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SEMI D17-0200 © SEMI 1998, 2000 13 Figure 7 Cassette Physical Alignm ent Interface – Type B Roller Shape

SEMI D17-0200 © SEMI 1998, 2000 12

Figure 6

Cassette Physical Alignment Interface – Type B

Roller Position

SEMI D17-0200 © SEMI 1998, 200013

Figure 7

Cassette Physical Alignment Interface – Type B

Roller Shape

SEMI D17-0200 © SEMI 1998, 2000 14

APPENDIX 1

NOTE: The material in this appendix is an official part of SEMI D17 and was approved by full letter ballot procedures on

December 15, 1999 by the North American Regional Standards Committee. Determination of the suitability of the material

herein is solely the responsibility of the user.

A1-1 Application Notes

A1-1.1 The shape of the teeth holding the substrates is not specified in this standard. The tooth surface that touches

the substrate should have a large radius to minimize stress on the substrate and tooth.

A1-1.2 Extra clearance (larger than the pitch) has been added below the bottom substrate (for non-random

sequential access to the substrates with a faster or less precise robot). To increase the stability of Type A Cassettes,

the points on the cassette bottom that are the most distant from the lines connecting each pair of coupling pins

should be made as close as practical to the horizontal datum plane so that the cassette cannot tip very far off of the

kinematic coupling.

NOTICE: SEMI makes no warranties or representations as to the suitability of the standards set forth herein for

any particular application. The determination of the suitability of the standard is solely the responsibility of the user.

Users are cautioned to refer to manufacturer’s instructions, product labels, product data sheets, and other relevant

literature respecting any materials mentioned herein. These standards are subject to change without notice.

The user’s attention is called to the possibility that compliance with this standard may require use of copyrighted

material or of an invention covered by patent rights. By publication of this standard, SEMI takes no position

respecting the validity of any patent rights or copyrights asserted in connection with any item mentioned in this

standard. Users of this standard are expressly advised that determination of any such patent rights or copyrights, and

the risk of infringement of such rights, are entirely their own responsibility.

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consent of SEMI.