semi合集-English.pdf - 第4206页

SEMI F73-1102 © SEMI 2002 8 1 5 6 7 10 11 12 13 9 8 2 B D C E F H G J I K L M N O P Q S R T U 3 4 14 A 15 16 Figure A1-3 Sample A22- 6/5/97 – Micro 3 - Pits D10 and E10, G13. Grain, Twin Boundaries, White Sample Prep ara…

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Figure A1-1
Sample A22-6/5/97 – Micro 1 - Inclusion J7, K7, I8, J8, K8; Pits A8, C7 and C8, E9, F8, J9, I12, I15.
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Figure A1-2
Sample A22-6/5/97 – Micro 2 - Stringer G14 to P3; Pit C13 and C14
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Figure A1-3
Sample A22-6/5/97 – Micro 3 - Pits D10 and E10, G13. Grain, Twin Boundaries, White Sample Preparation
Debris Not Counted.
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APPENDIX 2
EXAMPLE OF DEFECTS
NOTE: The material in this appendix is an official part of SEMI F73 and was approved by full letter ballot procedures.
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Figure A2-1
Diffuse Black Spots in Grids F4, H8, and Along Rows 11 Through 14 are Believed to be Surface
Contamination, Probably Hydrocarbon, and Should be Counted. This Type of Contamination Should be
Apparent in Surface Analysis (Auger or ESCA) if it is Not an Artifact of Sample Preparation. The “Mottled”
Appearance Should Not be Counted.