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SEMI M9-0999 © SEMI 1986, 1999 7 Figures 3A an d 3B Both Diagram s Show a GaAs Wafer with S urface Orientation B and Flat Option V-G roove

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SEMI M9-0999 © SEMI 1986, 1999 6
Figures 2A and 2B
Both Diagrams Show a GaAs Wafer with Surface Orientation A and Flat Option Dove-Tail
SEMI M9-0999 © SEMI 1986, 19997
Figures 3A and 3B
Both Diagrams Show a GaAs Wafer with Surface Orientation B and Flat Option V-Groove
SEMI M9-0999 © SEMI 1986, 1999 8
Figures 4A and 4B
Both Diagrams Show a GaAs Wafer with Surface Orientation B and Flat Option Dove-Tail