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SEMI F64-0701 © SEMI 2001 16 A–4 Data Analys is: Method C Table A4–1 S ample Data Sheet: Metho d C Date :_____ __________ _ T i m e: _________ _ DUT #__ ______ ______ __ Ambient T em p ____ ______ ° C Stan dard F low D e…

SEMI F64-0701 © SEMI 200115

is the equivalent internal control volume of the DUT. Note that it may not represent the actual internal volume

of the DUT; i.e.,

)

min/sec 60

atm i/std. s p 14.7

∆

(4)

For example, if ∆Q = 5.02 sccm and P1 = 0.7 kPa (0.1 psi)/sec, then

Veq = [(5.02 sccm)/( 0.7 kPa (0.1 psi)/sec)] × [(101.325 kPa (14.7 psi)/std. atm)/(60 sec/min)] = 12.3 ccm

A1–3 Data Analysis: Method B

Table A1–2 Sample Data Sheet: Method B

Date:________________ Time: __________

DUT #________________ Ambient Temp __________°C

Standard Flow Device ________________

Full Scale________________ sccm

P1 (psig) Setpoint Flow (sccm) Q

(sccm) Q

(sccm)

15.02 0 0.00 -0.01

15.00 50 50.01 50.01

15.01 100 100.12 100.01

50.06 0 0.00 -0.05

50.04 50 50.12 50.01

50.03 100 100.56 100.02

A1–3.1 Data Interpretation, Method B

is the pressure coefficient of indicated flow per pressure change at zero flow; i.e.,

100

= (%)

∆

(5)

x100

)

(

= (%)

IiIf

(6)

is the pressure coefficient of actual flow per pressure change at a setpoint; i.e.,

For example, from Table A2.1,

(%) = {[-0.05 sccm-(-0.01 sccm)]/[(50.06 psig-15.02 psig)(100 sccm)]} × 100

= -0.0011% of FS/psi

(@ 50%) = [50.12 sccm-50.01 sccm]/[(50.04 psig-15.00 psig)(50 sccm)] × 100

= 0.0063% of reading/psi at 50 sccm

(@ FS = [100.56 sccm-100.12 sccm]/[(50.03 psig-15.01 psig)(100 sccm)] × 100

= 0.013% of reading/psi at 100 sccm

SEMI F64-0701 © SEMI 2001 16

A–4 Data Analysis: Method C

Table A4–1 Sample Data Sheet: Method C

Date:________________ Time: __________

DUT #________________ Ambient Temp __________°C

Standard Flow Device ________________

Setpoint________________ sccm

Te = ________________ °C P1 = __________psig

Time (sec) P2 (kPa) Q

(sccm) Q

(sccm)

0 101.338 50.05 50.0

0.05 101.338 50.05 50.0

2.20 95.086 52.28 51.5

2.25 88.406 54.56 52.1

8.45 32.424 50.08 50.0

8.50 31.811 50.07 50.0

15.20 26.838 50.06 50.0

A1–4.1 Data Interpretation, Method C – See Appendix A1–1.1

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SEMI F65-1101 © SEMI 20011

SEMI F65-1101

DIMENSIONAL SPECIFICATION FOR MOUNTING BASES OF

DIAPHRAGM VALVES USED WITH METRIC PFA TUBES

This specification was technically approved by the Global Liquid Chemical Distribution Systems Committee

and is the direct responsibility of the Japanese Liquid Chemical Distribution Systems Committee. Current

edition approved by the Japanese Regional Standards Committee on August 3, 2001. Initially available at

www.semi.org September 2001; to be published November 2001.

1 Purpose

1.1 This document specifies dimensions of mounting

base and their clearance hole sizes for bolts and the hole

locations of diaphragm valves used with metric PFA

tubes in liquid chemical distribution facilities and

process equipment for semiconductor and flat panel

display manufacturing.

1.2 To avoid any disturbance of future development

and to facilitate interchangeability of diaphragm valves,

this document has a limited scope as specified in

Section 2.

2 Scope

2.1 This document applies to mounting bases for two

way valves with a diaphragm designed to shut off

and/or regulate a liquid chemical flow in tubes whose

sizes are listed in Table 1.

2.2 The valves are made from materials such as PTFE

or PFA, which have high corrosion resistance and low

contamination contribution to the fluid.

2.3 This standard does not purport to address safety

issues, if any, associated with its use. It is the

responsibility of the user of this standard to establish

appropriate safety and health practices and determine

the applicability of regulatory limitations prior to use.

3 Referenced Standards

3.1 ISO Standards

ISO 273 — Fasteners – Clearance Holes for Bolts and

Screws

ISO 2768-1 — General Tolerance – Part 1: Tolerances

for linear and angular dimensions without individual

tolerance indications

3.2 JIS Standards

JIS B 1001 — Diameter of Clearance Holes and

Counterbores for Bolts and Screws

1 International Organization for Standardization (ISO), 1, rue de

Varembé, Case postale 56, CH-1211 Genève 20, Switzerland.

2 Japan Standards Association, 4-1-24, Akasaka, Minato-ku, Tokyo,

Japan 107-8440.

JIS B 0405 — General Tolerance – Part 1: Tolerances

for linear and angular dimensions without individual

tolerance indications

NOTE 1: Unless otherwise indicated, all documents cited

shall be the latest published versions.

4 Terminology

4.1 Abbreviations and Acronyms

4.1.1 PFA — tetrafluoroethylene perfluoroalkylvinyl-

ether copolymer

4.1.2 PTFE — polytetrafluoroethylene

4.2 Definitions

4.2.1 back pressure — a maximum allowable pressure

applied to outlet of a diaphragm valve.

4.2.2 liquid chemicals — acid, alkali, organic solvent,

and pure water used for wet stations; resists and devel-

opers used for track system; and other chemicals used

for process or maintenance (such as slurry of chemical-

mechanical polishing) of equipment or facilities.

4.2.3 mounting bases — plates which are attached to

diaphragm valves to mount the valves to equipment or a

facility.

5 Dimensional Specification

5.1 Mounting Base Dimensions — the length (l) and

width (w) of the mount base plate indicated in the

Figure 1 and the values for different tube sizes are

specified in Table 1.

5.2 Clearance Hole Locations — the location of the

clearance holes for bolts are indicated with “w” and “l”

in the Figure 1 and the values for different tube sizes

are specified in Table 1.

5.3 Clearance Hole Sizes — the size of clearance holes

(φD) for different tube sizes are specified in the Table 1

according to ISO 273 (JIS B 1001).