semi合集-English.pdf - 第4259页
SEMI F78-0304 © SEMI 2003, 2004 12 Figure 4 Tube Facing to Remove Distorted Materi al Figure 5 Weld Fit-Up Gap Not to Exceed 0.003 in. (0.08 m m)
SEMI F78-0304 © SEMI 2003, 2004 11
(a) Preferred.
(b) Alternate.
Figure 3
All Couponing Shall Use the System ID Purge Gas
SEMI F78-0304 © SEMI 2003, 2004 12
Figure 4
Tube Facing to Remove Distorted Material
Figure 5
Weld Fit-Up Gap Not to Exceed 0.003 in. (0.08 mm)
SEMI F78-0304 © SEMI 2003, 2004 13
Figure 6
Maximum Open Gap Not to Exced 0.006 in. (0.15 mm)
Figure 7
OD or ID Chamfering