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SEMI F69-0302 © SEMI 2002 3 NOTE 1: Plane of g as stic ks is pa rallel to shock/v ibe table and transv erse to test input. Figure 1 Horizonta l Orientation NOT E 1: Plane and ax es of gas sticks are nor mal to shock /vib…

SEMI F69-0302 © SEMI 2002 2

systems to the equivalent physical stress of a 4828

kilometer (3000 mile) motor freight shipment over

improved or paved highways. Because vibration tables

are commonly single-axis devices, the gas delivery

systems will be subjected to single-axis random

vibrational frequencies in the range of 5—500 Hz,

sequentially, in each of its three axes.

6.2 Prior to initiating the test, examine the gas delivery

systems for physical defects and document the results.

6.3 Prior to initiating the test, thoroughly prepare the

gas delivery systems for testing. This includes, but is

not limited to, insuring all fasteners and sealing

mechanisms are tightened to manufacturers’ or design

specifications.

6.4 The MIL-STD-810 transportation test

recommended herein provides for different acceleration

levels for each of the 3 axes of the device under test.

Because the majority of gas delivery systems are

shipped in a vertical orientation, this convention is

maintained for the purpose of the transportation

simulation tests. Thus the vertical orientation would

have the gas delivery system mounted vertically with

respect to the vibration table top (see Figure 2), the

longitudinal orientation would have the gas delivery

system mounted flat to the vibration table top (see

Figure 1), and the transverse orientation would have the

gas delivery system mounted on its side, against the

vibration table top (see Figure 3). Note that the terms

“vertical,” “longitudinal,” and “transverse,” are

contextual to motor freight transport, and receive

different acceleration levels, within MIL-STD-810. A

simplified and conservative approach to applying MIL-

STD-810 involves applying the highest acceleration

level, associated with the vertical axis, to all three

orientations as illustrated in Figures 1–3.

6.5 Mount the gas delivery system, in any of its

untested axes, securely to the vibration table. See

Figures 1–3.

6.6 Prior to initiating the test at the test site, make

certain that the gas delivery system is leak tight using

inboard test procedures per SEMI F1. A bag leak test

method is recommended in conjunction with this test.

6.7 Initiate and run for 3 hours the vibration test

corresponding to the orientation of the gas delivery

system.

6.8 At the conclusion of the test, examine the gas panel

for physical defects and document the results

6.9 At the conclusion of the test, leak test the gas

delivery system using inboard leak procedures per

SEMI F1. A bag leak test method is recommended in

conjunction with this test. Alternatively, by agreement

with the customer, all leak testing may be withheld until

completion of all shock and vibration testing. This

presumes specific failure mode information is not

required.

6.10 Repeat Sections 6.5 through 6.9 until all 3 axes

are tested.

6.11 The post-test report should include, at minimum,

the following:

(1) Pre-test examination results.

(2) Pre-test leak rates.

(3) Summary and chronology of test events, test

interruptions, and test failures.

(4) All vibration measurement data.

(5) Post-test examination results.

(6) Post-test leak rates.

SEMI F69-0302 © SEMI 2002 3

NOTE 1: Plane of gas sticks is parallel to shock/vibe table and transverse to test input.

Figure 1

Horizontal Orientation

NOTE 1: Plane and axes of gas sticks are normal to shock/vibe table and parrallel to test input.

Figure 2

Vertical Orientation

SEMI F69-0302 © SEMI 2002 4

NOTE 1: Plane of gas sticks is normal to shock/vibe table and axes of sticks are transverse to test input.

Figure 3

Lateral Orientation

7 Shock Testing

7.1 In general, conduct shock testing according to

MIL-STD-810, Part Two, Laboratory Test Method

516.5, Procedure 1 (Functional Shock). This test will

subject the gas delivery system to a peak acceleration of

40 g’s employing a terminal peak sawtooth shock pulse.

7.2 The test should be conducted in each of the gas

delivery system’s three axes as illustrated in Figures 1–

7.3 Prior to initiating the test, examine the gas delivery

system for physical defects and document the results.

7.4 Prior to initiating the test, thoroughly prepare the

gas delivery system for testing. This includes, but is

not limited to, insuring all fasteners and sealing

mechanisms are tightened to manufacturers’ or design

specifications.

7.5 Prior to initiating the test, make certain that the gas

delivery system is leak tight using inboard test

procedures per SEMI F1. A bag leak test method is

recommended in conjunction with this test.

7.6 Secure the gas delivery system under test to the

shock table in one of its three orientations: horizontal,

vertical, or lateral. The gas delivery system should be

fastened directly to the table with no cushion or other

intermediary between the two. A rigid mounting is

desirable, taking caution not to introduce stress to the

gas delivery system.

7.7 Conduct the shock test.

7.8 At the conclusion of the test, examine the gas panel

for physical defects and document the results.

7.9 If, as a result of the test, an apparent physical

failure occurred that would likely prevent the safe

operation of the gas panel and/or would likely

compromise the leak tightness of the gas panel, the

physical failure should be corrected, the gas panel

retested for leak tightness, and the test repeated.

7.10 At the conclusion of the test, leak test the gas