semi合集-English.pdf - 第4128页
SEMI F62-0701 © SEMI 2001 8 Figure 5 Steady State Ambient Temperature Effects Figure 6 Transient Ambient Temp erature Effects 100 ∆ = % Reading -100 100 0 ∆ = Temp O C Time (Hr) +100 0 -100 1 Tmin Tmax
SEMI F62-0701 © SEMI 20017
Figure 4
Gas Temperature Test Procedure Flow Chart
Te=25
O
C
Tg=Te
N=1
Record Tg, Te, Qa
Tg=Te+10
O
C
Record Tg, Te, Qa
N=5N=N+1
End
MFC Setpoint
N=1 0%
N=2 25%
N=3 50%
N=4 75%
N=5 100%
No
Yes
SEMI F62-0701 © SEMI 2001 8
Figure 5
Steady State Ambient Temperature Effects
Figure 6
Transient Ambient Temperature Effects
100
∆=
% Reading
-100
100
0
∆=
Temp
O
C
Time (Hr)
+100
0
-100
1
Tmin
Tmax
SEMI F62-0701 © SEMI 20019
Figure 7
Gas Temperature Effect on Steady State Span
0%
X
X
X
X
TGg (% Reading/
O
C)
Flow Setpoint (% F.S.)
25 50 75 100