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SEMI D24-0200 © SEMI 2000 6 C 2x (Pattern Surface) Length(L) Width( W) Orien tation (LRE ) (SRE) Corner Cu t (3 places ) Y-Axis X-Axis C1x C1y C2x C2y Figure 5 Orientation Corner and Corner Cuts
SEMI D24-0200 © SEMI 20005
Warp
Detected along edge by feeler gauge
(Back Surface Unconstrained)
X
Z
0
Figure 3
Warp
Rounded bevel
0.1 - 0.6 mm
Figure 4
Edge Condition
SEMI D24-0200 © SEMI 2000 6
C
2x
(Pattern Surface)
Length(L)
Width(W)
Orientation
(LRE)
(SRE)
Corner Cut
(3 places)
Y-Axis
X-Axis
C1x
C1y
C2x
C2y
Figure 5
Orientation Corner and Corner Cuts
SEMI D24-0200 © SEMI 20007
(Back Surface Unconstrained)
Free State
X
0
Z
(Back Surface Constrained)
Ideal Chucked State
Exposure
Site
Local Thickness
Variation
Total Thickness
Variation
Figure 6
Total Thickness Variation and Local Thickness Variation
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