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SEMI F62-0701 © SEMI 2001 14 Table 5 Gas T emperature Data Colle ction Set point (sc cm) T s ( ° C) T g ( ° C) T b ( ° C) T e ( ° C) Q a (sc cm) Q ind 0 22. 0 21.8 0.00 25 22.1 21.9 24.94 25 33.2 22.2 24.52 50 22.1 21.8 …

100%1 / 7923
SEMI F62-0701 © SEMI 200113
Table 4 Sample Data for 500 sccm MFC
T
g
T
s
T
e
Q
sp
Q
ind
Q
A
Time min.
20.1 10 .5
20.2 15 1
20.3 11 1.5
20.4 14 2
20.5 24 2.5
.
.
.
.
.
.
30.9 36 60
.
.
.
40.0 48 120
39.0 40 480
30.0 36 560
20.0 10 600
NOTE 1: Plot as in Figure 8.
SEMI F62-0701 © SEMI 2001 14
Table 5 Gas Temperature Data Collection
Set point
(sccm)
T
s
(
°
C) T
g
(
°
C) T
b
(
°
C) T
e
(
°
C)
Q
a
(sccm) Q
ind
0 22.0 21.8 0.00
25 22.1 21.9 24.94
25 33.2 22.2 24.52
50 22.1 21.8 50.08
50 32.1 21.7 49.21
75 22.0 21.6 75.13
75 31.8 21.5 74.02
100 21.9 21.4 100.18
100 31.7 21.4 98.83
TC
g
= Q
af
-Q
ai
× 100%
[(T
g
-T
e
)
f
-(T
g
-T
e
)
i
] Q
sp
Example: For the 50 sccm setpoint data collection sample,
TC
g
= 49.21 sccm-50.08 sccm × 100%
[(32.1°C-21.7°C)-(22.1°C-21.8°C)](50 sccm)
= -0.17% of reading at 50 sccm
SEMI F62-0701 © SEMI 200115
APPENDIX 1
NOTE: This appendix is being balloted as an official part of SEMI F062-0701 by full letter ballot procedure.
Determination of the suitability of the material herein is solely the responsibility of the user.
(Mandatory Information)
A1-1 Reference Values
Ambient Temperature 23 ±2°C
Gas Temperature Same as Ambient
Ambient Pressure 101.3 kPa +4.7 kPa
(1013 mbar +4.7 kPa - 15.3 kPa)
Gas Pressure, Inlet 274 ± 34 kPa
Gas Pressure, Outlet 101.3 kPa
Gas Pressure, Inlet 172 ± 34 kPa
Gas Pressure, Outlet < 0.13 kPa
Relative Humidity 40% ± 10%, Noncondensing
Magnetic Field < 50 µT
Electromagnetic Field < 100 µV/m
Vibration < 0.5 m/s
Shock ≤ 3g
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