semi合集-English.pdf - 第4528页
SEMI D25-0600 E © SEMI 2000, 2003 11 f1 f2 h Box Bod y Figure 10 Size of Exposed Portion 150 150 150 600 150 150 150 500 unit : mm Z X Y Refer ence Planes Figure 11 Polishing Reference Planes
SEMI D25-0600
E
© SEMI 2000, 2003 10
N
OTE: This direction is also possible
during transfer
Using 90
°
Tilting Mechanism
Figure 8
Removing Glass with a 90° Tilting Mechanism
Reference Plane
1
st
Mizo Clearance
Box Base
Thickness
Figure 9
Mizo Definition
SEMI D25-0600
E
© SEMI 2000, 2003 11
f1
f2
h
Box
Bod
y
Figure 10
Size of Exposed Portion
150
150
150
600
150 150
150
500
unit : mm
Z
X
Y
Reference
Planes
Figure 11
Polishing Reference Planes
SEMI D25-0600
E
© SEMI 2000, 2003 12
Handle
Figure 12
Packaging Handles