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SEMI F59-0302 © SEMI 2000, 2002 3 for pressu re drop measurem ent. The gas stick m ay be removed from the pallet to attach to the test fixture. 11.2 Pressure regul ators and MFCs s hall be m aintain ed in their fu lly op…

SEMI F59-0302 © SEMI 2000, 2002 2

5.1.15 s second

5.1.16 scfm  standard cubic feet per minute

5.1.17 slpm  standard liters per minute

5.1.18 T  (K) temperature in Kelvin

5.1.19

∆

P  differential pressure in kPa

5.1.20

∆

P(Housing)  (kPa, differential) differential

pressure of housing in kiloPascal, differential

5.1.21

∆

P(Unit)  (kPa, differential) differential

pressure of filtration unit in kiloPascal, differential

5.1.22

∆

P(cartridge)  (kPa, differential) differential

pressure of cartridge element in kiloPascal, differential

5.2 Definitions

5.2.1 filter cartridge  the filtration element.

5.2.2 filter housing  the shell that contains the filter

cartridge.

5.2.3 filtration unit  the assembly consisting of a

filter cartridge and housing.

5.2.4 gas box — a gas distribution subsystem which

generally contains the final shut-off valve(s) prior to the

POC.

5.2.5 gas pallet — individual gas distribution

subsystems within a gas box that control flow of gas to

individual process chambers.

5.2.6 gas stick — a series of components for an

individual gas within a gas box. It may contain valves,

a regulator, a pressure transducer, a purge line, an

MFC, and a filter.

5.2.7 integral unit  the filter cartridge and housing

are not separable.

5.2.8 normal conditions  101.3 kPa (14.7 psia) and

ambient temperature conditions 293.15 K (20

C).

5.2.9 separable unit  the filter cartridge and housing

can be disassembled.

5.2.10 spool flow through component — a null

component consisting of an electropolished flow

passage and appropriate fittings used in place of the test

component.

5.2.11 standard conditions  101.3 kPa, 273.15 K

(14.7 psia, 0

C).

6 Summary of Method

6.1 This test method describes the test equipment and

procedures for determining the flow pressure drop of

filters or gas systems. The differential pressure is

measured across a DUT at various inlet pressures and

flows. If the filtration unit is separable the individual

contributions from the housing and cartridge are

determined.

7 Interferences

7.1 Test stand must be of adequate dimensions so that

it does not limit the flow through the test DUT. The

pressure drop for the test stand must be insignificant

compared to the pressure drop for a DUT at the test

flow rate.

8 Apparatus

8.1 pressure regulator

8.2 downstream flow regulating valve

8.3 flow meter capable of measuring flow rates to

better than 5% full scale and of appropriate range.

8.4 several pressure transducers or gauges

8.5 differential pressure transducer (0.67 kPa, (0.1 psi)

sensitivity)

8.6 Test stand

8.7 Temperature measuring device (

9 Reagents and Materials

9.1 Test Gas nitrogen or CDA filtered to < 0.02

micrometer with a dew point of less than or equal to –

10 Safety Precautions

10.1 Safety Precautions  This test method may

involve hazardous materials, operations, and

equipment. This test method does not purport to

address all of the safety problems associated with its

use. It is the responsibility of the user to establish

appropriate safety and health practices and to determine

the applicability of regulatory limitations prior to its

use.

10.2 The user must have a working knowledge of the

respective instrumentation, must practice proper

handling of test components, and must understand good

laboratory practices. The user should not operate the

components in such a manner as to exceed the ratings

(i.e., pressure, temperature, flow and voltage).

11 Test Specimen

11.1 A gas box may consist of several gas pallets that

uniquely control flow of gases to a specific process

chamber. More than one gas stick layout is possible on

the pallet. The user shall test only one stick at a time

SEMI F59-0302 © SEMI 2000, 2002 3

for pressure drop measurement. The gas stick may be

removed from the pallet to attach to the test fixture.

11.2 Pressure regulators and MFCs shall be maintained

in their fully open position during testing.

11.3 When comparing different gas system designs, it

is useful to use components of similar design.

