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SEMI F57-0301 © SEMI 200 0, 2001 5 Table 2 Particle Contrib ution Requirements Description Qualificatio n Test Method Units Value Notes Rinse T ime Test TBD Hours TBD Section 7.2 Initial Cyc le Test TBD *Particles/liter …

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SEMI F57-0301 © SEMI 2000, 2001 4
7.3 Ionic Contamination
7.3.1 Importance of Test: Ionic contamination can
have a corrosion and/or etching effect on
semiconductor devices during fabrication, causing
immediate or future device failure. Evaporation of
solutions containing ionics may leave surface residue.
7.3.2 Ionic contamination specificat ion and testing are
required for all polymer components as indicated in
Table 1. The ionic contaminants specified within this
document have been derived, in part, from industry
guidelines for UPW used in semiconductor processing.
7.3.3 Polymer components shall conform to the ionic
contamination specifications appearing in Table 3. Use
SEMI F40 to prepare the component for analysis and
ASTM D4327 to analyze polymer components.
7.3.4 The Static Value is derived fro m a prolonged
static leach out test, using UPW as the test media and
lasting for a period of 7 days. Static values do not
directly relate to the trace contaminant values, which
could be present in a flowing stream of liquid. Testing
temperature of polymer components shall be 85 ± 5°C.
A specific testing temperature is specified to achieve
comparable data for polymer components and is not
indicative of service temperatures. For most
contaminants, testing at a lower temperature will give
lower static values.
7.3.5 A mathematical relationship b etween the static
leach out value (provided in this specification) and the
corresponding concentration which may result in a
flowing stream can be theoretically calculated. This
value is offered for demonstration purposes only and is
known as the Theoretical Dynamic Concentration
(TDC). It is expressed in parts per billion (
µg/liter) in
the example calculation provided in the Related
Information 1 Section of this document.
7.4 Metallic Contamination
7.4.1 Importance of Test: Metallic contamination can
have an effect on altering the electrical properties of
semiconductor devices.
7.4.2 Metallic contamination specifi cation and testing
are required for all polymer components as indicated in
Table 1. The metallic contaminants specified within
this document have been derived, in part, from industry
guidelines for UPW used in semiconductor processing
7.4.3 Polymer components shall conform to the
metallic contamination specifications appearing in
Table 4. Use SEMI F40 to prepare the component for
analysis and an industry standard test method to analyze
polymer components (see Related Documents Section
12.5
for an applicable leachable trace inorganics test
method).
7.4.4 See Section 7.3.4 for Static Value definition.
7.4.5 See Related Information 1 for Theoretical
Dynamic Concentration calculation.
7.5 Total Organic Carbon (TOC)
7.5.1 Importance of Test: TOC can h ave an effect on
silicon oxidation, uniformity of etching and gate oxide
breakdown voltage of semiconductor devices.
7.5.2 TOC specification and testing are restricted to
polymer components as indicated in Table 1.
7.5.3 Polymer components shall conform to the TOC
contamination specifications appearing in Table 5. Use
SEMI F40 to prepare the component for analysis and
ASTM D4779 or D5904 to analyze polymer
components.
7.5.4 See Section 7.3.4 for Static Value definition.
7.5.5 See Related Information 1 for Theoretical
Dynamic Concentration calculation.
7.6 Surface Roughness
7.6.1 Importance of Test: Surface roughness can
influence microbial proliferation, provide an
entrapment area for microcontamination build up and/or
promote shedding of the polymer itself within a
distribution system.
7.6.2 Surface Roughness specification and testing is
required for all polymer components as indicated in
Table 1.
7.6.3 Polymer components shall conform to surface
roughness specifications appearing in Table 6. For ease
of use and comparison purposes, the preferred method
of testing is by use of a stylus in direct contact with the
component surface, known as contact profilometry (see
Related Documents Section 12.5
for an applicable
surface roughness test method).
7.6.4 As softer plastics may exhibit microscopic
damage due to the stylus and give smoother than
expected results, additional testing may be required.
When initially setting up the equipment, evaluate softer
plastics immediately with a 10x magnification visual
examination to make sure damage has not occurred.
Lines, scratches or artifacts originating from stylus
contact would indicate damage. In the event that
damage is present, a lighter stylus head should be used.
SEMI F57-0301 © SEMI 2000, 20015
Table 2 Particle Contribution Requirements
Description Qualification Test Method Units Value Notes
Rinse Time Test TBD Hours TBD Section 7.2
Initial Cycle Test TBD *Particles/liter ≥ 0.1 µm TBD Section 7.2
2000 Cycle Test TBD *Particles/liter ≥ 0.1 µm TBD Section 7.2
200,000 Cycle Test TBD *Particles/liter ≥ 0.1 µm TBD Section 7.2
* Cycle Test values are a result of subtracting the pre-cycle test background average. See Section 7.2.6.
TBD = To be determined (see NOTE 1 under Table 1).
Table 3 Surface Extractable Ionic Contamination Requirements
Description Component
Preparation Practice
Qualification Test Method Static Value at 85 ± 5°C
for 7 days (µg/m
2
)
Notes
Bromide SEMI F40 ASTM D4327 ≤ 100 Section 7.3
Chloride SEMI F40 ASTM D4327 ≤ 3000 Section 7.3
Fluoride SEMI F40 ASTM D4327 ≤ 60,000 Section 7.3
Nitrate SEMI F40 ASTM D4327 ≤ 100 Section 7.3
Nitrite SEMI F40 ASTM D4327 ≤ 100 Section 7.3
Phosphate SEMI F40 ASTM D4327 ≤ 300 Section 7.3
Sulfate SEMI F40 ASTM D4327 ≤ 300 Section 7.3
NOTE 1: Optional testing may be required by the end user for ammonium.
