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SEMI P1-1101 © SE MI 1981, 2001 5 Figure 4 Rounded Edge Dimensio ns Table 3 Substrate Materi al Characteris tics Coefficient of Expansion ( ° C − 1 ) Between 0 ° C an d 300 ° C Minimum Transmittanc e (% ) of 1.5 mm Thick…

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SEMI P1-1101 © SEMI 1981, 2001 4
Figure 2
Measurements to Determine Substrate Squareness
Table 2 Specifications for Chamfered and Rounded Edge Dimensions
TAABBCCDDEE
Nominal Min. Max. Min. Max. Min. Max. Min. Max. Min. Max. Units
1.50 0.20 0.50 0.20 0.50 0.30 0.70 2.00 3.00 0.25 0.60 mm
2.30 0.20 0.60 0.20 0.60 0.30 0.70 2.00 3.00 0.25 0.60 mm
3.05 0.20 0.60 0.20 0.60 0.30 0.70 2.00 3.00 0.25 0.60 mm
3.80 0.20 0.60 0.20 0.60 0.30 0.70 2.00 3.00 0.25 0.60 mm
4.57 0.20 0.60 0.20 0.60 0.30 0.70 2.00 3.00 0.25 0.60 mm
6.35 0.20 0.60 0.20 0.60 0.30 0.70 2.00 3.00 0.25 0.60 mm
C
Ed
g
e Len
g
th
Edge Length
A
B
B
T
Ed
g
e Len
g
th
A
B
B
T
D Typ. 4 corners
Edge Length
Figure 3
Chamfered Edge Dimensions
SEMI P1-1101 © SEMI 1981, 20015
Figure 4
Rounded Edge Dimensions
Table 3 Substrate Material Characteristics
Coefficient of Expansion (
°
C
−
1
)
Between 0
°
C and 300
°
C
Minimum Transmittance (%) of 1.5 mm Thick Substrate at Wavelengths of:
Glass Type 157 mm 193 mm 230 nm 254 nm 365 nm 405 nm 436 nm
HTE
80 to 100 × 10
-7
NA NA NA NA 80 85 90
MTE
40 to 60 × 10
-7
NA NA NA NA 80 85 90
LTE
30 to 39 × 10
-7
NA NA NA NA 80 85 90
ULTE
< 7.5 × 10
-7
NA NA 90 90 90 90 90
DFS
< 7.5 × 10
-7
NA 87 90 90 90 90 90
MFS
< 7.5 × 10
-7
82 87 90 90 90 90 90
SEMI P1-1101 © SEMI 1981, 2001 6
Table 4 Glass Substrate Defect Limits per Plate
INTERNAL DEFECTS IN THE QUALITY AREA
Opaque Spots Bubble Total Defects (per cm.
2
)Notes
HTE Glass
> 10 µm > 10 µm
01 and 2
≤ 10 µm ≤ 10 µm
0.0465
MTE Glass
> 5 µm > 7 µm
0
≤ 5 µm ≤ 7 µm
0.0465
LTE Glass
> 5 µm > 5 µm
0
≤ 5 µm ≤ 5 µm
0.031
ULTE Glass
> 2 µm > 2 µm
0
≤ 2 µm ≤ 2 µm
0.0078
DFS Glass
> 1.5 µm > 1.5 µm
0
≤ 1.5 µm ≤ 1.5 µm
0.0078
MFS Glass
> 1.2 µm > 1.2 µm
0
≤ 1.2 µm ≤ 1.2 µm
0.0078
SURFACE DEFECTS IN THE QUALITY AREA
Frontside Residue Scratch Size
Total Scratch
Defects Sleek Size
Total Sleeks Defects
(per cm
2
)
Opaque Spot
Size
Total Opaque Spot
Defects (per cm
2
)
HTE Glass None
> 1.0 µm
0
> 2 µm
0
> 5 µm
0
≤ 1.0 µm
no limit
1–2 µm
0.0465
1–5 µm
0.0465
MTE Glass None
> 1.0 µm
0
> 2 µm
0
2.5 µm
0
≤ 1.0 µm
no limit
1–2 µm
0.0465
1–2.5 µm
0.0465
LTE Glass None
> 1.0 µm
0
> 2 µm
0
2.5 µm
0
≤ 1.0 µm
no limit
1–2 µm
0.0465
1–2.5 µm
0.0465
ULTE Glass None
> 1.0 µm
0
> 2 µm
0
2.0 µm
0
≤ 1.0 µm
no limit
1–2 µm
0.0465
1–2.0 µm
0.0155
DFS Glass None
> 1.0 µm
0
> 1.5 µm
0
1.5 µm
0
≤ 1.0 µm
no limit
1–1.5 µm
0.0310
1–1.5 µm
0.0110
MFS Glass None
> 1.0 µm
0
> 1.2 µm
0
1.2 µm
0
≤ 1.0 µm
no limit
1–1.2 µm
0.0155
1–1.2 µm
0.0052
Backside
HTE Glass
> 3.0 µm
0
> 10 µm
0.0465
≤ 3.0 µm
no limit
≤ 10 µm
no limit
MTE Glass
> 3.0 µm
0
> 10 µm
0.0465
≤ 3.0 µm
no limit
≤ 10 µm
no limit
LTE Glass
> 3.0 µm
0
> 10 µm
0.0465
≤ 3.0 µm
no limit
≤ 10 µm
no limit
ULTE Glass
> 3.0 µm
0
> 10 µm
0.0465
≤ 3.0 µm
no limit
≤ 10 µm
no limit
DFS Glass
> 3.0 µm
0
> 10 µm
0.0465
≤ 3.0 µm
no limit
≤ 10 µm
no limit
MFS Glass
> 3.0 µm
0
> 10 µm
0.0465
≤ 3.0 µm
no limit
≤ 10 µm
no limit