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SEMI E63-1104 © SEMI 1997, 2004 2 4.1.3 box  a protective portable container for a cassette and/or su bstrate(s). 4.1.4 box opener/loade r  the equipm ent compone nt that opens wafer carrie rs (if needed) and presents …

SEMI E63-1104 © SEMI 1997, 2004 1

SEMI E63-1104

MECHANICAL SPECIFICATION FOR 300 mm BOX OPENER/LOADER

TO TOOL STANDARD (BOLTS-M) INTERFACE

This specification was technically approved by the Global Physical Interfaces & Carriers Committee and is

the direct responsibility of the North American Physical Interfaces & Carriers Committee. Current edition

approved by the North American Regional Standards Committee on July 11, 2004 and August 16, 2004.

Initially available at www.semi.org September 2004; to be published November 2004. Originally published

in 1997, previously published June 2000.

1 Purpose

1.1 This standard specifies the tool side of the

mechanical interface between the main part of a process

or metrology tool and the component that opens boxes

and presents the boxes to the tool wafer handler for

unloading and loading 300 mm wafers. The box

opener/loader unit would include one or more load

ports (that would conform to SEMI E15.1) as well as

storage capacity for empty boxes or waiting lots (if

needed by the tool throughput). The box opener/loader

unit might not only be configured to handle boxes (that

would conform to SEMI E47.1 and SEMI E62) but also

to open cassettes (that would conform to SEMI E1.9).

This standard defines one interface for all such carriers

and for any carrier capacity (13 and 25 wafers).

2 Scope

2.1 This standard is intended to set an appropriate level

of specification that places minimal limits on

innovation while ensuring modularity and

interchangeability at all mechanical interfaces. Only the

mechanical interface is specified; no materials

requirements or micro-contamination limits are given.

The interface specified in this standard is designed for a

tool with a sealed minienvironment, but it could also

just be a well-defined automation interface. This

interface is not intended to provide high repeatability or

rapid removal (both of which can be provided by other

couplings in the box opener/loader unit). This

specification also does not apply when load ports are

stacked one on top of the other. This specification does

not apply when inserting open cassettes into load-lock

chambers directly.

NOTICE: This standard does not purport to address

safety issues, if any, associated with its use. It is the

responsibility of the users of this standard to establish

appropriate safety and health practices and determine

the applicability of regulatory or other limitations prior

to use.

3 Referenced Standards

3.1 SEMI Standards

SEMI E1.9  Mechanical Specification for Cassettes

Used to Transport and Store 300 mm Wafers

SEMI E15  Specification for Tool Load Port

SEMI E15.1  Specification for 300 mm Tool Load

Port

SEMI E19  Standard Mechanical Interface (SMIF)

SEMI E47.1  Provisional Mechanical Specification

for Boxes and Pods Used to Transport and Store 300

mm Wafers

SEMI E57  Mechanical Specification for Kinematic

Couplings Used to Align and Support 300 mm Wafer

Carriers

SEMI E62  Provisional Specification for 300 mm

Front-Opening Interface Mechanical Standard (FIMS)

3.2 ISO Specification

ISO/DIS 68-1  ISO General Purpose Screw Threads

 Basic Profile  Part I: Metric Screw Threads

NOTICE: Unless otherwise indicated, all documents

cited shall be the latest published versions.

4 Terminology

4.1 Definitions

4.1.1 bilateral datum plane  a vertical plane that

bisects the wafers and that is perpendicular to both the

horizontal and facial datum planes (as defined in SEMI

E57).

4.1.2 BOLTS plane  a plane parallel to the facial

datum plane near the front of the tool where the box

opener/loader is attached.

1 International Organization for Standardization,ISO Central

Secretariat, 1, rue de Varembé, Case postale 56, CH-1211 Geneva 20,

Switzerland. Telephone: 41.22.749.01.11; Fax: 41.22.733.34.30,

Website: /www.iso.ch

SEMI E63-1104 © SEMI 1997, 2004 2

4.1.3 box  a protective portable container for a

cassette and/or substrate(s).

4.1.4 box opener/loader  the equipment component

that opens wafer carriers (if needed) and presents the

carriers to the equipment's wafer handler for unloading

and loading wafers.

4.1.5 carrier capacity  the number of substrates that

a carrier holds (as defined in SEMI E1.9).

4.1.6 cassette  an open structure that holds one or

more substrates.

4.1.7 equipment front end module (EFEM)  consists

of the carrier handler that receives carriers from the

factory material handling system on one or more load

ports (as specified in SEMI E15.1), opens the carriers

(if needed), and may include a substrate handler for

unloading and loading wafers from the carrier to the

process part of the equipment.

4.1.8 facial datum plane  a vertical plane that bisects

the wafers and that is parallel to the front side of the

carrier (where wafers are removed or inserted). On tool

load ports, it is also parallel to the load face plane

specified in SEMI E15 on the side of the tool where the

carrier is loaded and unloaded (as defined in SEMI

E57).

4.1.9 horizontal datum plane  a horizontal plane

from which project the kinematic-coupling pins on

which the carrier sits. On tool load ports, it is at the load

height specified in SEMI E15 and might not be

physically realized as a surface (as defined in SEMI

E57).

4.1.10 load face plane  the furthest physical vertical

boundary plane from the cassette centroid or carrier

centroid on the side (or sides) of the tool where loading

of the tool is intended (as defined in SEMI E15).

