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SEMI F97-0305 © SEMI 2005 15 Mainten ance-Mode No_Maintenance Maintenance 2 3 1 Figure 11 State Transition Diagram Main tenance-Mode Table 8 State Transition Table Main tenance-Mode Number Previous State Trigge r New Sta…

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Table 6 State Transition Table Warning-Mode
Number Previous State Trigger New State Actions Remark
1 (no state) Start up of FPU. No_Warning None.
2 No_Warning Warning event occurred. Warning FPU may perform
warning routines.
3 Warning Warning condition
disappeared.
No_Warning FPU releases
warning routines.
9.4.8 Error-Mode
9.4.8.1 Errors are being defined on a case by case basis by the purchaser and supplier of the FMCS and FPUs and
the system integrator. Error-Mode specifies whether an error occurred:
No_Error: No error present.
Error: Error present.
Error-Mode
No_Error Error
2
3
1
Figure 10
State Transition Diagram Error-Mode
Table 7 State Transition Table Error-Mode
Number Previous State Trigger New State Actions Remark
1 (no state) Start up of FPU. No_Error FPU may release
error routines.
2 No_Error Error occurred. Error FPU may perform
error routines.
3 Error Error condition
disappeared.
No_Error FPU may release
error routines.
9.4.9 Maintenance-Mode
9.4.9.1 Maintenance-Mode specifies whether maintenance is required or no maintenance is required:
No_Maintenance: No maintenance required.
Maintenance: Maintenance is required (at least one part of the FPU requires maintenance at the site of the
FPU).
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Maintenance-Mode
No_Maintenance Maintenance
2
3
1
Figure 11
State Transition Diagram Maintenance-Mode
Table 8 State Transition Table Maintenance-Mode
Number Previous State Trigger New State Actions Remark
1 (no state) Start up of FPU. No_Maintenance None.
2 No_Maintenance Error or preventive
maintenance event
occurred.
Maintenance FPU may request
maintenance.
3 Maintenance Error condition or
preventive maintenance
condition disappeared.
No_Maintenance None.
9.4.10 Simulation-Mode
9.4.10.1 Simulation-Mode specifies whether the FPU or parts of the FPU are simulated:
No_Simulation: FPU operates not in simulation mode (simulation turned off).
Simulation: FPU or parts of the FPU are simulated. FPU functions are performed using simulated I/O signals.
Simulation-Mode
No_Simulation Simulation
2
3
C
1
Figure 12
State Transition Diagram Simulation-Mode
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Table 9 State Transition Table Simulation-Mode
Number Previous State Trigger New State Actions Remark
1 (no state) Start up of FPU. No_Simulation or
Simulation
None. Dependent on local
operator action.
2 No_Simulation Local or remote
operator action.
Simulation FPU simulates parts
of FPU or the entire
FPU functions.
3 Simulation Local or remote
operator action.
No_Simulation FPU disables
simulation of parts of
the FPU or the entire
FPU functions.
9.5 Operations Between FMCS and FPUs
9.5.1 The Table below lists the operations between the FMCS and the FPU.
Table 10 Operation Definition
Operation Description Mandatory/Optional
Get Status FMCS requests status data from FPU. mandatory
Set Data FMCS requests FPU to update data in the FPU. optional
Get Data FMCS requests to retrieve data from the FPU. optional
9.5.2 Get Status — Is used by the FMCS to request the status of the FPU.
Table 11 Status Parameters
Parameter Description Direction Data Type
Tag Local identifier for the FMCS. FMCS ->
FPU
Out of scope.
Status value Status field values of the FPU. FPU ->
FMCS
See Table 12 for details.