11.4 If the stick design contains a filter that dominates

the pressure drop on the system, such filters shall be

replaced by spool flow through components

12 Preparation of Apparatus

12.1 Construct a test stand for the measurement of gas

flow rates and pressure drop across a DUT. Examples

of such a test stand are shown in Figures 1a or 1b as

schematic drawings.

12.2 The gas supply is filtered by an electronics grade

high purity point-of-use gas filter before it is delivered

to the DUT through a pressure regulator.

12.3 A flow meter can be installed either upstream or

downstream of the DUT. See Figures 1a or 1b. The

test filter is upstream of a throttle valve to allow for

control of the flow through the DUT.

12.4 Inlet pressure is measured immediately upstream

of the DUT by a pressure gauge or pressure transducer.

12.5 Pressure drop across the test specimen is

measured by an electronic differential pressure

transducer capable of reading 0.67 kPa (0.1 psid) across

the test device.

12.6 Flow measurements are carried out through a flow

meter installed upstream or downstream of the test

filter. See Figures 1a or 1b.

NOTE 2: The flow measurement can be influenced by both

upstream and downstream pressure fluctuations. It is

necessary to verify the accuracy of any flow measurement

under the test conditions used to complete this testing.

12.7 A temperature measurement device can be

installed in the test stand to measure the gas stream

temperature.

12.8 Figure 2 gives the piping requirements for the test

stand configuration.

12.9 Figure 3 gives the recommended pressure

connection to be followed in constructing the test

apparatus.

13 Calibration and Standardization

13.1 For each test, verify that calibration of test

equipment is up-to-date.

13.2 A series of flow meters should be used to cover

the full range of flows that will be tested.

14 Procedure

14.1 Integral Filtration Unit

14.1.1 Assemble the filtration unit into the test

apparatus. (See Figure 1.)

14.1.2 Set the inlet pressure using the pressure

regulator to 10% of the filter’s maximum rated inlet

pressure or to 205 kPa (29.7 psia) whichever is less.

Pressure is read on the inlet pressure gauge.

14.1.3 Adjust the flow rate using the regulating valve

to give 10 % of the maximum rated flow. Adjustments

to the inlet pressure regulator may be required to

maintain a constant inlet pressure of 205 kPa (29.7

psia). The flow and pressure adjustments can be an

iterative process requiring several iterations to achieve

the desired flow rate and inlet pressure. The flow rate

is read on the flow meter and recorded.

14.1.4 Read and record the ambient temperature, inlet

pressure, pressure drop across the test filter, ambient

pressure, and flow rate corrected for upstream pressure

based on manufacturer’s recommendation.

14.1.5 Repeat steps in Sections 14.1.3 and 14.1.4 at

25%, 50%, 75% and 100% of the maximum rated flow.

14.1.6 Repeat steps in Sections 14.1.2 through 14.1.5

at several inlet pressures: 309 kPa (44.7 psia), 516 kPa

(74.7 psia), and 723 kPa (104.7 psia).

14.1.7 Additional testing of the filter at higher

pressures can be completed up to the maximum rated

pressure.

14.1.8 When the filter has a lower maximum pressure

rating than 90 psig, it is recommended that the filter be

tested at pressures of 33%, 67% and 100% of the

filter’s maximum pressure rating, with tests being

limited by the sensitivity of the differential pressure

device.

14.2 Separable Filtration Unit - Filter Housing

14.2.1 Assemble the empty filter housing into the test

apparatus.

14.2.2 Set the inlet pressure using the pressure

regulator to 10% of the housing’s maximum rated inlet

pressure or to 205 kPa (29.7 psia) whichever is less.

The inlet pressure is read on the inlet pressure gauge

and recorded.

14.2.3 Adjust the flow rate using the regulating valve

to give 10% of the maximum rated flow. Adjustments

to the inlet pressure regulator may be required to

maintain a constant inlet pressure of 205 kPa (29.7

psia). The flow and pressure adjustments can be an

iterative process requiring several iterations to achieve

SEMI F59-0302 © SEMI 2000, 2002 4

the desired flow rate and inlet pressure. The flow rate

is read on the flow meter and recorded.

14.2.4 Read and record the ambient temperature,

ambient pressure, inlet pressure, pressure drop across

the test filter, and flow rate corrected for upstream

pressure based on manufacturer’s recommendation.

