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SEMI D15-1296 © SEMI 1996, 2003 5 APPENDIX 1 NOTICE : This ap pendix was approved as an offici al part of SEMI D15 by full lette r ballot proce dures. A1-1 Purpose A1-1.1 FPD waviness W fpd requires a l arge amount of ca…

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SEMI D15-1296 © SEMI 1996, 2003 4
Figure 2
Explanation of Surface Profiles
SEMI D15-1296 © SEMI 1996, 2003 5
APPENDIX 1
NOTICE: This appendix was approved as an official part of SEMI D15 by full letter ballot procedures.
A1-1 Purpose
A1-1.1 FPD waviness W
fpd
requires a large amount of
calculation on this standard.
A1-1.2 Therefore, the approximate calculation method
shown below can be used instead.
A1-2 Terminology
A1-2.1 local peak of profile — the highest point of
profile between two adjacent minima of the profile.
A1-2.2 local valley of profile — the lowest point of
profile between two adjacent maxima of the profile.
A1-2.3 window — a sampling length for evaluation.
A1-3 Calculation Method
A1-3.1 Search all local peaks and local valleys within
the evaluation length.
A1-3.2 Calculation of a waviness value based on a
local peak.
A1-3.2.1 Calculation of a waviness value, W
iL
, based
in the left window of a local peak, P
i
(position X
i
).
1. Open the left window (L
1
− X
i
) with L
s
/2 width
from the local peak, P
i
.
2. Search the lowest point, V
L
(position L
2
), in the
window (L
1
− X
i
).
3. Find the point L
3
= L
2
+ L
s
and open the window
(X
i
− L
3
).
4. Search the lowest point, V
LR
, in the window
(X
i
− L
3
).
5. W
iL
= |Z
i
− (V
L
+ V
LR
) /2|
A1-3.2.2 Calculation of a waviness value, Wi
R
, based
in the right window of a local peak, P
i
.
1. Open the right window (X
i
− R
1
) with L
s
/2 width
from the local peak, P
i.
.
2. Search the lowest point, VR (position R
2
), in the
window (X
i
− R
1
).
3. Find the point R
3
= R
2
- Ls and open the window
(R
3
− X
i
).
4. Search the lowest point, V
RL
, in the window
(R
3
− X
i
).
5. W
iR
= |Z
i
− (V
R
+ V
RL
) /2|
A1-3.2.3 Calculate W
iL
and W
iR
on all local peaks, P
i
,
then calculate the maximum value, WP
max
.
WP
max
= max {W
iL
, W
iR
} (i = 1 to n)
Figure A1-1
Calculation Points of a Local Peak
A1-3.3 Calculation of a waviness value based on a
local valley.
A1-3.3.1 Calculation of a waviness value, W
jL
, based
in the left window of a local valley, V
j
(position X
j
).
1. Open the left window (L
1
− X
j
) with L
s
/2 width
from the local valley, V
j
.
2. Search the highest point, P
L
(position L
2
), in the
window (L
1
− X
j
).
3. Find the point L
3
= L
2
+ L
s
and open the window
(X
j
− L
3
).
4. Search the highest point, P
LR
, in the window
(X
j
− L
3
).
5. W
jL
= |Z
j
− (P
L
+ P
LR
) /2|
A1-3.3.2 Calculation of a waviness value, W
jR
, based
in the right window of a local valley, V
j
.
1. Open the right window (X
j
− R
1
) with L
s
/2 width
from the local valley, V
j
.
2. Search the highest point, P
R
(position R
2
), in the
window (X
j
− R
1
).
3. Find the point R
3
= R
2
− L
s
and open the window
(R
3
− X
j
).
SEMI D15-1296 © SEMI 1996, 2003 6
4. Search the highest point, P
RL
, in the window
(R
3
− X
j
).
5. W
jR
= |Z
j
− (P
R
+ P
RL
) /2|
Figure A1-2
Calculating Points of a Local Valley
A1-3.3.3 Calculate W
jL
and W
j
R on all local valleys,
V
j
, then calculate the maximum value, WV
max
.
WV
max
= max {W
jL
, W
jR
} (j = 1 to n)
A1-3.4 Calculation of FPD Waviness, W
fpd
—
Calculate the maximum value among all maximum
values calculated in Sections 3.2.3 and 3.3.3.
W
fpd
= max {WP
max
, WV
max
}
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