4.1.11 minienvironment  a localized environment

created by an enclosure to isolate the product from

contamination and people.

4.1.12 pod  a box having a Standard Mechanical

Interface (SMIF) per SEMI E19.

4.1.13 seal zone  a surface on the tool at the BOLTS

plane for sealing to the box opener/loader.

4.1.14

wafer carrier  any cassette, box, pod, or boat

that contains wafers (as defined in SEMI E15).

5 Requirements

5.1 Datum Planes  The physical alignment

mechanism for the box consists of features (not

specified in this standard) on the box that mate with

three or six pins underneath as defined in SEMI E57.

Many of the dimensions of the BOLTS interface are

determined with respect to the three orthogonal datum

planes defined in that standard: the horizontal datum

plane, the facial datum plane, and the bilateral datum

plane. The BOLTS plane is defined to be parallel to and

at a distance y70 from the facial datum plane of the

carrier (when the carrier is docked and in position for

wafer extraction and insertion). If the carrier is rotated

after being placed on the loadport, the facial datum

plane of the carrier and the BOLTS plane may no

longer be parallel to the load face plane of the

equipment. If the carrier is not rotated, the distance

(called the docking stroke) between the facial datum

plane when the carrier is placed on the loadport

(undocked) and the facial datum plane when the carrier

is in position for wafer extraction and insertion

(docked) must be y76 (but this is only a requirement for

equipment delivered in the year 2000 or later). The

tolerance on y70 is the installation tolerance. The cycle-

to-cycle repeatability on y70 (without replacing the box

opener/loader unit) must be within y75.

5.2 Symmetry  All of the dimensions for the interface

are bilaterally symmetric about the bilateral datum

plane. These dimensions are shown in Figure 1 and

specified in Table 1.

5.3 Hole Opening  The BOLTS interface consists of

a hole in the front of the tool at the BOLTS plane, a seal

zone surrounding the hole, six threaded holes for

bolting on the box opener/loader, reserved spaces for

the box opener/loader inside the tool from the hole, and

an exclusion volume for the box opener/loader outside

of the hole. The dimensions of the hole are defined by

x71, z71, and z76.

5.4 Seal Zone  On the BOLTS plane surrounding the

hole opening must be a flat area for sealing between the

tool and the box opener/loader. The inner dimensions of

the seal zone are the same as the hole opening, and the

outer dimensions of the seal zone are defined by x72,

z72, and z77. The flatness of the seal zone must be

within y71, and the perpendicularity of the seal zone to

the facial and horizontal datum planes must be within



5.5

Bolt Holes  At six points on the BOLTS plane

there must be threaded holes for bolting on the box

opener/loader. The opening of the threaded holes must

be within the flatness of the seal zone (y71), and the

holes must be at least y73 deep. The internal threads

must conform to the ISO/DIS 68-1 specification which

has a nominal diameter of 8 mm (0.31 in.), a thread

pitch of 1.25 mm (0.05 in.), a normal length of

engagement from 4 to 12 mm (0.16 to 0.47 in.), and no

allowance (variation from basic diameter). The centers

of the threaded holes are to be located at x73 to the left

and right of the bilateral datum plane, and centers of the

top, middle, and bottom pairs of threaded holes are to

be located at z78 above, z75 below, and z73 below the

horizontal datum plane, respectively. Not all of these

bolt holes need to be used by every box opener/loader,

but all six threaded holes must be present on the tool.

Note that the middle pair of threaded holes is in the seal

zone, and so it may be covered up by some gaskets

(which are not specified here).

5.6 Reserved Spaces  Inside the tool from the

BOLTS plane are volumes reserved for the box

opener/loader into which tool and its wafer handler may

not protrude. A permanent reserved space is bounded

by x70, y74, z70, and z80. When the door is closed,

there is an additional temporary reserved space

bounded by x70, y72, and z81. When the door is being

opened or closed by the box opener/loader, there is a

further temporary reserved space bounded by x70, y74,

and z81. When the door is fully open, it will be

withdrawn into the permanent reserved space, and the

tool wafer handler may extend into the box to extract or

insert wafers.

5.7 Exclusion Volume  Outside the tool from the

BOLTS plane is a volume reserved for the box

opener/loader into which the exterior of the tool may

not protrude. This exclusion volume is bounded by x74,

z79, and the floor. Within these boundaries and outside

of the seal zone, no part of the tool may protrude closer

to the facial datum plane than the closest point of the

seal zone. Also, it is recommended that no part of the

tool should overhang the box opener/loader, even above

z79. Note that x74 has been chosen to allow the

minimum width between adjacent load ports defined in

SEMI E15.1.

5.8 Inner and Outer Radii  All required concave

features may have a radius of up to r75 to allow

cleaning and to prevent contaminant build-up. All

required convex features may also have a radius of up

to r76 to prevent small contact patches with large

stresses that might cause wear and particles. Note that

these limits on the radius of all required features are

specified as a maximum (not a minimum) to ensure that

the required features are not rounded-off too much. The

lower bound on the radius is up to the tool supplier.

Note also that this radius applies to every required

feature unless another radius is called out specifically.

6 Related Documents

6.1

SEMI Standards

SEMI M31  Provisional Mechanical Specification for

Front-Opening Shipping Box Used to Transport and

Ship 300 mm Wafers

SEMI E84  Specification for Enhanced Carrier

Handoff Parallel I/O Interface

NOTICE: Unless otherwise indicated, all documents

cited shall be the latest published versions.