semi合集-English.pdf - 第4839页

SEMI M1-0305 © SEMI 1978, 2005 15 ITEM SPECIFICATION MEASUREMENT METHOD 2-7.2.4 __________ [ ]Not greater th an [  10 ]a toms/cm 2 [ ]ICP/MS; [ ]AAS; [ ]SEMI MF1617 (SIMS); [ ]SEMI M33 (TXRF);[ ]ISO 14706 (TXRF); [ ]Oth…

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SEMI M1-0305 © SEMI 1978, 2005 14
ITEM SPECIFICATION MEASUREMENT METHOD
2-7.1.3 Potassium
[ ]Not greater than [ 10 ]atoms/cm
2
[ ]ICP/MS; [ ]AAS; [ ]SEMI MF1617 (SIMS);
[ ]SEMI M33 (TXRF);[ ]ISO 14706 (TXRF);
[ ]Other: (specify)_____________
2-7.1.4 Chromium
[ ]Not greater than [ 10 ]atoms/cm
2
[ ]ICP/MS; [ ]AAS; [ ]SEMI MF1617 (SIMS);
[ ]SEMI M33 (TXRF);[ ]ISO 14706 (TXRF);
[ ]Other: (specify)_____________
2-7.1.5 Iron
[ ]Not greater than [ 10 ]atoms/cm
2
[ ]ICP/MS; [ ]AAS; [ ]SEMI MF1617 (SIMS);
[ ]SEMI M33 (TXRF);[ ]ISO 14706 (TXRF);
[ ]Other: (specify)_____________
2-7.1.6 Nickel
[ ]Not greater than [ 10 ]atoms/cm
2
[ ]ICP/MS; [ ]AAS; [ ]SEMI MF1617 (SIMS);
[ ]SEMI M33 (TXRF);[ ]ISO 14706 (TXRF);
[ ]Other: (specify)_____________
2-7.1.7 Copper
[ ]Not greater than [ 10 ]atoms/cm
2
[ ]ICP/MS; [ ]AAS; [ ]SEMI MF1617 (SIMS);
[ ]SEMI M33 (TXRF);[ ]ISO 14706 (TXRF);
[ ]Other: (specify)_____________
2-7.1.8 Zinc
[ ]Not greater than [ 10 ]atoms/cm
2
[ ]ICP/MS; [ ]AAS; [ ]SEMI MF1617 (SIMS);
[ ]SEMI M33 (TXRF);[ ]ISO 14706 (TXRF);
[ ]Other: (specify)_____________
2-7.2 Other Surface Metals (List Separately)
2-7.2.1 __________
[ ]Not greater than [ 10 ]atoms/cm
2
[ ]ICP/MS; [ ]AAS; [ ]SEMI MF1617 (SIMS);
[ ]SEMI M33 (TXRF);[ ]ISO 14706 (TXRF);
[ ]Other: (specify)_____________
2-7.2.2 __________
[ ]Not greater than [ 10 ]atoms/cm
2
[ ]ICP/MS; [ ]AAS; [ ]SEMI MF1617 (SIMS);
[ ]SEMI M33 (TXRF);[ ]ISO 14706 (TXRF);
[ ]Other: (specify)_____________
2-7.2.3 __________
[ ]Not greater than [ 10 ]atoms/cm
2
[ ]ICP/MS; [ ]AAS; [ ]SEMI MF1617 (SIMS);
[ ]SEMI M33 (TXRF);[ ]ISO 14706 (TXRF);
[ ]Other: (specify)_____________
SEMI M1-0305 © SEMI 1978, 2005 15
ITEM SPECIFICATION MEASUREMENT METHOD
2-7.2.4 __________
[ ]Not greater than [ 10 ]atoms/cm
2
[ ]ICP/MS; [ ]AAS; [ ]SEMI MF1617 (SIMS);
[ ]SEMI M33 (TXRF);[ ]ISO 14706 (TXRF);
[ ]Other: (specify)_____________
2-7.2.5 __________
[ ]Not greater than [ 10 ]atoms/cm
2
[ ]ICP/MS; [ ]AAS; [ ]SEMI MF1617 (SIMS);
[ ]SEMI M33 (TXRF);[ ]ISO 14706 (TXRF);
[ ]Other: (specify)_____________
2-7.2.6 __________
[ ]Not greater than [ 10 ]atoms/cm
2
[ ]ICP/MS; [ ]AAS; [ ]SEMI MF1617 (SIMS);
[ ]SEMI M33 (TXRF);[ ]ISO 14706 (TXRF);
[ ]Other: (specify)_____________
2-7.3 Surface Organics [ ]Not greater than [ ]ng/cm
2
[ ]SEMI MF1982; [ ]Other: (specify)___________
2-8. FRONT SURFACE INSPECTION CHARACTERISTICS
FOR ALL WAFER DIAMETERS, THE ITEMS LISTED IN THIS SECTION MAY BE SPECIFIED INDIVIDUALLY. ALTERNATIVELY, FOR WAFERS
150 mm OR LESS IN DIAMETER, WHICH CAN BE INSPECTED VISUALLY, THE ITEMS LISTED MAY BE [ ]Specified according to Table 10. If the
items are specified according to Table 10, the items marked with the symbol need not be entered individually.
