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SEMI D25-0600 E © SEMI 2000, 2003 8 Vert i c a l Lo a d i ng/ U nlo a d i ng Horizontal Loading /Unloading (Referenc e) Figure 6 Loading/ Unloading Met hod

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SEMI D25-0600
E
© SEMI 2000, 2003 7
x
y
z
x
y
z
≤ 1200
≤
1100
950
800
≤
830
Unit: mm
Skid
100
<150
Figure 5
Packing Box Concept
SEMI D25-0600
E
© SEMI 2000, 2003 8
Vertical
Loading/Unloading
Horizontal
Loading/Unloading
(Reference)
Figure 6
Loading/Unloading Method
SEMI D25-0600
E
© SEMI 2000, 2003 9
Figure 7
Leaning Vertical Unloading