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SEMI C3.41-0703 © SEMI 1990, 2004 2 shown in SEMI C3. The result may not exceed t he specification in Section 2 of this standard. Figure 2Oxygen trap conditioned per manufacturer ’s recommendations using hydrogen, carbon…

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SEMI C3.41-0703 © SEMI 1990, 2004 1
SEMI C3.41-0703 (Withdrawn 1104)
STANDARD FOR OXYGEN (O
2
), BULK, 99.9998% QUALITY
This standard was technically approved by the Global Gases Committee and is the direct responsibility of the
North American Gases Committee. Current edition approved by the North American Regional Standards
Committee on July 11, 2004. Initially available at www.semi.org September 2004; to be published
November 2004. Originally published in 1990; previously published July 2003.
NOTICE: This document was balloted and
approved for withdrawal in 2004.
1 Description
1.1 Oxygen is a colorless, odorless, and oxidizing
gas. It supports combustion.
NOTICE: This standard does not purport to address
safety issues, if any, associated with its use. It is the
responsibility of the users of this standard to establish
appropriate safety and health practices and determine
the applicability of regulatory or other limitations
prior to use.
2 Specifications
QUALITY: 99.9998%
Figure 1A purifier is allowed to be used to meet this
specification.
Impurities
Maximum Acceptable Level
(ppm) (See Note 1.)
Argon (Ar) 1.0
Carbon Dioxide (CO
2
) 0.1
Carbon Monoxide (CO) 0.1
Hydrogen (H
2
) 0.1
Nitrogen (N
2
) 0.5
Particles (See Note 2.)
Total Hydrocarbons (as
CH
4
)
0.1
Water (H
2
O) (v/v) 0.1
TOTAL SPECIFIED
IMPURITIES
2.0
NOTE 1: An analysis of significant figures has not been
considered. The number of significant figures will be based on
analytical accuracy and the precision of the provided procedure.
NOTE 2: To be determined between user and supplier.
3 Physical Constants (for information only)
Metric Units US Units
Molecular weight 31.999 31.999
Boiling point at 1 atm 183.0°C 297.4°F
Density of gas at 25°C
(77°F) and 1 atm
1.309 kg/m
3
0.082 lb/ft
3
Specific gravity of gas 1.1049 1.1049
Density of liquid at boiling
point
1142 kg/m
3
71.27 lb/ft
3
4 Analytical Procedures
4.1 Argon and Nitrogen — This procedure is for the
determination of argon and nitrogen in oxygen using
a gas chromatograph with a discharge ionization
detector (see Figure 1).
4.1.1 Detection Limit — 0.1 ppm
4.1.2 Instrument Parameters
4.1.2.1 Column(s):
3 m (10 ft) by 3.2 mm (1/8 in.) o.d. in Molecular
Sieve 5A
3 m (10 ft) by 3.2 mm (1/8 in.) Oxy–trap (See Figure
1.)
4.1.2.2 Carrier Flow: 44 cc/min
4.1.3 Sample Volume: 0.1 mL
4.1.3.1 Temperatures:
Detector 100°C
Column 30°C
Oxytrap 150°C
4.1.4 Calibration Standards — 1–5 ppm nitrogen
and argon in oxygen.
4.1.5 Operating Procedures
4.1.5.1 Inject the calibration standard into the
column using a gas sampling valve. Record the
retention times and peak area. Order of elution is
argon, nitrogen. If methane is present, the order is
argon, nitrogen, methane.
4.1.5.2 Inject the sample to be tested in same manner
as the calibration standard. Record the retention times
and peak area.
4.1.5.3 Repeat 4.1.5.1.
4.1.5.4 Compare the average peak areas of the
calibration standard to that of the sample being
tested. Calculate the concentrations of impurities as
SEMI C3.41-0703 © SEMI 1990, 2004 2
shown in SEMI C3. The result may not exceed the
specification in Section 2 of this standard.
Figure 2Oxygen trap conditioned per manufacturer’s
recommendations using hydrogen, carbon monoxide, or
blend in helium.
4.2 Carbon Dioxide — This procedure is for the
determination of carbon dioxide in oxygen using a
gas chromatograph with a flame ionization detector
and a methanizer.
4.2.1 Detection Limit — 0.02 ppm
4.2.2 Instrument Parameters
4.2.3 Column(s): 2.3 m (91 in.) by 3.2 mm (1/8 in.)
HayeSep Db
4.2.3.1 Carrier Flow: 50 cc/min nitrogen
4.2.3.2 Sample Volume: 5 mL
4.2.3.3 Temperatures:
Detector 275°C
Column 50°C
Methanizer 295°C
4.2.4 Calibration Standards — 0.1–1 ppm carbon
dioxide in oxygen.
