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SEMI C3-0699 © SEMI 19 86, 1999 1 SEMI C3-0699 SPECIFICA TIONS FOR G A SES IMPORTANT N OTI CE: This specification is incomplete. T he incomplete sections are noted as “To Be Determined.” The Gases Committee has agreed to…

SEMI INTERNATIONAL STANDARDS

GASES

Semiconductor Equipment and Materials International

SEMI C3-0699 © SEMI 1986, 19991

SEMI C3-0699

SPECIFICATIONS FOR GASES

IMPORTANT NOTICE: This specification is incomplete. The incomplete sections are noted as “To Be Determined.”

The Gases Committee has agreed to publish this section prior to completion as a service to the Semiconductor

Industry.

This specification was technically approved by the Global Gases Committee and is the direct responsibility of

the North American Gases Committee. Current edition approved by the North American Regional Standards

Committee on February 28, 1999. Initially available at www.semi.org April 1999; to be published June

1999. Originally published in 1986; previously published in 1995.

1 Preface

1.1 Recognizing the importance of impurity content of

gases in the manufacture of semiconductors, suppliers

responded by introducing products with improved

analytical characterization, notably for trace impurities.

1.2 The SEMI Gases Committee b egan its efforts in

the spring of 1979. With this publication, the

Committee establishes the definitions, general

procedures, specifications, and analytical procedures

for the gases listed in the index.

1.3 Products which meet all of the requirements may

be described as “meeting SEMI specifications.”

1.4 Where an analytical procedure different from that

provided is substituted by a supplier or user, the burden

of proof is on said supplier or user to confirm the

equivalency. It should be noted that the following list of

criteria was considered when determining the specified

analytical method.

Reliability

Ease of Use

Maintenance

Precision

Accuracy

Sensitivity

Versatility

Availability of Equipment

1.5 The specifications provided by this work are

intended to serve for gases to be used in the

manufacture and processing of semiconductors and

advanced electronic devices and circuits. The

specifications and the associated test procedures are

guidelines based on the experience of suppliers and

users. The function of the specifications is to establish

desired standards of quality.

1.6 Where feasible, a specification of content shall be

expressed as a numerical limit in units of mole per mole

(mole/mole).

1.7 For a major component, the value (assay or purity)

shall be expressed as a minimum permissible limit. For

an impurity, the value shall be expressed as a maximum

permissible limit.

1.8 A gas conforming to the specifications will

commonly contain more of the major component than

the minimum permissible limit or contain less of an

impurity (or several impurities) than the SEMI C3

maximum permissible limit. In neither case shall the

gas be considered as of higher quality than that defined

by the specification.

1.9 It is not practical to consider e very impurity or

contaminant that might be present. For certain

applications, it is recognized that more stringent or

additional specifications and procedures might be

required. The intent of these specifications and the

associated procedures is, on one hand, to assure that a

gas is suitable for the common uses to which it may be

put in the manufacture and processing of semiconductor

devices and, on the other hand, to be consistent with

contemporary manufacturing processes for that gas.

1.10 The Committee is continuing work on

improvement of specifications and procedures and

addition of other gases and systems such as mixed

gases. The Committee welcomes comments,

suggestions, and recommendations.

2 Definitions

2.1 Abbreviations and Symbols — In this work,

abbreviations and symbols used shall be restricted to

those listed in Table 1.

Table 1 Abbreviations and Symbols

Abbreviation or

Symbol

Explanation

ASTM American Society for Testing and

Materials

atm atmosphere

BP Boiling point

°C temperature, degrees Celsius

SEMI C3-0699 © SEMI 1986, 1999 2

Abbreviation or

Symbol

Explanation

cc cubic centimeter(s)

CGA Compressed Gas Association

cm centimeter

DOT Department of Transportation (U.S.)

°F temperature, degrees Fahrenheit

ft foot, feet

ggram(s)

L liter(s)

lb pound(s)

max maximum

min minimum

mL milliliter(s)

mm millimeter(s)

MP melting point

mw molecular weight (g/mole)

ohm-cm ohm - centimeter

ppm

mole/mole x 10

ppb

mole/mole x 10

ppba

mole/mole x 10

9 atomic

ppbw

weight/weight x 10

psia pounds per square inch absolute

psig pounds per square inch gauge

SCF standard cubic foot (feet)

temp. temperature

vol volume

vol/vol volume/volume

wt. weight

w/v weight/volume

ww weight/weight

2.2 accuracy — (To Be Determined)

2.3 assay — determination of the content of a specific

component with no evaluation of other components.

2.4 comparison of analytical results with specific

limits — in the comparison of an analytical result for a

test with the numerical limit associated with that

specification, the result shall be rounded to the number

of significant figures indicated for that limit. (See

Rounding Numbers, SEMI C3, Section 2.22).

2.4.1 Consequently, a specification stated as 96%

minimum will be met by a result as small as 95.5%, and

that stated as 96.0% minimum will be met by a result as

small as 95.95%. A specification of 0.1% maximum

will be met as large as 0.14%, and that of 0.10%

maximum by a result as large as 0.104%.

2.5 cryogenic liquid — liquid with a normal boiling

point below –150°C.

2.6 cylinder pressure — pressure contained in a gas

cylinder prior to regulation.

2.7 cylinder tare weight — containers which are

stamped to denote the weight of the container or the

weight of the container and the valve less the product.

The weight does not include the weight of any

protective cylinder cap.

2.8 density — weight per unit volu me (w/v) is

expressed as grams per liter for gases at zero degrees

Celsius, one atmosphere.

2.9 detection limit — the detection limit for all the

analytical methods that appear in this section of the

BOSS must be established for each impurity defined.

The detection limit must be stated as well as the

statistical method used to establish that detection limit.

The analytical method should be chosen such that the

detection limit is at or below the specification.

2.10 dewpoint — the temperature at which liquid first

condenses when vapor is cooled.

2.11 expression of content and concentration —

unless otherwise stated, a specification limit and the

analytical result related to it shall be expressed in units

of mole per mole (mole/mole).

2.12 filtration — (To Be Determined)

2.13 Gas Purity Guideline — A Gas Purity Guideline

is a proposed specification recommended by one or

more users as needed in the future for the production of

semiconductor devices. They reflect future needs in

which test methods are not generally available at the

time of proposal. These guidelines are approved by the

Gases Committee for publication in the Standards

Book. Products meeting these guidelines are not

necessarily commercially available.

2.14 heavy metals — (To Be Determined)

2.15 liquified compressed gas — a gas which under

the charged pressure is partially liquid at a temperature

of 21.1°C (70°F).

2.16 metals — (To Be Determined)

2.17 molecular weight — the sum o f the atomic

weights of all the atoms in the molecule.

2.18 nonliquified compressed gas — a gas, other than

a gas in solution, which under the charging pressure is

entirely gaseous at a temperature of 21.1°C (70°F).