semi合集-English.pdf - 第4087页
SEMI F57-0301 © SEMI 200 0, 2001 8 PREN 1220 2-3 — Plasti cs Pipi ng Syst e ms for Hot and Cold Water - Po lypropylene (PP) - Part 3: Fittings PREN 1220 2-5 — Plasti cs Pipi ng Syst e ms for Hot and Cold Water - P olypro…

SEMI F57-0301 © SEMI 2000, 20017
responsibility of the purchaser to maintain traceability
records.
11 Packaging Requirements
11.1 Double bagging using a clear material that will
allow inspection is required for polymer components
specified in this document. Both the inner and outer
bags will be heat-sealed and shall prevent damage from
normal handling. Vacuum sealing, air evacuation,
and/or dry inert gas purging are optional on the inner
bag.
11.2 The ends of valves, gauge guards, pressure
regulators, and tubing will be protected using some
non-contaminating method before bagging.
11.3 The outer bag will have a label affixed which
clearly identifies the component, part number, lot
number and any other necessary traceability
characteristics (see Section 10).
11.4 Shipping containers and cartons must provide
adequate protection of polymer components so those
articles will meet the requirements contained within this
document upon delivery to the purchaser.
11.5 It should be noted that some p ackaging materials
could release substantial amounts of TOC when they
are heat-sealed. This might lead to an organic
deposition on the polymer component.
12 Related Documents
NOTE 2: As listed or revised, all documents cited shall be the
latest publications of adopted standards.
12.1 SEMI Standards
SEMI E49.2 — Guide for High Purity Deionized Water
and Chemical Distribution Systems in Semiconductor
Manufacturing Equipment
SEMI E49.3 — Guide for Ultrahigh Purity Deionized
Water and Chemical Distribution Systems in
Semiconductor Manufacturing Equipment
12.2 ASTM Standards
1
ASTM D1784 — Rigid Poly (Vinyl Chloride) (PVC)
Compounds and Chlorinated Poly (Vinyl Chloride)
(CPVC) Compounds
ASTM D3222 — Unmodified Poly (Vinylidene
Fluoride) (PVDF) Molding, Extrusion, and Coating
Materials
ASTM D3275 — E-CTFE-Fluoroplastic Molding,
Extrusion, and Coating Materials
ASTM D3307 — PFA-Fluorocarbon Molding and
Extrusion Materials
ASTM D3915 — Rigid Poly (Vinyl Chloride) (PVC)
and Chlorinated Poly (Vinyl Chloride) (CPVC)
Compounds for Plastic Pipe and Fittings Used in
Pressure Applications
ASTM D4101 — Propylene Plastic Injection and
Extrusion Materials
12.3 DIN Standards
4
DIN 16774-1 — Plastic Moulding Materials;
Polypropylene And Propylene Copolymer
Thermoplastics; Classification and Designation
DIN 3442-1 — Fittings of PP (Polypropylene);
Requirements and Testing
DIN 3442-2 — Fittings of PP (Polypropylene); Ball
Valves, Dimensions
DIN 3442-3 — Polypropylene (PP) Valves; Diaphragm
Valves; Dimensions
DIN 8077 — Polypropylene (PP) Pipes PP-H 100, PP-
B 80; PP-R 80 - Dimensions
DIN 8078 — Polypropylene (PP) Pipes - PP-H (Type
1), PP-B (Type 2), PP-R (Type 3) - General Quality
Requirements and Testing
12.4 CEN Standards
5
PREN 1452-1 — Plastics Piping Systems for Water
Supply - Unplasticized Poly (Vinyl Chloride) (PVC-U)
Part 1: General
PREN 1452-2 — Plastics Piping Systems for Water
Supply - Unplasticized Poly (Vinyl Chloride) (PVC-U)
Part 2: Pipes
PREN 1452-3 — Plastics Piping Systems for Water
Supply - Unplasticized Poly (Vinyl Chloride) (PVC-U)
Part 3: Fittings
PREN 1452-4 — Plastics Piping Systems for Water
Supply - Unplasticized Poly (Vinyl Chloride) (PVC-U)
Part 4: Valves and Ancillary Equipment
PREN 1452-5 — Plastics Piping Systems for Water
Supply - Unplasticized Poly(Vinyl Chloride) (PVC-U)
Part 5: Fitness for Purpose of the System
PREN 12202-1 — Plastics Piping Systems for Hot and
Cold Water - Polypropylene (PP) - Part 1: General
PREN 12202-2 — Plastics Piping Systems for Hot and
Cold Water - Polypropylene (PP) - Part 2: Pipes
4 Deutsches Institut fur Normung e.v., available from Beuth Verlag,
Burggrafenstrasse 6, D-10787 Berlin, Germany
5 European Committee For Standardization, 36, rue de Stassart, B-
1050 Brussels, Belgium

