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SEMI M29-1296 © SEMI 1996, 2003 9 Figure 13 Bottom Rib and Orientation Mark Table 3 Dimensions of Box Bottom Unit: mm Standardized Dimension Location 13 Wafers 25 Wafers B1 ø 430 max ø 450 max B2 126.5 ± 1 186.5 ± 1 B3 7…
SEMI M29-1296 © SEMI 1996, 2003 8
Figure 11
Gasket Area
5.4.4 Clamping Indent — Figure 12 and Table 3 show dimensions of a concave part for receiving a clamp.
5.4.4.1 Refer to Figure 13 and Table 3 for horizontal positions.
Figure 12
Clamping Indent
5.4.5 Bottom Rib and Orientation Mark — The position of a bottom rib and the position of an orientation mark are
shown in Figure 13 and Table 3. In addition, since this rib makes a pair with a top rib, this avoids slipping of stacked
shipping boxes, and becomes a datum for positioning the box bottom to equipment.
SEMI M29-1296 © SEMI 1996, 2003 9
Figure 13
Bottom Rib and Orientation Mark
Table 3 Dimensions of Box Bottom
Unit: mm
Standardized Dimension
Location
13 Wafers 25 Wafers
B1 ø 430 max ø 450 max
B2 126.5 ± 1 186.5 ± 1
B3 7 min ←
B4 30° ←
B5 38.5° ←
B6 22.5° ←
B7 158 ± 1 ←
B8 86 ± 1 146 ± 1
B9 156.5 ± 0.5 ←
B10 171.5 ± 0.5 ←
B11 101.5 ± 0.5 161.5 ± 1
B12 10 max ←
B13 18 max ←
B14 16.5 ± 0.5 ←
B15 12 max ←
B16 3 ± 0.5 ←
B17 3 ± 0.5 ←
B18 70 ± 10 ←
B19 30 ± 10 ←
B20 90 ± 10 ←
B21 30 ± 10 ←
B22 30 ± 10 ←
B23 55 ± 10 ←
B24 40 ± 1 ←
B25 27° ←
B26 45° min ←
SEMI M29-1296 © SEMI 1996, 2003 10
Unit: mm
Standardized Dimension
Location
13 Wafers 25 Wafers
B27 45° ←
B28 45° ←
B29 133 ± 1 ←
B30 148 ± 1 ←
B31 14 ± 1 ←
5.5 Retainer
5.5.1 Front Retainer — Dimensions of a front retainer are shown in Figure 14 and Table 4.
NOTE 1: Usually, this part is made of an elastic material, and hence, it is difficult to show its form or to measure it. Here, the
front view of this part shows the dimensions in the status fitted with a cassette.
Figure 14
Front Retainer
Table 4 Dimensions of Front Retainer
Unit: mm
Standardized Dimension
Location
13 Wafers 25 Wafers
FR1 220 ± 1 ←
FR2 183 ± 1 303 ± 1.5
FR3 178 ± 1 298 ± 1.5
FR4 153.5 ± 1 273.5 ± 1.5
FR5 11 ± 0.5 ←
FR6 13 ± 0.5 ←
FR7 12.5 ± 0.5 ←
FR8 59 ± 2 ←
FR9 187 ± 1 307 ± 1.5