semi合集-English.pdf - 第4277页

SEMI F79-0703 © SEMI 2003 14 SEMI Gas # Chemical Name Cate gory Symbol Formula Synonym 72 Perchloryl Fluoride 8 ClO3F ClO 3 F 143 Phosphorus Pentafluoride 8 PF5 PF 5 62 Phosphorus Trifluoride 8 PF3 PF 3 243 Rhenium Hexaf…

100%1 / 7923
SEMI F79-0703 © SEMI 2003 13
SEMI Gas # Chemical Name Category Symbol Formula Synonym
10 Hydrogen Bromide 7 HBr HBr
11 Hydrogen Chloride 7 HCl HCl
17 Hydrogen Iodide 7 HI HI
183 Methyltrichlorosilane 7 CH3Cl3Si CH
3
SiCl
3
MTS
238 Oxygen Dichloride 7 OCl2 OCl
2
60 Phosgene 7 CCl2O CCl
2
O Carbonyl Chloride
102 Phosphorus Oxychloride 7 POCl3 POCl
3
193 Phosphorus Trichloride 7 PCL3 PCl
3
278 Silicon Tetrabromide 7 Br4Si Br
4
Si SiBr4; Tetrabromosilane
108 Silicon Tetrachloride 7 SiCl4 SiCl
4
Tetrachlorosilane
189 Sulfur Monochloride 7 S2Cl2 S
2
Cl
2
248 Tetrachlorodiborane 7 B2Cl4 B
2
Cl
4
145 Tin Tetrachloride 7 SnCl4 SnCl
4
Tetrachlorostannane
114 Titanium Tetrachloride 7 TiCl4 TiCl
4
254 Titanium Tetraiodide 7 TiI4 TiI
4
255 Tribromostibine 7 SbBr3 SbBr
3
147 Trichlorosilane 7 SiHCl3 SiHCl
3
256 Trichlorostibine 7 SbCl3 SbCl
3
6.8 Fluorine and Fluorides 8
226 Aluminum Trifluoride 8 AlF3 AlF
3
96 Arsenic Pentafluoride 8 AsF5 AsF
5
195 Arsenic Trifluoride 8 AsF3 AsF
3
48 Boron Trifluoride 8 BF3 BF
3
116 Bromine Pentafluoride 8 BrF5 BrF
5
76 Bromine Trifluoride 8 BrF3 BrF
3
202 Chlorine Pentafluoride 8 ClF5 ClF
5
77 Chlorine Trifluoride 8 ClF3 ClF
3
232 Difluoroamidogen 8 NF2 NF
2
134 Difluorosilane 8 SiH2F2 SiH
2
F
2
326 Disilane Hexafluoride 8 SiF6 SiF
6
F
6
Si
2
; Hexafluorodisilane
18 Fluorine 8 F2 F
2
327 Fluoro Silane 8 SiH3F SiH
3
F H
3
FSi
99 Germanium Tetrafluoride 8 GeF4 GeF
4
Tetrafluorogermane
12 Hydrogen Fluoride 8 HF HF
115 Iodine Pentafluoride 8 IF5 IF
5
124 Molybdenum Hexafluoride 8 MoF6 MoF
6
53 Nitrogen Trifluoride 8 NF3 NF
3
41 Oxygen Difluoride 8 OF2 OF
2
SEMI F79-0703 © SEMI 2003
14
SEMI Gas # Chemical Name Category Symbol Formula Synonym
72 Perchloryl Fluoride 8 ClO3F ClO
3
F
143 Phosphorus Pentafluoride 8 PF5 PF
5
62 Phosphorus Trifluoride 8 PF3 PF
3
243 Rhenium Hexafloride 8 ReF6 ReF
6
325 Selenium Hexafluoride 8 SeF6 SeF
6
UN 2194; Selenium fluoride
88 Silicon Tetrafluoride 8 SiF4 SiF
4
110 Sulfur Hexafluoride 8 SF6 SF
6
86 Sulfur Tetrafluoride 8 SF4 SF
4
87 Sulfuryl Fluoride 8 SO2F2 SO
2
F
2
247 Tellurium Hexafluoride 8 TeF6 TeF
6
249 Tetrafluorodiborane 8 B2F4 B
2
F
4
157 Tetrafluorohydrazine 8 N2F4 F
2
NNF
2
Dinitrogen Tetrafluoride
261 Trifluorosilane 8 SiHF3 SiHF
3
121 Tungsten Hexafluoride 8 WF6 WF
6
123 Uranium Hexafluoride 8 UF6 UF
6
324 Xenon difluoride 8 XeF2 XeF
2
F
2
Xe; Xenon fluoride
6.9 Organo-metallic and
Siloxanes
9
212 Dichlorodimethylsilane 9 C2H6SiCl2 (CH
3
)
2
SiCl
2
188 Diethoxy Dimethyl Silane 9 C6H16O2Si (C
2
H
5
O)
2
Si(CH
3
)
2
154 Diethylsilane 9 C4H12Si (C
2
H
5
)
2
SiH
2
214 Diethylzinc 9 C4H10Zn Zn(C
2
H
5
)
2
300 Dimethoxydimethyl silane 9 C4H12O2Si (CH
3
O)
2
Si(CH
3
)
2
KBM 22
284 Dimethyl Selenide 9 C2H6Se C
2
H
6
Se (CH3)2Se; Selenium dimethyl
