semi合集-English.pdf - 第4954页
SEMI M11-0704 © SEMI 1988, 2004 11 Figure 9 The Compound ESF defec t is an epi stacking fault that has a broken surface, but maintains the square shape of an ESF. It typically scatters mo re light than a normal ESF becau…
SEMI M11-0704 © SEMI 1988, 2004 10
Figure 8
Composite Defect of polysilicon growth and stacking faults. Magnification 1000 times by Nomarksi
Interference Microscopy. Approximate SSIS image event size >>1.0 µm
2
µ
m
SEMI M11-0704 © SEMI 1988, 2004 11
Figure 9
The Compound ESF defect is an epi stacking fault that has a broken surface, but maintains the square shape
of an ESF. It typically scatters more light than a normal ESF because of the extra facets, so it is sized larger
in a SSIS. Magnification 500 times using Nomarski Interference Microscopy. Approximate SSIS event size:
280 µm
5
µ
m
SEMI M11-0704 © SEMI 1988, 2004 12
Figure 10
Composite Defect of polysilicon growth and stacking faults. Magnification 500 times by Nomarksi
Interference Microscopy. Approximate SSIS image event size >>1.0 µm
5
µ
m