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SEMI D25-0600 E © SEMI 2000, 2003 9 Figure 7 Leaning Verti cal Unloading

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SEMI D25-0600
E
© SEMI 2000, 2003 8
Vertical
Loading/Unloading
Horizontal
Loading/Unloading
(Reference)
Figure 6
Loading/Unloading Method
SEMI D25-0600
E
© SEMI 2000, 2003 9
Figure 7
Leaning Vertical Unloading
SEMI D25-0600
E
© SEMI 2000, 2003 10
N
OTE: This direction is also possible
during transfer
Using 90
°
Tilting Mechanism
Figure 8
Removing Glass with a 90° Tilting Mechanism
Reference Plane
1
st
Mizo Clearance
Box Base
Thickness
Figure 9
Mizo Definition