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SEMI E76-0299     SEMI 1998, 1999 12 Figure R1-4 Pre-facilitation Pedestal w ith Side/Back Mounted Interfa ce Panels NOTICE: These standards do not purport to address safety issues, if any, associated w ith their use…

SEMI E76-0299 



 SEMI 1998, 1999

Figure R1-3

Pre-facilitation Pedestal with Multiple Top Mounted Interface Panels

R1-1.9 The Figure R1-3 also shows the facility line

running through the waffle slab directly underneath the

equipment. In addition, this example depicts situations

where there is a physical requirement to manifold

connections underneath the equipment. The same

advantages as Example #1 apply with the exception of

minimizing the number of connections to the

equipment.

R1-1.10 The Figure R1-4 shows the facility utility lines

running up through the waffle slab to the side/back of

the pre-facilitation pedestal and connecting to the EPOC

interface panel mounted on the side/back of the pre-

facilitation pedestal. In this example a short section of

line is required to complete the connection from the

EPOC interface panel to the connection within the

equipment itself. This short section of line should be

prefabricated such that final hookup to the equipment

can be accomplished quickly once the equipment is set.

It is important to note that this option requires careful

consideration on how to accommodate HPM lines. It is

generally undesirable to have additional connections in

HPM lines or to design the pre-facilitation pedestal

itself to provide secondary containment. In this

example, the equipment supplier is responsible for the

volume in the pre-facilitation pedestal to route and

manifold the plumbing as required

SEMI E76-0299



 SEMI 1998, 1999

Figure R1-4

Pre-facilitation Pedestal with Side/Back Mounted Interface Panels

NOTICE: These standards do not purport to address

safety issues, if any, associated with their use. It is the

responsibility of the user of these standards to establish

appropriate safety and health practices and determine

the applicability of regulatory limitations prior to use.

SEMI makes no warranties or representations as to the

suitability of the standards set forth herein for any

particular application. The determination of the

suitability of the standard is solely the responsibility of

the user. Users are cautioned to refer to manufacturer’s

instructions, product labels, product data sheets, and

other relevant literature respecting any materials

mentioned herein. These standards are subject to change

without notice.

The user’s attention is called to the possibility that

compliance with this standard may require use of

copyrighted material or of an invention covered by

patent rights. By publication of this standard, SEMI

takes no position respecting the validity of any patent

rights or copyrights asserted in connection with any

item mentioned in this standard. Users of this standard

are expressly advised that determination of any such

patent rights or copyrights, and the risk of infringement

of such rights, are entirely their own responsibility.

International), 3081 Zanker Road, San Jose, CA 95134. Reproduction o

the contents in whole or in part is forbidden without express written

consent of SEMI.

SEMI E77-1104 © SEMI 1998, 2004 1

SEMI E77-1104

TEST METHOD FOR CALCULATION OF CONVERSION FACTORS FOR

A MASS FLOW CONTROLLER USING SURROGATE GASES

This test method was technically approved by the Global Gases Committee and is the direct responsibility of

the North American Gases Committee. Current edition approved by the North American Regional Standards

Committee on July 11, 2004. Initially available at www.semi.org September 2004; to be published

November 2004. Originally published September 1998.

1 Purpose

1.1 The purpose of this test method is to quantify a

nominal average conversion factor from one gas to

another for an MFC and to quantify the conversion

factor as function of flow for an MFC.

2 Scope

2.1 This procedure describes a method to determine the

MFC conversion factor and function between two

gases.

2.2 This document provides a common basis for

communication between manufacturers and users.

2.3 The intent of this document is not to suggest any

specific testing program, but to specify the test method

to be used when testing for parameters covered by this

method. Reference operating conditions represent the

environmental conditions where the “best” performance

can be expected.

NOTICE: This standard does not purport to address

safety issues, if any, associated with its use. It is the

responsibility of the users of this standard to establish

appropriate safety and health practices and determine

the applicability of regulatory or other limitations prior

to use.

3 Limitations

3.1 It is not practical to evaluate performance under all

possible combinations of operating conditions. This

test procedure should be applied under laboratory

(reference) conditions; its intent is to collect sufficient

data to form a judgment of the field performance of the

MFC being tested.

3.1.1 The results from this test represent the

performance of the specific device tested (i.e., make,

model, full scale flow and operating conditions). The

results may not apply to devices of different

manufacture, model, full scale flow or under different

operating conditions.

3.2 This procedure does not apply to pressure based

MFC.

4 Referenced Standard

4.1 None.

NOTICE: Unless otherwise indicated, all documents

cited shall be the latest published versions.

5 Terminology

5.1 Abbreviations & Acronyms

5.1.1 CF (gasA/gasB) — conversion factor from Gas A

to Gas B.

5.1.2 D.U.T.— device under test

5.1.3 kPa — kiloPascal

5.1.4 MFC — mass flow controller

5.1.5 psia — pounds per square inch absolute

5.1.6 sccm — standard cubic centimeters per minute

5.1.7 slm — standard liters per minute

5.1.8 %F.S. — percent full scale

5.2 Definitions

5.2.1

actual flow — the flow rate as determined by the

flow standard used in the test procedure.

5.2.2 conversion factor — the ratio of the mass flow-

rate of Gas A flowing through an MFC for a given

setpoint to the mass flow rate of Gas B flowing through

the same MFC and setpoint.

5.2.3 conversion function — a relationship that

describes the flow dependency of the conversion factor.

The conversion function is graphically determined.

5.2.4 indicated flow — the flow rate as determined by

the output of the D.U.T.

5.2.5 mean — the sum of a group of measurements

divided by the number of measurements; average.

5.2.6 measured value — the actual flow through a

D.U.T., expressed in sccm or slm.

5.2.7 measured value, average — the sum of all

readings (both upscale and downscale) for all cycles, at

a single setpoint, divided by the number of these

readings.