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SEMI D18-0299 E © SEMI 19 99, 2001 13 Figure 6 Cassette Physical Alignm ent Interface-Type B Roller Position Figure 7 Cassette Physical Alignm ent Interface-Type B Roller Shape

SEMI D18-0299

Figure 5

Cassette Physical Alignment Interface-Type A

Coupling Pin Shape

SEMI D18-0299

Figure 6

Cassette Physical Alignment Interface-Type B

Roller Position

Figure 7

Cassette Physical Alignment Interface-Type B

Roller Shape

SEMI D18-0299

APPENDIX 1

NOTE: The material in this appendix is an official part of SEMI D18 and was approved by full letter ballot procedures on August

15, 1998.

A1-1 Application Notes

A1-1.1 The shape of the teeth holding the substrates is

not specified in this standard. The tooth surface that

touches the substrate should have a large radius to

minimize stress on the substrate and tooth.

A1-1.2 Extra clearance (larger than the pitch) has been

added below the bottom substrate (for non-random

sequential access to the substrates with a faster or less

precise robot). To increase the stability of Type A

Cassettes the points on the cassette bottom that are the

most distant from the lines connecting each pair of

coupling pins should be made as close as practical to

the horizontal datum plane so that the cassette cannot

tip very far off of the kinematic coupling.

NOTICE: These standards do not purport to address

safety issues, if any, associated with their use. It is the

responsibility of the user of these standards to establish

appropriate safety and health practices and determine

the applicability of regulatory limitations prior to use.

SEMI makes no warranties or representations as to the

suitability of the standards set forth herein for any

particular application. The determination of the

suitability of the standard is solely the responsibility of

the user. Users are cautioned to refer to manufacturer’s

instructions, product labels, product data sheets, and

other relevant literature respecting any materials

mentioned herein. These standards are subject to

change without notice.

The user’s attention is called to the possibility that

compliance with this standard may require use of

copyrighted material or of an invention covered by

patent rights. By publication of this standard, SEMI

takes no position respecting the validity of any patent

rights or copyrights asserted in connection with any

item mentioned in this standard. Users of this standard

are expressly advised that determination of any such

patent rights or copyrights, and the risk of infringement

of such rights, are entirely their own responsibility.

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the contents in whole or in part is forbidden without express written

consent of SEMI.