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SEMI E74-0301 © SEMI 1998 , 2001 6 Table 6 Control S ignal Connect or (Pump Side) No. Items Connect or Type Referenced S tanda rd Pin Assignments Remarks 1 Control and r unning status signals 15 pin D sub-m iniature Fema…

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SEMI E74-0301 © SEMI 1998, 20015
under 2 seconds
acceleration status(output)
close
open
close
open
start signal (input)
Response Time and Timing for Control Signals
(delay and/o
r
dead time)
Under 50 milliseconds
(Overlapped time of
signal)
deceleration
normal operation
open
close
Timing for the running status signals
close
open
normal operation
open
close
close
open
deceleration
Under 50 milliseconds
Figure 3
Response Time and Timing for Control Signals
Table 5 Signal Power and Contacts
No. Items Power Remarks
Input signals to TMP
(Control signal)
Input signals shall be
driven by DC power
supply in TMP.
Example: See Figure 5.
a) Photocoupler Input.
b) Relay Input.
1
Signal power supply
Output signals from
TMP (Running status
signal)
Output signals shall be
driven by DC power
supply in tools.
Example: See Figure 6.
a) To photocoupler unit.
b) To relay unit.
c) To TTL unit.
2
Signal power supply voltage Signal power supply voltage is between 5 V
DC
and 24 V
DC
3
Acceptable range of signal power
supply voltage
Acceptable voltage range is 4 V
DC
minimum
and 30 V
DC
maximum.
4
Running status signal contact Dry contact or open
collector
Acceptable current 100
mA maximum.
SEMI E74-0301 © SEMI 1998, 2001 6
Table 6 Control Signal Connector (Pump Side)
No. Items Connector Type Referenced Standard Pin Assignments Remarks
1 Control and running
status signals
15 pin
D sub-miniature
Female receptacle
See Table 7 and
Figure 4
(See Related Documents for an
example of the specification for
this connector type.)
Table 7 Pin Assignment for Control Signal Connector
No. Pin No. Signal item (polarity) Remarks
1 1 Start/Stop input ( + )
22
3 3 Acceleration status ( + )
4 4 Normal status ( + )
5 5 Deceleration status ( + )
6 6 Alarm status ( + )
7 7 Remote/Local status ( + )
88
9 9 Start/Stop input ( - )
10 10
11 11 Acceleration status ( - )
12 12 Normal status ( - )
13 13 Deceleration status ( - )
14 14 Alarm status ( - )
15 15 Remote/Local status ( - )
MAX. 45.1 mm
MAX. 18.0 mm
Screw lock size : M2.6
Contact pin surface : Au
Figure 4
15 pin D sub-Miniature Female Receptacle
SEMI E74-0301 © SEMI 1998, 20017
DC Voltage
DC Voltage
ToolTMP
(+)
(-)
(+)
(-)
TMP Tool
b
)
a
)
Figure 5
Schematic Example of TMP Input Signals
ToolTMP
DC Voltage
DC Voltage
DC Voltage
(+)
(-)
(+)
(-)
(+)
(-)
a
)
ToolTMP
ToolTMP
b
)
c
)
Figure 6
Schematic Example of TMP Output Signals