2-8.1 Scratches – Macro
[ ]None; [ ]Other: (specify)___________ [ ]SEMI MF523; [ ]JIS H 0614; [ ]SSIS;
#4
[ ]Other: (specify)___________
2-8.2 Scratches – Micro [ ]None; [ ]Other: (specify)___________ [ ]SEMI MF523; [ ]JIS H 0614; [ ]SSIS;
#4
[ ]Other: (specify)___________
2-8.3 Pits
[ ]None; [ ]Other: (specify)___________ [ ]SEMI MF523; [ ]JIS H 0614; [ ]SSIS;
#4
[ ]Other: (specify)___________
2-8.4 Haze
[ ]None; [ ]Other: (specify)___________ [ ]SEMI MF523; [ ]JIS H 0614; [ ]SSIS;
#4
[ ]Other: (specify)___________
2-8.5 Localized Light Scatterers
(LLS)
Size: [ ] m (LSE) Count: [ ] [ ] per wafer; [ ] per cm
2
Size: [ ] m (LSE) Count: [ ] [ ] per wafer; [ ] per cm
2
Size: [ ] m (LSE) Count: [ ] [ ] per wafer; [ ] per cm
2
Size: [ ] m (LSE) Count: [ ] [ ] per wafer; [ ] per cm
2
Size: [ ] m (LSE) Count: [ ] [ ] per wafer; [ ] per cm
2
[ ]SEMI MF523; [ ]JIS H 0614; [ ]SSIS;
#4
[ ]Other: (specify)___________
2-8.6 Contamination/Area
[ ]None; [ ]Other: (specify)___________
[ ]SEMI MF523; [ ]JIS H 0614; [ ]SSIS;
#4
[ ]Other: (specify)___________
2-8.7 Edge Chips and Indents
[ ]None; [ ]Other: (specify)___________
[ ]SEMI MF523; [ ]JIS H 0614; [ ]SSIS;
#4
[ ]Other: (specify)___________
SEMI M1-0305 © SEMI 1978, 2005 16
ITEM SPECIFICATION MEASUREMENT METHOD
2-8.8 Edge Cracks
[ ]None; [ ]Other: (specify)___________
[ ]SEMI MF523; [ ]JIS H 0614; [ ]SSIS;
#4
[ ]Other: (specify)___________
2-8.9 Cracks, Crow’s Feet
[ ]None; [ ]Other: (specify)___________
[ ]SEMI MF523; [ ]JIS H 0614; [ ]SSIS;
#4
[ ]Other: (specify)___________
2-8.10 Craters
[ ]None; [ ]Other: (specify)___________
[ ]SEMI MF523; [ ]JIS H 0614; [ ]SSIS;
#4
[ ]Other: (specify)___________
2-8.11 Dimples
[ ]None; [ ]Other: (specify)___________ [ ]SEMI MF523; [ ]JIS H 0614; [ ]SSIS;
#4
[ ]Other: (specify)___________
2-8.12 Grooves
[ ]None; [ ]Other: (specify)___________ [ ]SEMI MF523; [ ]JIS H 0614; [ ]SSIS;
#4
[ ]Other: (specify)___________
2-8.13 Mounds
[ ]None; [ ]Other: (specify)___________ [ ]SEMI MF523; [ ]JIS H 0614; [ ]SSIS;
#4
[ ]Other: (specify)___________
2-8.14 Orange Peel
[ ]None; [ ]Other: (specify)___________ [ ]SEMI MF523; [ ]JIS H 0614; [ ]SSIS;
#4
[ ]Other: (specify)___________
2-8.15 Saw Marks
[ ]None; [ ]Other: (specify)___________ [ ]SEMI MF523; [ ]JIS H 0614; [ ]SSIS;
#4
[ ]Other: (specify)___________
2-8.16 Dopant Striation Rings [ ]None; [ ] Other: (specify)______________________ [ ]SEMI MF523; [ ]JIS H 0614; [ ]DIN 50443/1;
[ ]Other: (specify)___________
2-8.17 Stains
[ ]None; [ ] Other: (specify)______________________
[ ]SEMI MF523; [ ]JIS H 0614; [ ]Other: (specify)___________
2-9. BACK SURFACE INSPECTION CHARACTERISTICS
FOR ALL WAFER DIAMETERS, THE ITEMS LISTED IN THIS SECTION MAY BE SPECIFIED INDIVIDUALLY. ALTERNATIVELY, FOR WAFERS
150 mm OR LESS IN DIAMETER, WHICH CAN BE INSPECTED VISUALLY, THE ITEMS LISTED MAY BE [ ]Specified according to Table 10. If the
items are specified according to Table 10, the items marked with the symbol need not be entered individually.
2-9.1 Edge Chips
[ ]None; [ ]Other: (specify)___________ [ ]SEMI MF 523; [ ]JIS H 0614; [ ]Other: (specify)__________
2-9.2 Edge Cracks [ ]None; [ ]Other (specify)______________ [ ]SEMI MF 523; [ ]JIS H 0614; [ ]Other: (specify)__________
2-9.3 Cracks, Crow’s Feet
[ ]None; [ ]Other: (specify)___________ [ ]SEMI MF 523; [ ]JIS H 0614; [ ]Other: (specify)__________
2-9.4 Contamination/Area
[ ]None; [ ]Other: (specify)___________ [ ]SEMI MF 523; [ ]JIS H 0614; [ ]Other: (specify)__________
2-9.5 Saw Marks
[ ]None; [ ]Other: (specify)___________ [ ]SEMI MF 523; [ ]JIS H 0614; [ ]Other: (specify)__________