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SEMI C3.40-10 00 © SEMI 1989 , 2000 6 Figure 2 Configuration for the Analysis of SF 6 in CF 4 NOTICE: T hese standards do n ot purport to address safety issues, if any, as sociated with their use. It is the responsibilit…

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SEMI C3.40-1000 © SEMI 1989, 20005
C: Measured hydrolyzable fluoride concentration (M)
determined in section 5.6.5.11
Vs: Volume of CF
4
sampled (liters at STP)
5.6.5.13 The HF concentration of the second bubbler
should be insignificant compared to the first bubbler. If
significant HF levels are found in the second bubbler,
resample with a lower flowrate.
5.7
Notes
Note 1: Introduce the calibration standard as many
times as necessary to achieve the desired precision.
Note 2: All gases used in the analysis of the sample
should not contain more than 10% of the specified
value of the component of interest, unless otherwise
stated.
Note 3: A passivation procedure is described in the
Metals Handbook, 10th ed., Vol. 2, American Society
for Metals, Metals Park, OH.
Note 4: The sampling system and hygrometer must be
designed to operate at the sample pressure, or the
sample pressure must be reduced, by a regulator with a
diaphragm of stainless steel or other suitable material,
to accommodate the pressure restrictions of the
hygrometer.
Note 5: Polytetrafluoroethlyene, polymethylpentene
and polypropylene are suitable plastic materials.
Figure 1
Configuration for the Analysis of CO
2
, O
2
, N
2
, and CO in CF
4
SEMI C3.40-1000 © SEMI 1989, 2000 6
Figure 2
Configuration for the Analysis of SF
6
in CF
4
NOTICE: These standards do not purport to address
safety issues, if any, associated with their use. It is the
responsibility of the user of these standards to establish
appropriate safety and health practices and determine
the applicability of regulatory limitations prior to use.
SEMI makes no warranties or representations as to the
suitability of the standards set forth herein for any
particular application. The determination of the
suitability of the standard is solely the responsibility of
the user. Users are cautioned to refer to manufacturer’s
instructions, product labels, product data sheets, and
other relevant literature respecting any materials
mentioned herein. These standards are subject to
change without notice.
The user’s attention is called to the possibility that
compliance with this standard may require use of
copyrighted material or of an invention covered by
patent rights. By publication of this standard, SEMI
takes no position respecting the validity of any patent
rights or copyrights asserted in connection with any
item mentioned in this standard. Users of this standard
are expressly advised that determination of any such
patent rights or copyrights, and the risk of infringement
of such rights, are entirely their own responsibility.
Copyright by SEMI® (Semiconductor Equipment and Materials
International), 3081 Zanker Road, San Jose, CA 95134. Reproduction o
f
the contents in whole or in part is forbidden without express written
consent of SEMI.
SEMI C3.32-0301 © SEMI 1987, 20011
SEMI C3.32-0301
SPECIFICATION FOR CHLORINE (Cl
2
), 99.996% QUALITY
This specification was technically approved by the Global Gases Committee and is the direct responsibility of
the North American Gases Committee. Current edition approved by the North American Regional Standards
Committee on October 17, 2000. Initially available at www.semi.org January 2001; to be published March
2001. Originally published in 1987; previously published in 1995.
1 Description
1.1 Gaseous chlorine is greenish-yellow and about 2.5
times as heavy as air. Chlorine has a disagreeable and
suffocating odor.
2 Specifications
QUALITY: 99.996%
Impurities
Maximum Acceptable Level
(ppm) (See NOTE 1.)
Carbon dioxide (CO
2
)10
Carbon monoxide (CO) 1
Hydrocarbons (C
1
– C
2
)1
Nitrogen (N
2
)20
Oxygen (O
2
)4
Water (H
2
O) (v/v) (See NOTE 2.)
TOTAL LISTED IMPURITIES
(excluding chromium, iron,
nickel, and sodium)
36
Maximum Acceptable Level
(ppm) (See NOTE 1.)
Chromium (Cr) 0.2 by wt. Liquid Phase
Iron (Fe) 0.2 by wt. Liquid Phase
Nickel 0.2 by wt. Liquid Phase
Sodium 1 by wt. Liquid Phase
NOTE 1: An analysis of significant figures has not been considered.
The number of significant figures will be based on analytical
accuracy and on the precision of the provided procedure.
NOTE 2: It is not known whether H
2
O remains as H
2
O in Cl
2
or
reacts to other species. For this reason, interpretation of H
2
O
measurement data is questionable. Test and acceptance criteria shall
be determined between user and supplier. Possible methods include:
a) determination of HCl by Fourier transform infrared spectrometry
(FTIR), mass spectrometry, or gas chromatography; b) measurement
of water by electrolysis in a P
2
O
5
cell (reported in terms of H
2
O
equivalents); c) determination of water by FTIR.
3 Physical Constants (for in formation only)
Metric Units US Units
Molecular weight 70.9 70.9
Boiling point at 1 atm -34.05°C -29.3°F
Density gas at 20°C (68°F)
and 1 atm
2.980 kg/m
3
0.1860 lb/ft
3
Specific gravity 2.473 2.473
Density liquid at -118°C
(-180.8°F)
1574.8 kg/m
3
98.26 lb/ft
3
4 Analytical Procedures
4.1 Carbon Monoxide, Carbon Dioxide, and
Hydrocarbons (CH
4
, C
2
H
2
, C
2
H
4
, C
2
H
6
) — This
procedure is for the determination of carbon monoxide,
carbon dioxide, and C
1
–C
2
hydrocarbons in chlorine.
The sample shall be vapor phase and analyzed using a
gas chromatograph with a flame ionization detector/
methanizer combination. (See Figure 1 and Notes 1, 2,
and 3.)
4.1.1 Detection Limit — 0.1 ppm (mol/mol).
4.1.2 Instrument Parameters
4.1.2.1 Injection Valve — 10 port corrosion-resistant.
4.1.2.2 Sample Volume — 2 mL.
4.1.2.3 Columns:
Column 1: Porapak P, 3.1 m (10 ft) by 3.2 mm (1/8 in) OD
ss or equivalent.
Column 2: Porapak P, 3.1 m by 3.2 mm OD ss or
equivalent.
4.1.2.4 Carrier Flow — 20 mL/min nitrogen.
4.1.2.5 Column Temperature — 40°C.
4.1.2.6 Air and Hydrogen Pressure and Flow — As
specified by the instrument manufacturer.
4.1.3 Calibration Standard — 1–5 ppm (mol/mol)
each component in nitrogen.
4.1.4 Operating Procedure
4.1.4.1 Place the 10 port valve in the sample load
position.
4.1.4.2 Turn on the methanizer heater and establish
hydrogen flow. Allow unit to heat to operating
temperature (as specified by the manufacturer).
4.1.4.3 Establish air flow and ignite burner following
the instrument manufacturer’s instructions. Allow the
system to stabilize for 15 minutes.