164 Dimethylaluminum-hydride 9 C2H7Al (CH
3
)
2
AlH DMAH
218 Dimethylcadmium 9 C2H6Cd (CH
3
)
2
Cd
219 Dimethylsilane 9 C2H8Si (CH
3
)
2
SiH
2
220 Dimethyltellurium 9 C2H6Te (CH
3
)
2
Te
135 Dimethylzinc 9 C2H6Zn (CH
3
)
2
Zn
285 Ethoxy Silane 9 C2H8OSi C
2
H
8
OSi
224 Fluorotriethoxysilane 9 C6H15OSiF (C
2
H
5
O)
3
SiF
139 Hexamethyldisilane 9 C6H18Si2 (CH
3
)
3
Si
2
(CH
3
)
3
HMDSi, HMDS
227 Hexamethyldisilazane 9 C6H19Si2N (CH
3
)
6
Si
2
NH
228 Hexamethyldisiloxane 9 C6H18Si2O (CH
3
)
6
Si
2
O
279 Tantalum (V) Ethoxide 9 C10H25O5Ta C
10
H
25
O
5
Ta Ta(Oet)5
274 TEAsat 9 C6H15O4As (C
2
H
5
O)
3
AsO
161 Tertiarybutylarsine 9 C4H11As C(CH
3
)
3
AsH
2
TBA
162 Tertiarybutylphosphine 9 C4H11P C(CH
3
)
3
PH
2
TBP
144 Tetraethoxysilane 9 C8H20O4Si (C
2
H
5
O)
4
Si TEOS
SEMI F79-0703 © SEMI 2003 15
SEMI Gas # Chemical Name Category Symbol Formula Synonym
316 Tetraethyl lead 9 C8H20Pb (C
2
H
5
)
4
Pb Plumbane, tetraethyl; UN1649
317 Tetraethyl silane 9 C8H20Si C
8
H
20
Si Tetraethylsilane
315 Tetraethylgermane 9 C8H20Ge (C
2
H
5
)
4
Ge
(C2H5)4Ge; Germanium
tetraethyl
282 Tetrakis (diethylamino) titanium 9 C16H40N4Ti C
16
H
40
N
4
Ti
318
Tetrakis (dimethylamino)
titanium
9 C8H24N4Ti C
8
H
24
N
4
Ti
301 Tetramethoxy Silane 9 C4H12O4Si (CH
3
O)
4
Si Silicic Acid (H4SiO4)
299 Tetramethoxygermanium 9 C4H12GeO4 (CH
3
O)
4
Ge Ge(OMe)4
302 Tetramethyl Lead 9 C4H12Pb (CH
3
)
4
Pb
(CH3)4Pb; Plumbane,
tetramethyl;
252 Tetramethyl Tin 9 C4H12Sn (CH
3
)
4
Sn
158 Tetramethylcyclotetra-siloxane 9 C4H16Si4O4 (CH
3
)
4
H
4
(SiO)
4
TMCTS
250 Tetramethylgermanium 9 C4H12Ge (CH
3
)
4
Ge
251 Tetramethylsilane 9 C4H12Si (CH
3
)
4
Si
194 Titanium Tetraisopropoxide 9 C12H28O4Ti Ti(OC
3
H
7
)
4
146 Tributylaluminum 9 C12H27Al
(CH
3
CH
2
CH
2
CH
2
)
3
Al
TBAl
307 Triethoxy Arsine 9 C6H15AsO3 (C
2
H
5
O)
3
As Triethyl ester arsenous acid
312 Triethoxy Silane 9 C6H16O3Si (C
2
H
5
O)
3
SiH
308 Triethoxyborane 9 C6H15BO3 (C
2
H
5
O)
3
B Boron triethoxide;
311 Triethoxyphosphine 9 C6H15O3P (C
2
H
5
O)
3
P Triethyl phosphite; UN2323
306 Triethyl Arsine 9 C6H15As (C
2
H
5
)
3
As Arsine; Triethylarsenic
313 Triethyl Silane 9 C6H16Si (C
2
H
5
)
3
SiH (C2H5)3SiH;
257 Triethylaluminum 9 C6H15Al (C
2
H
5
)
3
Al
258 Triethylantimony 9 C6H15Sb (C
2
H
5
)
3
Sb
163 Triethylborate 9 C6H15O3B B(OC
2
H
5
)
3
TEB, Triethoxyborane
148 Triethylgallium 9 C6H15Ga (C
2
H
5
)
3
Ga TEGa
309 Triethylindium 9 C6H15In (C
2
H
5
)
3
In Indium triethyl
262 Triisobutylaluminum 9 C12H27Al (C
4
H
9
)
3
Al
287 Trimethoxy Silane 9 C3H10O3Si C
3
H
10
O
3
Si
131 Trimethoxyborine 9 C3H9BO3 B(OCH
3
)
3
TMB, Trimethylborate
190 Trimethyl Silane 9 C3H10Si (CH
3
)
3
SiH
149 Trimethylaluminum 9 C3H9Al Al(CH
3
)
3
TMA, TMAl
150 Trimethylantimony 9 C3H9Sb (CH
3
)
3
Sb Trimethylstibene
151 Trimethylarsenic 9 C3H9As (CH
3
)
3
As Trimethylarsine, TMAs
277 Trimethylborane 9 C3H9B (CH
3
)
3
B
152 Trimethylgallium 9 C3H9Ga Ga(CH
3
)
3
TMGa
153 Trimethylindium 9 C3H9In (CH
3
)
3
In TMIn
133 Trimethylphosphite 9 C3H9PO3 (CH
3
O)
3
P TMPi, Trimethoxyphosphine