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SEMI C3.52-02 00 © SEMI 1995 , 2000 5 Figure 3 SiF 4 Standard in He Figure 4 O 2 , N 2 , and CO Standa rds in He

SEMI C3.52-0200 © SEMI 1995, 2000 4

6.4.7.2 The concentration of impurities in gas phase

is given by

WFSampled ofWeight

Solution of Wt.Solution in Conc.

WF in Conc.

NOTE 1: All gases used in the analysis of the sample should

contain not more than 10% of the specified value of the

component of interest unless otherwise specified.

Figure 1

and SF

Standards in He

Figure 2

Standards in He

SEMI C3.52-0200 © SEMI 1995, 20005

Figure 3

SiF

Standard in He

Figure 4

, N

, and CO Standards in He

SEMI C3.52-0200 © SEMI 1995, 2000 6

V2V3

Vacuum Pump

PFA Vessel

House

Nitrogen

Hydrolysis Vessels

Anti Suckback

Vessel

To Vent

Figure 5

Sampling System for WF

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