0.015 0 14.85 -15 30 0.3 0 -1.0 0
8 0 0.010 0 14.85 -15 30 0.2 0
9 0 0.015 0 14.85 -15 30 0.3 0
.
10 0 0.010 0 15 -15.15 30 0.3 0 0 1.0
11 0 0.010 0 15 -15.15 30 0.3 0
12 0 0.010 0 15 -15.15 30 0.3 0
.
13 0 0.005 0 15 -14.85 30 0.1 0 0 -1.0