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SEMI F66-1101 © SEMI 2001 1 SEMI F66-1101 SPECIFICA TION FOR PORT M A RK ING AND SYMBOL OF STA I NLESS STEEL VESSELS FOR L IQUID CHEMICA LS This spe cification w as technically approved by the Global L iquid Chemica l Di…

SEMI F65-1101 © SEMI 2001 2

5.4 Where the dimension depends on the valve design considering the back pressure, the upper row in Table 1

applies to the valves that withstand up to 0.2 megapascals (MPa) (29 pounds per square inch (psi)) back pressure,

and the lower row applies to the valves that withstand more than 0.2 MPa (29 psi) back pressure.

φD

w’ w

l’

Figure 1

Top View of A Typical Diaphragm Valve with A Mounting Base

Table 1 Dimensional Specifications

Tube Size (mm) (OD / ID)* Back Pressure

(Mpa)

l’ (mm) l (mm) w’ (mm) w (mm)

D (mm)

Bolt Type

(example)

≤ 0.2

60 48

25 / 22

> 0.2

68 56

96 84 7 M6

≤ 0.2

44 32 76 64

19 / 16

> 0.2

52 40 84 72

≤ 0.2

34 22 62 50

12 / 10

> 0.2

46 34 70 58

7M6

≤ 0.2

34 22 62 50

10 / 8

> 0.2

46 34 68 56

7M6

≤ 0.2

32 20 56 44

6 / 4

> 0.2

40 28 60 48

Note 1: OD and ID are outside diameter and inside diameter of the tube respectively.

Note 2: Refer to ISO 2768-1 or JIS B 0405 for tolerances.

6 Measurements

6.1 The mounting base must be conditioned for a minimum of one hour in an air environment of 23 ± 3ºC (73.4 ±

5.4ºF) prior to measuring the dimensions.

NOTICE: SEMI makes no warranties or representations as to the suitability of the standards set forth herein for any

particular application. The determination of the suitability of the standard is solely the responsibility of the user.

Users are cautioned to refer to manufacturer's instructions, product labels, product data sheets, and other relevant

literature, respecting any materials or equipment mentioned herein. These standards are subject to change without

notice.

By publication of this standard, Semiconductor Equipment and Materials International (SEMI) takes no position

respecting the validity of any patent rights or copyrights asserted in connection with any items mentioned in this

standard. Users of this standard are expressly advised that determination of any such patent rights or copyrights, and

the risk of infringement of such rights are entirely their own responsibility.

International), 3081 Zanker Road, San Jose, CA 95134. Reproduction o

the contents in whole or in part is forbidden without express written

consent of SEMI.

SEMI F66-1101 © SEMI 20011

SEMI F66-1101

SPECIFICATION FOR PORT MARKING AND SYMBOL OF STAINLESS

STEEL VESSELS FOR LIQUID CHEMICALS

This specification was technically approved by the Global Liquid Chemical Distribution Systems Committee

and is the direct responsibility of the Japanese Liquid Chemical Distribution Systems Committee. Current

edition approved by the Japanese Regional Standards Committee on August 3, 2001. Initially available at

www.semi.org September 2001; to be published November 2001.

1 Purpose

1.1 This document specifies port marking and symbol

of stainless steel vessels for liquid chemicals used in

semiconductor and flat panel display manufacturing

equipment and liquid chemical distribution facilities.

2 Scope

2.1 This document covers stainless steel vessels with

tubes that penetrate into the vessels as inlets or outlets

of liquid chemical to/from the vessels.

2.2 A vessel which uses coupling (quick coupling) at

its tube end (port) is excepted from the scope.

2.3 This standard does not purport to address safety

issues, if any, associated with its use. It is the

responsibility of the user of this standard to establish

appropriate safety and health practices and determine

the applicability of regulatory limitations prior to use.

3 Referenced Standards

3.1 None.

4 Terminology

4.1 dip tube — a piece of tube which penetrates into a

vessel as an inlet or outlet of liquid chemical to/from

the vessel.

4.2 liquid chemical — organic or inorganic liquid

chemical used for semiconductor or flat panel display

manufacturing.

4.3 port — an end of a tube attached to a vessel.

5 Requirements for Port Marking

5.1 The dip tube port shall be marked as “DIP”. If

more than one dip tube port exists on a vessel, each port

shall be marked as “DIP”.

5.2 Additional Marking — A description to identify

multiple ports may be added to the dip port marking

such as DIP-1 or DIP (1).

5.3 Location of Marking — “DIP” marking shall be

located where it will clearly identify the dip tube port.

If more than one dip tube ports exist on a vessel, each

marking shall be located so that the corresponding port

is clearly identified.

5.4 Method of Marking — The marking shall be

engraved, etched, or labeled properly so that the “DIP”

marking shall not be removed. Color of the marking is

optional.

5.5 Size of Marking — The marking shall be sized so

that it is clearly readable.

6 Requirements for Symbol

6.1 A symbol illustrated in Figure 1 shall be used to

draw a stainless steel vessel with a dip tube. A dip tube

shall be identified in the symbol as a line penetrating

into a rectangle.

6.2 If more than one dip tube exists on a vessel, the

symbol shall have the same number of lines which

correspond to the dip tubes.

Figure 1

Symbol for Stainless Steel Vessel with a Dip Tube

NOTICE: SEMI makes no warranties or

representations as to the suitability of the standards set

forth herein for any particular application. The

determination of the suitability of the standard is solely

the responsibility of the user. Users are cautioned to

refer to manufacturer' s instructions, product labels,

product data sheets, and other relevant literature,

respecting any materials or equipment mentioned

herein. These standards are subject to change without

notice.

By publication of this standard, Semiconductor

Equipment and Materials International (SEMI) takes no

position respecting the validity of any patent rights or

copyrights asserted in connection with any items

mentioned in this standard. Users of this standard are

expressly advised that determination of any such patent

rights or copyrights, and the risk of infringement of

such rights are entirely their own responsibility.

International), 3081 Zanker Road, San Jose, CA 95134. Reproduction o

the contents in whole or in part is forbidden without express written

consent of SEMI.