14.2.5 Repeat steps in Sections 14.2.3 and 14.2.4 at

25%, 50%, 75%, 100% of the filter cartridge’s

maximum rated flow.

14.2.6 Repeat steps in Sections 14.2.2 through 14.2.5

at several inlet pressures. For example, test at 309 kPa

(44.7 psia), 516 kPa (74.7 psia), and 723 kPa (104.7

psia).

14.2.7 Additional testing of the filter at higher

pressures can be completed up to the maximum rated

pressure.

14.2.8 When the filter has a lower maximum pressure

rating than 90 psig, it is recommended that the filter be

tested at pressures of 33%, 67% and 100% of the

filter’s maximum pressure rating, with tests being

limited by the sensitivity of the differential pressure

device.

14.3 Separable Filtration Unit – Assembled Cartridge

and Housing

14.3.1 Assemble the filter cartridge into the filter

housing.

14.3.2 Assemble the filtration unit into the test

apparatus.

14.3.3 Set the inlet pressure using the pressure

regulator to 10% of the filter’s maximum rated inlet

pressure, or to 205 kPa (29.7 psia), whichever is less.

The inlet pressure is read on the inlet pressure

gauge/transducer and recorded. This pressure should be

the same as used for the filter housing test in Section

14.2.2.

14.3.4 Adjust the flow rate using the regulating valve

to give 10% of the maximum rated flow. Adjustments

to the inlet pressure regulator may be required to

maintain a constant inlet pressure of 205 kPa (29.7

psia). The flow and pressure adjustments can be an

iterative process requiring several iterations to achieve

the desired flow rate and inlet pressure. The flow rate

is read on the flow meter and recorded. This should be

the same as used for the filter housing test in Section

14.2.3.

14.3.5 Read and record the ambient temperature,

ambient pressure, inlet pressure, pressure drop, and

flow rate.

14.3.6 Repeat steps in Sections 14.3.3 and 14.3.5 at

25%, 50%, 75% and 100% of the maximum rated flow.

These should be the same flow settings as used in

Section 14.2.5.

14.3.7 Repeat steps in Sections 14.3.2 through 14.3.6

at several inlet pressures. For example, test at 309 kPa

(44.7 psia), 516 kPa (74.7 psia), and 723 kPa (104.7

psia).

14.3.8 Additional testing of the filter at higher

pressures can be completed up to the maximum rated

pressure. These inlet pressure settings should be the

same as used in Section 14.2.7.

14.3.9 When the filter has a lower maximum pressure

rating, it is recommended that the filter be tested at

pressures of 33%, 67% and 100% of the filter’s

maximum pressure rating, with tests being limited by

the sensitivity of the differential pressure device.

14.3.10 The flow curve for the filter cartridge is

determined by subtracting the pressure drop of the

housing from the pressure drop of the assembled

filtration unit at respective flow rates and inlet test

pressures.

14.4 Gas System

14.4.1 Assemble the DUT into the test apparatus. (See

Figure 1.)

14.4.2 Set the inlet pressure using the pressure

regulator to 205 kPa (29.7 psia). Pressure is read on the

inlet pressure gauge.

14.4.3 Adjust the flow rate using the regulating valve

to give 1 slpm. Adjustments to the inlet pressure

regulator may be required to maintain a constant inlet

pressure of 205 kPa (29.7 psia). The flow and pressure

adjustments can be an iterative process requiring

several iterations to achieve the desired flow rate and

inlet pressure. The flow rate is read on the flow meter

and recorded.

14.4.4 Read and record the ambient temperature, inlet

pressure, pressure drop across the DUT, ambient

pressure, and flow rate.

14.4.5 Repeat steps in Sections 14.4.2 through 14.4.4

at flow rates of 5, 10, 25, 50, 75, and 100 slpm.

14.4.6 Repeat steps in Sections 14.4.2 through 14.4.5

at several inlet pressures: 308 kPa (44.7 psia), 515 kPa

(74.7 psia), and 791 kPa (114.7 psia).

14.4.7 Additional testing of the DUT may be

performed at higher pressures up to the maximum rated

pressure. Where components are not specified to

operate at the required flow rates and pressures listed in

Sections 14.4.5 and 14.4.6 then tests shall be performed

to the highest pressures and flows attainable while

remaining within the component’s maximum operating

specification.