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SEMI E62-0705 © SEMI 1997, 2005 8 APPENDIX 1 APPLICATION NOTES NOTICE : This appendix was approved as an offi cial part of SEMI E62, but the reco mmendations in this appendix are optional and are not required to conform …

SEMI E62-0705 © SEMI 1997, 2005 7

Symbol

Used

Value Specified Datum Measured from Feature Measured to

z32 84.5 mm (3.33 in.) maximum

for 13-wafer cassette

and

144.5 mm (5.69 in.) maximum

for 25-wafer cassette

z30 above horizontal datum plane inside edge of door seal zone

z33 93.5 ± 0.25 mm (3.681 ± 0.010 in.)

for 13-wafer cassette

and

153.5 ± 0.25 mm (6.043 ± 0.010 in.)

for 25-wafer cassette

z30 above horizontal datum plane outside edge of door seal zone

z34 95.5 ± 0.25 mm (3.760 ± 0.010 in.)

for 13-wafer cassette

and

155.5 ± 0.25 mm (6.122 ± 0.010 in.)

for 25-wafer cassette

z30 above horizontal datum plane inside edge of frame seal zone

z35 104.5 mm (4.11 in.) minimum

for 13-wafer cassette

and

164.5 mm (6.48 in.) minimum

for 25-wafer cassette

z30 above horizontal datum plane outside edge of frame seal

zone

z37 ± 0.2 mm

(± 0.008 in.)

position of the load port door before

opening

position of the load port door

after closing

SEMI E62-0705 © SEMI 1997, 2005 8

APPENDIX 1

APPLICATION NOTES

NOTICE: This appendix was approved as an official part of SEMI E62, but the recommendations in this appendix are optional

and are not required to conform to this standard.

A1-1 Perpendicularity and parallelism are implicitly defined in the geometric tolerances.

A1-2 ¶6.1 discusses the need for clearance between the box and the tool’s front-opening interface when the box is

placed on the load port. After the box is placed on the load port, the kinematic couplings will move the box forward

to engage with the tool’s front-opening interface. The possibility of human fingers being pinched between the box

and the tool's front-opening interface may be a safety concern for tool designers.

NOTICE: SEMI makes no warranties or representations as to the suitability of the standards set forth herein for any

particular application. The determination of the suitability of the standard is solely the responsibility of the user.

Users are cautioned to refer to manufacturer's instructions, product labels, product data sheets, and other relevant

literature, respecting any materials or equipment mentioned herein. These standards are subject to change without

notice.

By publication of this standard, Semiconductor Equipment and Materials International (SEMI) takes no position

respecting the validity of any patent rights or copyrights asserted in connection with any items mentioned in this

standard. Users of this standard are expressly advised that determination of any such patent rights or copyrights, and

the risk of infringement of such rights are entirely their own responsibility.

International), 3081 Zanker Road, San Jose, CA 95134. Reproduction of

the contents in whole or in part is forbidden without express written

consent of SEMI.

SEMI E63-1104 © SEMI 1997, 2004 1

SEMI E63-1104

MECHANICAL SPECIFICATION FOR 300 mm BOX OPENER/LOADER

TO TOOL STANDARD (BOLTS-M) INTERFACE

This specification was technically approved by the Global Physical Interfaces & Carriers Committee and is

the direct responsibility of the North American Physical Interfaces & Carriers Committee. Current edition

approved by the North American Regional Standards Committee on July 11, 2004 and August 16, 2004.

Initially available at www.semi.org September 2004; to be published November 2004. Originally published

in 1997, previously published June 2000.

1 Purpose

1.1 This standard specifies the tool side of the

mechanical interface between the main part of a process

or metrology tool and the component that opens boxes

and presents the boxes to the tool wafer handler for

unloading and loading 300 mm wafers. The box

opener/loader unit would include one or more load

ports (that would conform to SEMI E15.1) as well as

storage capacity for empty boxes or waiting lots (if

needed by the tool throughput). The box opener/loader

unit might not only be configured to handle boxes (that

would conform to SEMI E47.1 and SEMI E62) but also

to open cassettes (that would conform to SEMI E1.9).

This standard defines one interface for all such carriers

and for any carrier capacity (13 and 25 wafers).

2 Scope

2.1 This standard is intended to set an appropriate level

of specification that places minimal limits on

innovation while ensuring modularity and

interchangeability at all mechanical interfaces. Only the

mechanical interface is specified; no materials

requirements or micro-contamination limits are given.

The interface specified in this standard is designed for a

tool with a sealed minienvironment, but it could also

just be a well-defined automation interface. This

interface is not intended to provide high repeatability or

rapid removal (both of which can be provided by other

couplings in the box opener/loader unit). This

specification also does not apply when load ports are

stacked one on top of the other. This specification does

not apply when inserting open cassettes into load-lock

chambers directly.

NOTICE: This standard does not purport to address

safety issues, if any, associated with its use. It is the

responsibility of the users of this standard to establish

appropriate safety and health practices and determine

the applicability of regulatory or other limitations prior

to use.

3 Referenced Standards

3.1 SEMI Standards

SEMI E1.9  Mechanical Specification for Cassettes

Used to Transport and Store 300 mm Wafers

SEMI E15  Specification for Tool Load Port

SEMI E15.1  Specification for 300 mm Tool Load

Port

SEMI E19  Standard Mechanical Interface (SMIF)

SEMI E47.1  Provisional Mechanical Specification

for Boxes and Pods Used to Transport and Store 300

mm Wafers

SEMI E57  Mechanical Specification for Kinematic

Couplings Used to Align and Support 300 mm Wafer

Carriers

SEMI E62  Provisional Specification for 300 mm

Front-Opening Interface Mechanical Standard (FIMS)

3.2 ISO Specification

ISO/DIS 68-1  ISO General Purpose Screw Threads

 Basic Profile  Part I: Metric Screw Threads

NOTICE: Unless otherwise indicated, all documents

cited shall be the latest published versions.

4 Terminology

4.1 Definitions

4.1.1 bilateral datum plane  a vertical plane that

bisects the wafers and that is perpendicular to both the

horizontal and facial datum planes (as defined in SEMI

E57).

4.1.2 BOLTS plane  a plane parallel to the facial

datum plane near the front of the tool where the box

opener/loader is attached.

1 International Organization for Standardization,ISO Central

Secretariat, 1, rue de Varembé, Case postale 56, CH-1211 Geneva 20,

Switzerland. Telephone: 41.22.749.01.11; Fax: 41.22.733.34.30,

Website: /www.iso.ch