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SEMI D41-0305 © SEMI 2005 6 NOTICE: SEMI makes no warranties or represen tations as to the suitability o f the standards set forth herein for any particular application. The determination of the suitability of the standa…

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SEMI D41-0305 © SEMI 2005 5
Figure 4
The Graph Information for the Darker Mura Patterns
Figure 5
The Graph Information for the Brighter Mura Patterns
Table 2 The Test Result for the Darker Mura Patterns
Table 3 The Test Result for the Brighter Mura Patterns
SEMI D41-0305 © SEMI 2005 6
NOTICE: SEMI makes no warranties or representations as to the suitability of the standards set forth herein for any
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SEMI D42-0305 © SEMI 2005 1
SEMI D42-0305
SPECIFICATION FOR ULTRA LARGE SIZE MASK SUBSTRATE CASE
This specification was technically approved by the Global Flat Panel Display Committee and is the direct
responsibility of the Japanese Flat Panel Display Committee. Current edition approved by the Japanese
Regional Standards Committee on January 11, 2005. Initially available at www.semi.org February 2005; to
be published March 2005.
1 Purpose
1.1 This standard defines the specification for ultra large size substrate case used in LCD (Liquid Crystal Display)
manufacturing process.
2 Scope
2.1 The specification defined by this standard is applicable to the case for containing substrate materials used in
LCD mask manufacturing process. The objective substrate range for the mask size defined by this standard is 850 ×
1,200 mm and more.
2.2 The automatic handling of the mask substrate becomes indispensable, in accordance with the larger size of the
substrate. This specification defines the handling volume for mask substrate inside the case.
NOTICE: This standard does not purport to address safety issues, if any, associated with its use. It is the
responsibility of the users of this standard to establish appropriate safety health practices and determine the
applicability or regulatory limitations prior to use.
3 Referenced Standards
3.1 None.
NOTICE: Unless otherwise indicated, all documents cited shall be the latest published versions.
4 Terminology
4.1 Definition
4.1.1 case — an enclosed container for storing one mask substrate.
5 Requirements
5.1 Handling volume for ultra large size mask substrate used in LCD manufacturing process.
5.1.1 The hatched area in Figure 1 shall be the exclusion volume for handling ultra large size mask substrate used in
LCD manufacturing process.
5.1.2 Symbols used in Figure 1 are defined in Table 1.