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SEMI P1-1101 © SE MI 1981, 2001 4 Figure 2 Measure m e nts to Deter mine Substrate Squarene ss Table 2 Specifications for Chamf ered and Rounded Ed ge Dimensions TA A B B C C D D E E Nominal Min. Max. Min. Max. Min. Max.…

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SEMI P1-1101 © SEMI 1981, 20013
14 Packing and Marking
14.1 Substrates shall be packed in a class 100 environment as defined by ISO 14644-1. Containers shall be designed
to prevent glass-to-glass contact, and to protect the substrates from contamination in handling and transit. Substrates
shall be shipped with the acceptable flatness side toward the front of the box. This orientation shall be indicated on
each container. Packaging shall comply with the applicable internal, national, state, and local laws and regulations
required for shipping.
14.2 Containers shall be labeled “Warning: Open and Handle Under Cleanroom Conditions Only”: as well as
identified by user purchase order number (if applicable), drawing number (if applicable), quantity, supplier lot
number, and material identification.
Table 1 Specifications for Edge Length, Squareness, and Thickness for Square Substrates
Nominal Edge Length Edge Length Min. Edge Length Max. Squareness Thickness Min. Thickness Max. Units
2 1/2" Sq. 62.7 63.50 0.05/25.40 1.40 1.60 mm
3" Sq. 75.4 76.2 0.05/25.40 1.40 1.60 mm
3 1/2" Sq. 88.1 88.9 0.05/25.40 1.40 1.60 mm
4" Sq. 100.80 101.6 0.05/25.40 1.40 1.60 mm
2.20 2.40 mm
5" Sq. 126.2 127.0 0.05/25.40 2.20 2.40 mm
3.70 3.90 mm
6.25 6.45 mm
6" Sq. 151.6 152.4 0.05/25.40 2.20 2.40 mm
2.95 3.15 mm
3.70 3.90 mm
6.25 6.45 mm
7" Sq. 177.0 177.8 0.05/25.40 2.95 3.15 mm
3.70 3.90 mm
6.25 6.45 mm
NOTE: HTE squareness is 0.08/25.40
Figure 1
Square Hard Surface Photomask Substrate
SEMI P1-1101 © SEMI 1981, 2001 4
Figure 2
Measurements to Determine Substrate Squareness
Table 2 Specifications for Chamfered and Rounded Edge Dimensions
TAABBCCDDEE
Nominal Min. Max. Min. Max. Min. Max. Min. Max. Min. Max. Units
1.50 0.20 0.50 0.20 0.50 0.30 0.70 2.00 3.00 0.25 0.60 mm
2.30 0.20 0.60 0.20 0.60 0.30 0.70 2.00 3.00 0.25 0.60 mm
3.05 0.20 0.60 0.20 0.60 0.30 0.70 2.00 3.00 0.25 0.60 mm
3.80 0.20 0.60 0.20 0.60 0.30 0.70 2.00 3.00 0.25 0.60 mm
4.57 0.20 0.60 0.20 0.60 0.30 0.70 2.00 3.00 0.25 0.60 mm
6.35 0.20 0.60 0.20 0.60 0.30 0.70 2.00 3.00 0.25 0.60 mm
C
Ed
g
e Len
g
th
Edge Length
A
B
B
T
Ed
g
e Len
g
th
A
B
B
T
D Typ. 4 corners
Edge Length
Figure 3
Chamfered Edge Dimensions
SEMI P1-1101 © SEMI 1981, 20015
Figure 4
Rounded Edge Dimensions
Table 3 Substrate Material Characteristics
Coefficient of Expansion (
°
C
−
1
)
Between 0
°
C and 300
°
C
Minimum Transmittance (%) of 1.5 mm Thick Substrate at Wavelengths of:
Glass Type 157 mm 193 mm 230 nm 254 nm 365 nm 405 nm 436 nm
HTE
80 to 100 × 10
-7
NA NA NA NA 80 85 90
MTE
40 to 60 × 10
-7
NA NA NA NA 80 85 90
LTE
30 to 39 × 10
-7
NA NA NA NA 80 85 90
ULTE
< 7.5 × 10
-7
NA NA 90 90 90 90 90
DFS
< 7.5 × 10
-7
NA 87 90 90 90 90 90
MFS
< 7.5 × 10
-7
82 87 90 90 90 90 90