4.2.5 Operating Procedures
4.2.5.1 Inject the calibration standard into the
column using a gas sampling valve. Record the
retention times and peak area. Order of elution is:
Oxygen + carbon monoxide, methane, carbon
dioxide.
4.2.5.2 Inject the sample to be tested in same manner
as the calibration standard. Record the retention times
and peak area.
4.2.5.3 Repeat Section 4.2.5.1
4.2.5.4 Compare the average peak areas of the
calibration standard to that of the sample being
tested. Calculate the concentrations of impurities as
shown in SEMI C3. The result may not exceed the
specification in Section 2 of this standard.
Figure 3Sample and calibration sample are injected on
column to vent until oxygen, carbon monoxide, and
methane have eluted. Valve is returned to allow carbon
dioxide to elute onto methanizer and flame ionization
detector.
4.3 Carbon Monoxide and Hydrogen — This
procedure is for the determination of carbon
monoxide and hydrogen in oxygen using a gas
chromatograph with a reduction gas detector.
4.3.1 Detection Limit — 0.002 ppm
4.3.2 Instrument Parameters
 Column(s): 2 m (80 in.) by 3.2 mm (1/8 in.)
Molecular Sieve 13
4.3.2.2 Carrier Flow: 20 cc/min air
4.3.2.3 Sample Volume: 1 mL
4.3.2.4 Temperatures:
Detector 265°C
Column 105°C
4.3.3 Calibration Standards — 0.5–1 ppm hydrogen
and carbon monoxide in nitrogen or oxygen.
4.3.4 Operating Procedures
4.3.4.1 Inject the calibration standard into the
column using a gas sampling valve. Record the
retention times and peak area. Order of elution is:
Hydrogen, carbon monoxide.
4.3.4.2 Inject the sample to be tested in same manner
as the calibration standard. Record the retention times
and peak area.
4.3.4.3 Repeat Section 4.3.4.1
4.3.4.4 Compare the average peak areas of the
calibration standard to that of the sample being
tested. Calculate the concentrations of impurities as
shown in SEMI C3. The result may not exceed the
specification in Section 2 of this standard.
4.4 Total Hydrocarbons — This procedure is for the
determination of total hydrocarbons in oxygen with a
total hydrocarbon analyzer.
4.4.1 Detection Limit — 0.05 ppm
4.4.2 Instrument Parameters
4.4.2.1 Flow Requirements:
Carrier Flow Rate: per manufacturer’s
recommendations
Purity: less than 0.05 ppm total hydrocarbons
Sample Flow Rate: manufacturer’s recommendations
4.4.3 Calibration Standards — 0.1–1 ppm methane
in oxygen.
4.4.4 Operating Procedures
4.4.4.1 Flow settings should not be changed once
established.
4.4.4.2 Introduce the zero gas and adjust the
instrument per manufacturer’s recommendations to
read the quantity known to be in the zero gas.
SEMI C3.41-0703 © SEMI 1990, 2004 3
4.4.4.3 Introduce the span gas standard and adjust the instrument per manufacturer’s recommendations to read the
quantity known to be in the span gas. This result may not exceed specification in Section 2 of this standard.
4.5 Water — This procedure is for the determination of trace moisture (water) in O
2
using a continuous flowing
piezoelectric hygrometer (see Note 4).
4.5.1 Detection Limit — 5 ppb
4.5.2 Flow Requirements — Set the sample pressure and flow rate in accordance with the instrument
manufacturer’s instructions.
4.5.3 Calibration Standards — Construct a calibration curve which contains at least three points covering the range
of interest. Verify the standards employed independently by another analytical method.
4.5.4 Operating Procedure
4.5.4.1 Obtain a continuous flow sample of gas from the source using a clean and passivated stainless steel line
which has been purged dry after exposure to ambient moisture.
4.5.4.2 After prepurging with a dry gas, allow the sample gas to flow through the sampling system and the
piezoelectric moisture hygrometer until a stable reading is obtained.
4.5.4.3 Determine the moisture content of the oxygen sample by comparing the reading to calibration curve. The
result may not exceed the specification in Section 2 of this standard.
NOTE 4: The sampling system and hygrometer must be designed to operate under the sample pressure, or the sample pressure
must be reduced (by a regulator with a diaphragm of stainless steel or other suitable material) to accommodate the pressure
restrictions of the analytical hygrometer.
Figure 4
Analysis of Nitrogen and Argon in Oxygen Using Oxygen Trap
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