Table 4 Surface Extractable Metallic Contamination Requirements
Description Component
Preparation Practice
Qualification Test Method Static Value at 85 ± 5°C
for 7 days (µg/m
2
)
Notes
Aluminum SEMI F40 (See NOTE 1.) ≤ 10 Section 7.4
Barium SEMI F40 (See NOTE 1.) ≤ 15 Section 7.4
Boron SEMI F40 (See NOTE 1.) ≤ 10 Section 7.4
Calcium SEMI F40 (See NOTE 1.) ≤ 30 Section 7.4
Chromium SEMI F40 (See NOTE 1.) ≤ 1 Section 7.4
Copper SEMI F40 (See NOTE 1.) ≤ 15 Section 7.4
Iron SEMI F40 (See NOTE 1.) ≤ 5 Section 7.4
Lead SEMI F40 (See NOTE 1.) ≤ 1 Section 7.4
Lithium SEMI F40 (See NOTE 1.) ≤ 2 Section 7.4
Magnesium SEMI F40 (See NOTE 1.) ≤ 5 Section 7.4
Manganese SEMI F40 (See NOTE 1.) ≤ 5 Section 7.4
Nickel SEMI F40 (See NOTE 1.) ≤ 1 Section 7.4
Potassium SEMI F40 (See NOTE 1.) ≤ 15 Section 7.4
Sodium SEMI F40 (See NOTE 1.) ≤ 15 Section 7.4
Strontium SEMI F40 (See NOTE 1.) ≤ 0.5 Section 7.4
Zinc SEMI F40 (See NOTE 1.) ≤ 10 Section 7.4
NOTE 1: See Related Documents Section 12.5 for an applicable leachable trace inorganics test method.
Table 5 Surface Extractable Total Organic Carbon (TOC) Contamination Requirements
Description Component
Preparation Practice
Qualification Test Method Static Value at 85 ± 5°C
for 7 days (µg/m
2
)
Notes
TOC SEMI F40 ASTM D4779 or D5904 ≤ 60,000 Section 7.5
SEMI F57-0301 © SEMI 2000, 2001 6
Table 6 Surface Roughness Requirements
Description Qualification Test Method Units Ra max. Value Notes
Extruded (See NOTE 1.) µm (µin) ≤ 0.25 (≤ 10) Section 7.6
Injection Molded (See NOTE 1.) µm (µin) ≤ 0.38 (≤ 15) Section 7.6
Machined (See NOTE 1.) µm (µin) ≤ 0.62 (≤ 25) Section 7.6
NOTE 1: See Related Documents Section 12.5 for an applicable surface roughness test method.
8 Mechanical Requirements
8.1 Upon request, suppliers shall provide data and/or
information for the following polymer components
mechanical requirements. This information is typically
found in product catalogs and component data sheets.
• dimensional tolerances
• flow characteristics
• leak integrity
• mechanical strength characteristics
8.2 All polymer components will c onform to supplier's
provided data and/or information regarding dimensional
tolerances, flow characteristics, leak integrity, and
mechanical strength characteristics.
8.3 Temperature/Pressure Rating
8.3.1 Polymer components are required to be
manufactured in such a manner so as to meet the
temperature and internal pressure requirements of ISO
1167, ISO 12162, or other superseding local regulations
as applicable.
8.4 Chemical Resistance Rating
8.4.1 Polymer components are required to be
manufactured to meet the chemical resistance
requirements specified by the component suppler,
and/or other superseding local regulations as applicable.
8.5 Reliability
8.5.1 Upon request, the manufacturer should provide
component reliability data accompanied by the
associated test and failure analysis methods. This
typically involves life cycle testing of components to
include results expressed in cycles (e.g. >1,000,000
cycles for valves). The test media used for life cycle
testing of polymer components can effect life cycle
testing results and should be considered when
comparing and selecting polymer components.
9 Certification
9.1 The component supplier is responsible for
defining, establishing, and executing a testing program
for polymer components based on the requirements
outlined within this document.
9.2 Such a program will specify th e frequency of
testing, the test component(s) and any necessary
corrective action plan in the event that a test component
fails to meet these requirements during testing.
9.3 To avoid the inefficiencies inv olved in testing
every size of every product type, test polymer
components shall be selected by the component
supplier which will be representative product of similar
processing, or production techniques.
9.4 Upon request, the component s upplier is
responsible for maintaining and supplying
documentation that proves their polymer components
consistently meet the requirements of this document.
9.5 The supplier is not required to perform all tests on
each individual lot or product type of polymer
components shipped. Instead, the product will be
certified as meeting the requirements in this document
based on the outcome of the representative component
tests and periodic testing program. However, if the
purchaser performs the test(s) and the product fails to
meet the requirement(s), the product may be subject to
rejection.
9.6 Qualification tests and certific ation documents
shall reflect current production capabilities.
10 Traceability Requirements
10.1 It will be the responsibility of the component
supplier to establish and maintain an incoming raw
material certification, inspection, and traceability
process, which will ensure that manufactured polymer
components meet the requirements of this document.
10.2 Every deliverable item shall ha ve some scheme
of identification on the exterior bag or box so that
traceability is provided from the raw material supplier
to the final finished, packaged product.
10.3 In addition, piping, tubing, valves, gauge guards,
pressure transducers, and pressure regulators shall have
permanent, non-contaminating identification (e.g. laser
marking, heat stamping, or chemical resistant label) on
the product itself to provide traceability.
10.4 In the event that component installation by the
purchaser obliterates such identification, it becomes the