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SEMI F97-0305 © SEMI 2005 2 3 Limitations 3.1 This st andard f ocuses on the sem antic definition of d ata exchanged between FMC S and F PUs. It is n ot intended to specify the protocols to be used f or data be ing excha…

SEMI F97-0305 © SEMI 2005 1

SEMI F97-0305

SPECIFICATION FOR FACILITY PACKAGE INTEGRATION,

MONITORING AND CONTROL

This specification was technically approved by the Global Facilities Committee and is the direct

responsibility of the European Global Facilities Committee. Current edition approved by the European

Regional Standards Committee on November 10, 2004. Initially available at www.semi.org January 2005; to

be published March 2005.

1 Purpose

1.1 The purpose of this specification is to provide the requirements for the architecture, functionality and interfaces

for Facility Monitoring and Control Systems and the various Facility Package Units to enable a standardized and

integrated communication between them. This specification is appended with related information to provide

application examples.

1.2 Background and Motivation

1.2.1 Today, the suppliers of Facility Package Units (e.g., chemicals, power supply, gases, HVAC) are often using

individual communication concepts. This leads to high efforts to specify the communication structures between

Facility Package Units (FPU) and the Facility Monitoring and Control Systems (FMCS), to evaluate the quoted

solutions and to eventually integrate these units. These individual, not standardized concepts today are not reusable,

bear risks in execution and lead to high maintenance costs.

1.2.2 This specification is a first step to standardize the communication between facility and monitoring

components. Therefore, it focuses in its scope to a small set of requirements which are common to all FPUs. As

this communication concept is adopted by the various FPU suppliers and their customers, more specific standards

describing particular FPUs and their services may evolve.

1.3 Who and what is addressed by this standard.

1.3.1 A standardization of the communication concept between FMCS and FPUs will support Facility Package Unit

manufacturers, general contractors, system integrators, purchasers, and control system manufacturers. It will lead to

substantially reduced costs, more reliable execution times, and optimized maintenance concepts.

2 Scope

2.1 This standard specifies the requirements for the architecture, common services, data, and its semantic meaning

to integrate the FPUs into the FMCS. For this purpose, a basic set of common services (operations) between the

FMCS and the FPUs are specified to exchange FPU status information and data. In addition, the state models for

FPUs are described.

2.2 Out of scope for this standard are:

 Services of FMCS provided to interface to Manufacturing Execution Systems or Enterprise Resource Planning

Systems,

 Specification of functionality of particular FMCS functions (graphical user interface (GUI), data archives,

reporting archives, alarm handling, etc.), and

 The specification of the interface between FPU control level and FPU field level.

2.3 Applicability — This standard applies to the field of facility management and is targeted for FPU suppliers and

FMCS suppliers for systems integration, engineering and commissioning as well as the operation of such systems by

the purchasers.

NOTICE: This standard does not purport to address safety issues, if any, associated with its use. It is the

responsibility of the users of this standard to establish appropriate safety and health practices and determine the

applicability of regulatory or other limitations prior to use.

SEMI F97-0305 © SEMI 2005 2

3 Limitations

3.1 This standard focuses on the semantic definition of data exchanged between FMCS and FPUs. It is not intended

to specify the protocols to be used for data being exchanged.

3.2 The standard does not focus on any specific hardware or software products to be used.

4 Referenced Standards

4.1 SEMI Standards

SEMI E6 — Guide for Semiconductor Equipment Installation Documentation

SEMI E30 — Generic Model for Communications and Control of Manufacturing Equipment (GEM)

SEMI E54 — Sensor Actuator Network Standards Series

4.2 Other Standards

4.2.1 OPC — Data Access Automation Interface Standard, Version 2.0, OPC Foundation 1998, available from

http://www.opcfoundation.com/

NOTICE: Unless otherwise indicated, all documents cited shall be the latest published versions.

5 Terminology

5.1 Abbreviations and Acronyms

5.1.1 CPU — Central Processing Unit

5.1.2 ERP — Enterprise Resource Planning

5.1.3 FMCS — Facility Monitoring and Control System

5.1.4 FPU — Facility Package Unit

5.1.5 GUI — Graphical User Interface

5.1.6 HVAC — Heating Ventilation and Air Conditioning

5.1.7 I/0 — Input/Output Device

5.1.8 IT System — Information System

5.1.9 MES — Manufacturing Execution System

5.1.10 OLE — Object Linking and Embedding

5.1.11 OP-Mode — Operating Mode

5.1.12 OPC — OLE for Process Control

5.1.13 PLC — Programmable Logic Controller

5.1.14 UPW — Ultra Pure Water

5.2 Definitions

5.2.1 alarm&event history — functionality inside a FMCS to store alarms and events in a persistent storage (e.g. a

database). Focus is to later retrieve alarms and events for investigation purposes.

5.2.2 Client/Server-System — a system consisting of two different sub systems: a server system which provides

services and client systems which access these services.

5.2.3 communication interface — interface of an IT system to communicate with other IT systems. Usually the

communication takes place via a network.

1 For OPC and OPC Foundation see OPC Foundation (http://www.opcfoundation.com/).

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5.2.4 data cache — unit within an IT system or FMCS being responsible for buffering data usually with the focus

of performance optimization.

5.2.5 facility monitoring and control system (FMCS) — IT System consisting of software and hardware components

that are used to monitor and control all FPUs as described in §2 . Typically a FMCS is implemented using a PC

based architecture. A FMCS in general consists of the following sub components:

 Software modules to monitor and control the FPU,

 Software module to cover alarm&event history,

 Report archive to store reports persistently,

 Data archive to store monitored data persistently,

 Human interface to provide access for human users to FMCS functionality, and

 Communication infrastructure to connect to the different FPUs and to external systems (e.g. Manufacturing

Execution System, Enterprise Resource Planning System).

5.2.6 facility system — describes an overall architecture in the context of facility monitoring and control. A Facility

System typically consists of 4 layers as described in §2.

5.2.7 FPU Control Level — describes a unit to monitor and/or control a certain piece of facility infrastructure. A

FPU owns a well defined interface that enables external IT systems to monitor (and control) activities running on the

specific FPU.

5.2.8 FPU Field Level — describes a unit of a FPU, such as sensors, actuators, aggregates or even an own

subcontrol level to control a certain piece of facility infrastructure in order to support all the necessary functions of

the FPU at the control level.

5.2.9 integration — covers the interconnection of FMCS and FPUs by Engineering and Commissioning with

respect to communication. It does not cover the Engineering and Commissioning of the FPUs themselves.

5.2.10 network — general term for a bus technology which includes field bus technology or local area networks.

5.2.11 programmable logic controller (PLC) — a system consisting of software and hardware usually to fulfill

monitor and control tasks. Typically a PLC comprises the following components:

 rack — accommodates the modules and connects them to each other;

 power supply — provides the internal supply voltages;

 central processing unit (CPU) — stores and processes the user program;

 signal modules — adapt the signals from the system to the internal signal level or control actuators via digital

and analog signals;

 function modules — execute complex or time-critical processes independently of the CPU; and

 communication processors — interface the programmable controllers to each other or to other devices via a

network.

5.2.11.1 A PLC may consist of several racks which are linked to one another via bus cables or may all be self

contained.

5.2.12 Tag — is a unique identifier within a FMCS to access information in a FPU. Assigned to each unique Tag is

the data necessary to select the access to a particular FPU on the Network and to access the particular information

within that FPU.

6 Overview

6.1.1 A facility system within this standard is described by four levels (see Figure 1).

 ERP/MES Level: consists of systems within the Enterprise Resource Planning and Manufacturing Execution

System,