semi合集-English.pdf - 第5157页
SEMI M31-0705 © SEMI 1998, 2005 17 Value Specified Symbol Used Figure Number Manual Door Auto-Door Datum Measured from Feature Measured to x 65 9, 12 187.5 mm (7.38 in.) bilateral datum plane vertical axis of cylindrical…
SEMI M31-0705 © SEMI 1998, 2005 16
Value Specified Symbol
Used
Figure
Number
Manual Door Auto-Door
Datum Measured from Feature Measured to
r67 10 240 mm (9.45 in.) maximum y67 in front of nominal wafer
centerline
any part of FOSB
r68
#2
10 271 mm (10.67
in.) maximum
Not applicable y67 in front of nominal wafer
centerline
any part of FOSB manual door
r69 None 10 mm (0.4 in.) minimum
(required)
15 mm (0.6 in.) (recommended
for ergonomic reasons)
not applicable correctable FOSB misalignment in any
horizontal direction
x8 12 12.5 mm (0.49 in.) bilateral datum plane end of the line segment along center of
center carrier sensing pad
x13 12 88.5 mm (3.48 in.) bilateral datum plane near end of the line segment along
center of front carrier sensing pads
x14 12 118.5 mm (4.67 in.) bilateral datum plane far end of the line segment along center
of front carrier sensing pads
x17 12 17.5 mm (0.69 in.) bilateral datum plane line segment along center of rear carrier
sensing pads
x21 12 30 mm (1.18 in.) bilateral datum plane origin of radius r14 at center of info
pads A and B
x22 12 70 mm (2.76 in.) bilateral datum plane origin of radius r17 at center of info
pads C and D
x41
#1
11 30 ± 1 mm
(1.18 ± 0.04 in.)
bilateral datum plane front right orientation notch on robotic
handling flange
x42
#1
11 50 ± 1 mm
(1.97 ± 0.04 in.)
bilateral datum plane front left orientation notch on robotic
handling flange
x43
#1
11 50 ± 1 mm
(1.97 ± 0.04 in.)
bilateral datum plane rear orientation notch on robotic
handling flange
x44
#1
9, 11 53 mm (2.09 in.) maximum bilateral datum plane encroachment of FOSB underneath
robotic handling flange
x45
#1
11 65.3 ± 1 mm
(2.57 ± 0.04 in.)
bilateral datum plane nearest point of side position and
orientation notches on robotic handling
flange
x46
#1
9, 11 71 ± 1 mm
(2.80 ± 0.04 in.)
bilateral datum plane sides of robotic handling flange
x47
#1
11 58 mm (2.28 in.) minimum bilateral datum plane end of robotic handling flange front and
rear
x50 9, 10, 12 215 mm (8.46 in.) maximum bilateral datum plane furthest reach of human handles
x53 9, 10, 12 195 mm (7.68 in.) maximum bilateral datum plane FOSB sides (apart from human
handles)
x56 9, 12 194.75 ± 0.25 mm (7.667 ±
0.010 in.)
bilateral datum plane outside edge of bottom conveyor rails
x57 9, 12 180 mm (7.09 in.) maximum bilateral datum plane FOSB sides underneath bottom
conveyor rails
x60 13 8 ± 0.5 mm
(0.31 ± 0.02 in.)
bilateral datum plane sides of slot for center retaining feature
x64 13 35 mm (1.38 in.) minimum bilateral datum plane sides of front retaining feature
SEMI M31-0705 © SEMI 1998, 2005 17
Value Specified Symbol
Used
Figure
Number
Manual Door Auto-Door
Datum Measured from Feature Measured to
x65 9, 12 187.5 mm (7.38 in.) bilateral datum plane vertical axis of cylindrical fork-lift pin
holes in left and right bottom conveyor
rails
x68 13 25 mm (0.98 in.) minimum bilateral datum plane sides of volume above ramp on front
retaining feature
x69
#1
11 7.6 ± 0.1 mm
(0.299 ± 0.004 in.)
