semi合集-English.pdf - 第4507页

SEMI D23-0999 © SEM I 1999 3 Item Unit Value Definition & Formula Notes Area for handling s ubstra tes and having the highest leve l of cleanlin ess. (17) Main Equ ipment Dime nsions (W*D ) (m 2 ) Installed dim ensio…

100%1 / 7923
SEMI D23-0999 © SEMI 1999 2
6 CEO (Cost of Equipment Ownership) Table
6.1 Units in the document are for illustration only.
Item Unit Value Definition & Formula Notes
A. Equipment
Cost
(1) Base Cost ($) Main Equipment Purchase Price
(2) Cost of Options ($) Price of items which can be
categorized as options separate
from main equipment.
(3) Other Parts/Tools ($) Price of tools and accessories
(not included in main
equipment or options price).
Enter maintenance-
related consumables in
D48 (Consumables).
(4) Installation Cost ($) Costs incurred in the installation
of the equipment.
(5) Inspection Cost ($) Costs incurred in inspection of
the equipment.
(6) Shipping Cost ($) Cost of shipping equipment to
the installation location.
(7) Training Cost ($) Cost of training in operation,
maintenance, etc.
(8) Manual Cost ($) Cost of manuals necessary for
maintenance and operation.
(9) Other Costs ($) Other necessary costs not
included in above items.
(10) Subtotal ($) Sum of (1) through (9). If it is difficult to
specify (1) through (9),
it is possible to just
enter (10).
(11) Monthly Cost ($/month) Monthly costs associated with
equipment (10)/60 months.
Salvage value after 5
years is arbitrarily set
here at 0. Adjust to real
value as necessary.
B. Hook-Up
Costs
(12) Materials
(pipes, etc.)
($) Costs for piping and other
materials necessary to operate
equipment.
(13) Power
Connection
($) Costs for connecting electricity,
water, gas, air, etc. supplied by
the factory to the equipment.
(14) Other ($) Other installation costs not
included in above items.
(15) Subtotal ($) Sum of (12) through (14).
(16) Monthly Cost ($/month) Monthly incidental installation
costs (15)/60 months.
Salvage value after 5
years is arbitrarily set
here at 0. Adjust to real
value as necessary.
C. Clean
Room Costs
For each area, if the shape is
complex, use the square surface
area.
Categorize clean area,
gray area, and other
dedicated areas
according to the real
situation of each
factory.
SEMI D23-0999 © SEMI 19993
Item Unit Value Definition & Formula Notes
Area for handling substrates and
having the highest level of
cleanliness.
(17) Main Equipment
Dimensions (W*D)
(m
2
) Installed dimensions of the
main equipment within the
clean area.
(18) Accessory
Dimensions (W*D)
(m
2
) Installed dimensions of pumps,
power source, and other
equipment outside of the main
equipment within the clean area.
(19) Maintenance
Area (W*D)
(m
2
) Dimensions of space in clean
area necessary for maintenance
of the equipment and
accessories.
(20) Subtotal Area
(W*D)
(m
2
) Subtotal of dimensions in clean
area from above items (17)
through (19).
(21) Floor Space (Unit
Cost)
$/m
2
•
month
Monthly floor maintenance cost
in clean area (by area unit).
Clean Areas
(22) Monthly
Dedicated Floor Cost
$/month Monthly cost for clean area (20)
× (21).
Area with lower cleanliness
level than above clean area.
(23) Main Equipment
Dimensions (W*D)
(m
2
) Installed dimensions of the
main equipment within the gray
area.
(24) Accessory
Dimensions (W*D)
(m
2
) Installed dimensions of pumps,
power source, and other
equipment outside of the main
equipment within the gray area.
(25) Maintenance
Area (W*D)
(m
2
) Dimensions of space in gray
area necessary for maintenance
of the equipment and
accessories.
(26) Subtotal Area
(W*D)
(m
2
) Subtotal of dimensions in gray
area from above items (23)
through (25).
(27) Floor Space (Unit
Cost)
$/m
2
•
month
Monthly floor maintenance cost
in gray area (by area unit).
Gray Area
(28) Monthly
Dedicated Floor Cost
($/month) Monthly costs for gray area (26)
× (27).
Area with the lowest level of
cleanliness (i.e., sub-floor, etc.).
(29) Dedicated
Dimensions (W*D)
(m
2
) Installed dimensions of the
main equipment in other
dedicated floor area.
(30) Floor Space (Unit
Cost)
$/m
2
•
month
Monthly floor maintenance cost
in other dedicated floor area (by
area unit).
Other
Dedicated
Floor Area
(31) Monthly
Dedicated Floor Cost
($/month) Monthly costs for other
dedicated floor area (29) × (30).
D. Running
Costs
SEMI D23-0999 © SEMI 1999 4
Item Unit Value Definition & Formula Notes
Power/
Utilities
Normal use and
maximum use values
entered by equipment
manufacturer.
Normal
Use [Unit]
Maximum
Use [Unit]
(32) Electricity ($/month) Monthly cost of electricity
necessary to operate equipment.
[ ] [ ]
(33) Cooling Water ($/month) Monthly cost of cooling water
necessary to operate equipment.
[ ] [ ]
(34) Air ($/month) Monthly cost of air conditioning
necessary to operate equipment.
[ ] [ ]
(35) Gas Exhaust
Processing
($/month) Monthly cost of gas exhaust
processing necessary to operate
equipment.
[ ] [ ]
(36) Liquid Waste
Processing
($/month) Monthly cost of liquid waste
processing necessary to operate
equipment.
[ ] [ ]
(37) Vacuum Line ($/month) Monthly cost of vacuum
volume necessary to operate
equipment.
[ ] [ ]
(38) Nitrogen Gas ($/month) Monthly cost of nitrogen gas
necessary to operate equipment.
[ ] [ ]
(39) Dry Gas ($/month) Monthly cost of dry gas
necessary to operate equipment.
[ ] [ ]
(40) Other ($/month) Other monthly power & utilities
costs necessary to operate
equipment.
(41) Power/Utilities
Subtotal
($/month) Subtotal of monthly power &
utilities costs necessary to
operate equipment; sum of (32)
through (40).
Cost of materials necessary for
processing.
Example: Resist,
chemicals, process
gases, cleaning gas,
sputter target, etc. Enter
by equipment in (42) to
(46).
(42) ($/month) Monthly cost For the item name, enter
each item necessary for
the equipment.
(43) ($/month) Monthly cost For the item name, enter
each item necessary for
the equipment.
(44) ($/month) Monthly cost For the item name, enter
each item necessary for
the equipment.
(45) ($/month) Monthly cost For the item name, enter
each item necessary for
the equipment.
(46) ($/month) Monthly cost For the item name, enter
each item necessary for
the equipment.
Process
Materials
Costs
(47) Process Materials
Subtotal
($/month) Subtotal of monthly costs for
process materials; sum of (42)
through (46).