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SEMI C3.32-03 01 © SEMI 1987 , 2001 5 Figure 2 Oxygen and Nitrogen Determination Figure 3 Metals Set up (Liquid Phase Analy sis)

SEMI C3.32-0301 © SEMI 1987, 2001 4

4.4.3 Calibration Standards — Construct a calibration

curve which contains at least two points covering the

range of interest.

4.4.4

Operating Procedure

4.4.4.1 Leak check the entire system using helium and

a helium leak detector prior to use.

4.4.4.2 Pre-purge through the regulator/cross-purge

assembly with a dry gas of known moisture content

until the moisture content is measured below 1 ppm

(vol/vol).

4.4.4.3

Direct samples of two standards, independently

verified with a dewpoint/frostpoint hygrometer,

spanning the range of moisture content of interest to the

analyzer. After a stable reading is obtained, record the

instrument's response to each standard.

4.4.4.4

Obtain a representative sample of the gas to be

analyzed and direct it to the unit as with the standards.

After a stable reading is obtained, record the

instrument’s response.

4.4.4.5

Construct a calibration curve from the standard

data and determine the moisture content in the sample

gas. The result may not exceed the specification in

Section 2 of this standard.

4.5

Notes

NOTE 1: Sample system should be constructed entirely of

stainless steel or other suitable material due to the corrosive

nature of the product.

NOTE 2: Sample must be appropriately vented for health and

safety of operating personnel.

NOTE 3: Individual standards are required for accuracy and

identification by retention time.

NOTE 4: Other accepted instrumental techniques are also

appropriate for this analysis. In addition, operating procedures

for ICP-MS instruments vary, depending on the manufacturer.

In all cases, refer to individual instrument vendor instructions.

NOTE 5: All sampling flasks are leached with a 25%

HNO

O solution for at least 24 hours, rinsed thoroughly

with DI H

O, and filled with DI H

O for at least 24 hours

prior to use. On the day of sampling, flasks are rinsed

thoroughly with DI H

O and dried with N

prior to system

setup.

NOTE 6: The tubing and Fluorocarbon valves are soaked in a

25% HNO

/DI H

O solution prior to use (either apart or pre-

assembled). The tubing and valves are rinsed thoroughly with

DI H

O and dried with high-purity N

prior to system setup.

NOTE 7: A different digestion solution may be used,

depending on possible interferences with a given analysis

technique.

NOTE 8: All wetted surfaces, including P

hygrometer and

sample system, are to be of 316 stainless steel or other

suitable material.

Figure 1

Carbon Monoxide, Carbon Dioxide, and Hydrocarbons Determination

Figure 2

Oxygen and Nitrogen Determination

Figure 3

Metals Setup (Liquid Phase Analysis)

Figure 4

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