b
ilateral datum plane or
vertical plane rotated away
from it about nominal wafer
centerline
b
eginning of angled surface of the
kinematic grooves in the top robotic
handling flange
x81
#2
1 215 mm (8.46
in.) maximum
Not applicable bilateral datum plane outer edge of manual door
y9 12 92.5 mm (3.64 in.) facial datum plane front end of the line segment along
center of rear carrier sensing pads and
origin of radius r17 at center of info
pads C and D
y10 12 123.5 mm (4.86 in.) facial datum plane rear end of the line segment along
center of rear carrier sensing pads and
origin of radius r14 at center of info
pads A and B
y17 12 27.5 mm (1.08 in.) facial datum plane line segment along center of center
carrier sensing pad
y18 12 40.2 mm (1.58 in.) facial datum plane near end of the line segment along
center of front carrier sensing pads
y19 12 61.1 mm (2.41 in.) facial datum plane far end of the line segment along center
of front carrier sensing pads
y40
#1
8, 10, 12 116 mm (4.57 in.) maximum facial datum plane furthest extent of human handles
toward the front
y41
#1
11 30 ± 1 mm
(1.18 ± 0.04 in.)
facial datum plane left orientation notch on robotic
handling flange
y42 None ± 0.5 mm (± 0.02 in.) flatness
over each area
facial datum plane surfaces that mate with the seal zones
y44
#1
8, 11 53 mm (2.09 in.) maximum facial datum plane encroachment of supports under the
outer edge of the robotic handling
flange
y45
#1
11 65.3 ± 1 mm
(2.57 ± 0.04 in.)
facial datum plane nearest point of front and rear position
and orientation notches on robotic
handling flange
y46
#1
8, 11 71 ± 1 mm
(2.80 ± 0.04 in.)
facial datum plane front and rear edge of robotic handling
flange
y47
#1
11 58 mm (2.28 in.) minimum facial datum plane end of robotic handling flange sides
y49 None 134 mm (5.28 in.) maximum facial datum plane interior of FOSB sides between x51 and
x52
y50 8, 10 130 mm (5.12 in.) minimum facial datum plane rear of upper door frame volume
SEMI M31-0705 © SEMI 1998, 2005 18
Value Specified Symbol
Used
Figure
Number
Manual Door Auto-Door
Datum Measured from Feature Measured to
y52 2, 8, 10, 12 165.5 ± 0.5
mm (6.52 ±
0.02 in.) at
frame seal
zones and 166
mm (6.54 in.)
maximum
elsewhere on
box shell
165.5 0.5
mm (6.52
0.02 in.) at
door and frame
seal zones and
at reserved
spaces for
vacuum
application and
166 mm (6.54
in.) maximum
elsewhere on
door or box
shell
facial datum plane FOSB front
y53 8, 10, 12 190 mm (7.48 in.) maximum facial datum plane FOSB rear
y58 8, 12 75 mm (2.95 in.) minimum facial datum plane end of left and right conveyor rails
y62 13,14 28 mm
(1.10 in.) maximum
facial datum plane rear of front retaining feature
y63 13,14 37.3 ± 0.5 mm
(1.47 ± 0.02 in.)
facial datum plane rear of ramp on front retaining feature
y64 13,14 42.1 ± 0.5 mm
(1.66 ± 0.02 in.)
facial datum plane front of ramp on front retaining feature
y65 13,14 104 mm
(4.09 in.) minimum
facial datum plane front of front retaining feature
y67 10 25 mm (0.98 in.) facial datum plane origin of r67 on bilateral datum plane
y68
#1
11 55 mm (2.17 in.) maximum facial datum plane near end of the front kinematic groove
in the top robotic handling flange
y81
#2
1 30 mm (1.18
in.) minimum
not applicable facial datum plane rear edge of manual door
y82
#2
1 191 mm (7.52
in.) maximum
not applicable facial datum plane front surface of manual door
z2 8, 9, 12 2 mm (0.08 in.) maximum horizontal datum plane
b
ottom of carrier sensing pads and info
pads (when down)
z26 12 9 mm (0.35 in.) minimum horizontal datum plane bottom of info pads (when up)
z30 none 106.5 ± 0 mm
(4.19 ± 0 in.)
for 13-wafer cassette
and
166.5 ± 0 mm
(6.56 ± 0 in.)
for 25-wafer cassette
horizontal datum plane vertical centerline of port
z41 8, 9 0 mm (0 in.)
minimum
external horizontal datum
plane
bottom of FOSB
z43 8, 9 2 ± 1 mm
(0.08 ± 0.04 in.)
external horizontal datum
plane
bottom conveyor rails