semi合集-English.pdf - 第4527页

SEMI D25-0600 E © SEMI 2000, 2003 10 N OTE: Th is direction is also possi ble during tran sfer Using 90 ° Tilting Mechan ism Figure 8 Removing Gla ss with a 90° Tiltin g Mechanism Reference P lane 1 st Mizo Clearance Box…

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Figure 7
Leaning Vertical Unloading
SEMI D25-0600
E
© SEMI 2000, 2003 10
N
OTE: This direction is also possible
during transfer
Using 90
°
Tilting Mechanism
Figure 8
Removing Glass with a 90° Tilting Mechanism
Reference Plane
1
st
Mizo Clearance
Box Base
Thickness
Figure 9
Mizo Definition
SEMI D25-0600
E
© SEMI 2000, 2003 11
f1
f2
h
Box
Bod
y
Figure 10
Size of Exposed Portion
150
150
150
600
150 150
150
500
unit : mm
Z
X
Y
Reference
Planes
Figure 11
Polishing Reference Planes