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SEMI F100-0705 © SEMI 2005 3 5.2.1 The valve and orifice tests must be applied with iden tical pressure sensors/flow meters. 5.2.2 Reproducibility and repeatability of measurin g devices must rate 2 % or less of R.S. 5.2…

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SEMI F100-0705 © SEMI 2005 2
5 Test Setup
5.1 Standard Orifice
5.1.1 Orifice Diameter (A)
On the basis of 50% of the inner diameter of PFA tube connection. See Figure 1.
2.0[mm] orifice (6-4[mm] tube)
4.0[mm] orifice (10-8[mm] tube)
5.0[mm] orifice (12-10[mm] tube)
8.0[mm] orifice (19-16[mm] tube)
11.0[mm] orifice (25-22[mm] tube)
M e tric PFA TubeB
C
D
E
S ta n d a rd O rifice
Diaphragm V alve
A
FF
Figure 1
Inside View of
Standard Orifice
5.1.2 Orifice Diameter Tolerance
Tolerance: +0.2, 0 [mm]
5.1.3 Orifice Length (B) should be less than inner tube diameter, i.e., B A.
5.1.4 Dimensions (D) should be determined in accordance with the test valve port connection, i.e., D E.
5.1.5 Dimension (F) should be equal to or less than a 90 degree angle.
5.2 Test Circuit
Va l v e
flow meter
pressure sensor
Standard Orifice
flow meter
pressure sensor
Figure 2
Test Circuit
SEMI F100-0705 © SEMI 2005 3
5.2.1 The valve and orifice tests must be applied with identical pressure sensors/flow meters.
5.2.2 Reproducibility and repeatability of measuring devices must rate 2 % or less of R.S.
5.2.3 Both the test valve and test orifice must have identical port connections.
5.3 Test Method/Procedure
5.3.1 In accordance to the test circuit of ¶5.2, flow rate is compared under the same pressure condition. Volume and
weight of accumulative flow can be compared without the use of a flow meter.
5.3.2 P1 is set 50kPa or more.
5.4 Qualification of Standard
5.4.1 The standard of diaphragm valves used with metric PFA tubes is determined by the flow rate Q1 of the tested
valve being greater than the flow rate Q2 of the standard orifice tested of ¶5.1. ( Q1 > Q2 / Q1 < Q2).
NOTICE: SEMI makes no warranties or representations as to the suitability of the standards set forth herein for any
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