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SEMI M9-0999 © SEMI 1986, 1999 10 Figure 6 Flat Diam eter on Wafer w ith Prim ary Orientation Flat an d Secondary Flat Figure 7 SEMI Wafer Edg e Profile Template Point x y in. µ m in. µ m A 0.0030 76 0.00 0 B 0.0200 508 …
SEMI M9-0999 © SEMI 1986, 19999
Figure 5
A GaAs Wafer with the Same Orientation as Figure 3,
but with a Few Degrees of Orthogonal Misorientation
SEMI M9-0999 © SEMI 1986, 1999 10
Figure 6
Flat Diameter on Wafer with Primary Orientation Flat and Secondary Flat
Figure 7
SEMI Wafer Edge Profile Template
Point x y
in.
µ
m
in.
µ
m
A 0.0030 76 0.00 0
B 0.0200 508 0.00 0
C 0.0020 51 (See Note 2) (See Note 2)
D 0.00 0 0.0030 76
NOTE 1: For referee purposes, U.S. customary units are to be used for 2 and 3 in. diameter wafers and SI units otherwise.
NOTE 2: The y-coordinate of point C is 1/3 the nominal wafer thickness.
SEMI M9-0999 © SEMI 1986, 199911
Figure 8
Examples of Acceptable and Unacceptable Wafer Edge Profiles
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