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SEMI C60-0305 © SEMI 2005 1 SEMI C60-0305 SPECIFICATIONS AND GUIDEL INES FOR NITROUS OXIDE (N 2 O) This specification was technically approved b y the Globa l Gases Com mittee and is the direct responsibility of the Nort…

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SEMI C59-1104 © SEMI 2002, 2004 8
14.5.3 Calibration Standards — Construct a calibration
curve in the range of interest. Verify the standards
employed independently by established traceability to
recognized national or international standards.
14.5.4 Operating Procedure
14.5.4.1 Obtain a continuous flow sample of gas from
the source using a clean and passivated stainless steel
line which has been purged dry after exposure to
ambient moisture.
14.5.4.2 After prepurging with a dry gas, allow the
sample gas to flow through the sampling system and the
P
2
O
5
moisture hygrometer until a stable reading is
obtained.
14.5.4.3 Determine the moisture content of the
nitrogen sample by comparing the reading to calibration
curve. The result may not exceed the specification in
Table 1.
NOTICE: SEMI makes no warranties or
representations as to the suitability of the standards set
forth herein for any particular application. The
determination of the suitability of the standard is solely
the responsibility of the user. Users are cautioned to
refer to manufacturer’s instructions, product labels,
product data sheets, and other relevant literature
respecting any materials mentioned herein. These
standards are subject to change without notice.
The user’s attention is called to the possibility that
compliance with this standard may require use of
copyrighted material or of an invention covered by
patent rights. By publication of this standard, SEMI
takes no position respecting the validity of any patent
rights or copyrights asserted in connection with any
item mentioned in this standard. Users of this standard
are expressly advised that determination of any such
patent rights or copyrights, and the risk of infringement
of such rights, are entirely their own responsibility.
Copyright by SEMI® (Semiconductor Equipment and Materials
International), 3081 Zanker Road, San Jose, CA 95134. Reproduction of
the contents in whole or in part is forbidden without express written
consent of SEMI.
SEMI C60-0305 © SEMI 2005 1
SEMI C60-0305
SPECIFICATIONS AND GUIDELINES FOR NITROUS OXIDE (N
2
O)
This specification was technically approved by the Global Gases Committee and is the direct responsibility of
the North American Gases Committee. Current edition approved by the North American Regional Standards
Committee on December 10, 2004. Initially available at www.semi.org January 2005; to be published
March 2005.
1 Purpose
1.1 The purpose of this document is to provide a series of specifications for different grades of Nitrous Oxide (N
2
O)
that are used in the semiconductor industry.
2 Scope
2.1 This document covers requirements for all grades of nitrous oxide used in the semiconductor industry.
2.2 If analytical methods are not complete, the requirements are presented as a guideline.
NOTICE: This standard does not purport to address safety issues, if any, associated with its use. It is the
responsibility of the users of this standard to establish appropriate safety and health practices and determine the
applicability of regulatory or other limitations prior to use.
3 Description
3.1 Nitrous oxide is an oxidizing, colorless, liquefied gas with a sweetish odor. It is a simple asphyxiant. Vapor
pressure is about 745 psig at 70°F.
4 Limitations
4.1 None.
5 Referenced Standards
5.1 SEMI Standards
SEMI C1 — Specifications for Reagents
SEMI C3 — Specifications for Gases
NOTICE: Unless otherwise indicated, all documents cited shall be the latest published versions.
6 Terminology
6.1 Terminology appropriate to this standard is defined in SEMI C3.
7 Requirements
7.1 Purity and other requirements for the various grades of nitrous oxide are given in Table 1.
SEMI C60-0305 © SEMI 2005 2
Table 1 Impurity and Other Requirements for Various Grades of Nitrous Oxide
Previous SEMI Reference #
C3.13-1000
(Specification)
C3.50-1000
(Guideline)
Grade 4.7 5.4
Purity 99.997%
#2,#3
99.9994%
#2, #3
Impurities Maximum Acceptable Level (ppm)
#1
Maximum Acceptable Level (ppm)
#1
Ammonia (NH
3
) 5 0.1
Carbon Dioxide (CO
2
) 2 0.5
Carbon monoxide (CO) 1 0.1
Hydrocarbons C
1
-C
5
1 0.1 (as C
1
)
Nitric Oxide (NO) 1 0.1
Nitrogen (N
2
) 10 3
Nitrogen dioxide (NO
2
) 1 0.1
Oxygen (O
2
) 2 N/A
Oxygen (O
2
) + Argon (Ar) N/A 0.5
Water (H
2
O) (v/v) 3 1.0
TOTAL SPECIFIED IMPURITIES 26 5.5
#1
An analysis of significant figures has not been considered. The number of significant figures is based on analytical accuracy and the precision
of the provided procedure.
#2
This specification applies to the gas phase of the cylinder as delivered.
#3
It is recommended that the user discontinue use of the cylinder prior to complete consumption of the liquid phase. The contents of cylinders
should be determined by weight, not pressure
8 Physical Constants
8.1 The physical constants of nitrous oxide are given in Table 2 (for information only).
Table 2 Physical Constants of Nitrous Oxide (for information only)
Metric Units US Units
Molecular weight 44.01 44.01
Boiling point at 1 atm 88.5°C 127.4°F
Density of gas at 70°F
(21.1°C) and 1 atm
1.947 g/L 0.1160 lb/ft
3
Specific gravity of gas 1.53 1.53
Critical pressure 71.46 atm 1052 psia
Critical temperature 36.4 °C 97.6°F
9 Analytical Procedures for Grade 4.7 Nitrous Oxide (See Appendix 1)
NOTE 1: Rapid withdrawal of gaseous nitrous oxide from a liquified source (e.g., cylinder) can result in a significant cooling
effect which may condense the nitrous oxide in the sampling lines.
9.1 Ammonia — This procedure is for the determination of ammonia in nitrous oxide using an apparatus employing
a detector tube filled with a color-reactive chemical.
9.1.1 Detection Limit — 0.2 ppm (mol/mol).
9.1.2 Apparatus
9.1.2.1 Pressure Regulator — Outlet Pressure Range 0–30 psig.
9.1.2.2 Flowmeter — Range 0–200 mL/min.
9.1.2.3 Detector Tube — Range 2–30 ppm.