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SEMI M55-0705 © SEMI 2003, 2004 10 a a a 1 2 3 Primary Flat Secondary Flat Trace of (1120 ) plane in (00 01) plane [1120] directio n [1120] directi on [1100] directi on Trace of (1100 ) plane in (00 01) plane - - - - - S…

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SEMI M55-0705 © SEMI 2003, 2004 9
Figure 3
SEMI Wafer Edge Profile Template
NOTE 13: For the exact dimensions and coordinates of points A to D see the appropriate silicon carbide wafer standard.
Figure 4
Examples of Acceptable and Unacceptable Wafer Edge Profiles
SEMI M55-0705 © SEMI 2003, 2004 10
a
a
a
1
2
3
Primary Flat
Secondary Flat
Trace of (1120) plane
in (0001) plane
[1120] direction
[1120] direction
[1100] direction
Trace of (1100) plane
in (0001) plane
-
-
-
-
-
Silicon Face
Figure 5
Relation of Lattice Sites, Crystallographic Planes and Flats (flat length not to scale)
The position of the secondary flat is shown for view on the Silicon face.
NOTE 14: For the exact dimensions and tolerances of primary and secondary flats see the appropriate polished silicon carbide
wafer standard.
Secondary Flat
Secondary
Flat
Length
Primary
Orientation
Flat
Primary Flat Length
Figure 6
Flat Length of Primary Orientation Flat and Secondary Flat
SEMI M55-0705 © SEMI 2003, 2004 11
length
depth
indent
length
edge chip
depth
Figure 7
Depth and length of edge chip and indent
Backside
Primary Flat
A
C
C
L
B
characters
Figure 8
Definition of Window for Laser Marking
The width of the permitted window is twice dimension C.
NOTE 15: For the exact dimensions of A, B, and C, see the appropriate wafer standard.
NOTICE: SEMI makes no warranties or representations as to the suitability of the standards set forth herein for any
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