SEMI F57-0301 © SEMI 2000, 2001 8
PREN 12202-3 — Plastics Piping Systems for Hot and
Cold Water - Polypropylene (PP) - Part 3: Fittings
PREN 12202-5 — Plastics Piping Systems for Hot and
Cold Water - Polypropylene (PP) - Part 5: Fitness for
Purpose of the System
12.5 ISO Standard
2
ISO 10931-1 — Plastic piping systems for industrial
applications - PVDF - Part 1: General
ISO 10931-2 — Plastic piping systems for industrial
applications - PVDF - Part 2: Pipes
ISO 10931-3 — Plastic piping systems for industrial
applications - PVDF - Part 3: Fittings
ISO 10931-4 — Plastic piping systems for industrial
applications - PVDF - Part 4: Valves
ISO/FDIS 10931-5 — Plastic piping systems for
industrial applications - PVDF - Part 5: Fitness for
Purpose of the System
ISO/DIS 15874-1 — Plastics piping systems for hot and
cold water -- Polypropylene (PP) -- Part 1: General
ISO/DIS 15874-2 — Plastics piping systems for hot and
cold water -- Polypropylene (PP) -- Part 2: Pipes
ISO/DIS 15874-3 — Plastics piping systems for hot and
cold water -- Polypropylene (PP) -- Part 3: Fittings
ISO/DIS 15874-5 — Plastics piping systems for hot and
cold water -- Polypropylene (PP) -- Part 5: Fitness for
purpose of the system
12.6 SEMATECH Documents
6
SEMASPEC 92010936B-STD — Provisional Test
Method for Determining Leachable Trace Inorganics in
Ultra Pure Water Distribution System Components”
SEMASPEC 92010950B-STD — Provisional Test
Method for Visual Characterization of Surface
Roughness for Plastic Surfaces of UPW Distribution
System Components
6 SEMATECH, 2706 Montopolis Drive, Austin, Texas 78741, USA

SEMI F57-0301 © SEMI 2000, 20019
Table 7 Related Standards for Plastic Piping Materials
PP PVDF PVC PFA ECTFE
Materials PREN 12202-1
DIN 16774
ISO/DIS 15874-1
ASTM D4101
ISO 10931-1
ASTM D3222
PREN 1452-1
ASTM D1784
ASTM D3915
ASTM D3307 ASTM D3275
Pipes PREN 12202-2
DIN 8077
DIN 8078
ISO/DIS 15874-2
ISO 10931-2 PREN 1452-2 No standards No standards
Fittings PREN 12202-3
ISO/DIS 15874-3
ISO 10931-3 PREN 1452-3 No standards No standards
Valves DIN 3442-1
DIN 3442-2
DIN 3442-3
ISO 10931-4 PREN 1452-4 No standards No standards
Systems PREN 12202-5
ISO/DIS 15874-5
ISO/FDIS 10931-5 PREN 1452-5 No standards No standards
NOTE 1: See Related Documents Sections 12.2, 12.3, 12.4, and 12.5.
NOTICE: SEMI makes no warranties or representations as to the suitability of the standard set forth herein for any
particular application. The determination of the suitability of the standard is solely the responsibility of the user.
Users are cautioned to refer to manufacturer’s instructions, product labels, product data sheets, and other relevant
literature respecting any materials mentioned herein. These standards are subject to change without notice.
The user’s attention is called to the possibility that compliance with this standard may require use of copyrighted
material or of an invention covered by patent rights. By publication of this standard, SEMI takes no position
respecting the validity of any patent rights or copyrights asserted in connection with any item mentioned in this
standard. Users of this standard are expressly advised that determination of any such patent rights or copyrights, and
the risk of infringement of such rights, are entirely their own responsibility.