semi合集-English.pdf - 第5513页

SEMI P10-0705 © SEMI 1990, 2005 8 [CUSTOMER_ SPEC CUSTOMER_SPEC_REVISION ] {TOP_PELLICLE_TYPE [ TOP_PELLICLE_CENTRALITY_ERROR ] [PRICE] } {BOTTOM_PELLICLE_TYPE [ BOTTOM_PELLICLE_CENTRALITY_ERROR ] [PRICE]} [GUIDES_REQD […

SEMI P10-0705 © SEMI 1990, 2005 7

[LAYER_PRIORITY [ELAPSED_TIME] ]

[MILESTONES <

ship_to>] [PERIODIC_UPDATES <ship_to>]

[ESTIMATED_ARRIVALS <

ship_to>]

[BUSINESS_CONTACT] {BUSINESS_ADDRESS} {BUSINESS_PHONE}

{BUSINESS_FAX} [BUSINESS_EMAIL]

[BILLING_CONTACT] {BILLING_ADDRESS}

{BILLING_PHONE} {BILLING_FAX} [BILLING_EMAIL]

[PRICE]

{PTC_HOURS [PTC_RATE] [PTC_FIXED] }

[EWT_THRESHOLD EWT_RATE [EWT_CEILING] ]

[SECURITY_CLASS] [QS9000]

[SHIPPING_CONTACT] {SHIPPING_ADDRESS} {SHIPPING_PHONE}

{SHIPPING FAX} [SHIPPING_EMAIL]

{SHIPPING_METHOD}

[REPAIRS_AUTHORIZED]

shippable_data>]

{ MFG_SITE_REQD }

{ [LITHO_EQUIP_REQD] {EQUIP_SITE_REQD}

{ [LITHO_MODEL_REQD] {LITHO_MODE_REQD} } }

PRODUCT_TYPE [PRODUCT_MAGNIFICATION] [PRODUCT_IMAGING_TYPE]

[QUANTITY] [PRODUCT_AS_CHECKPLATE]

[MULTIWRITE]

{WAFER_EXPOSURE_TOOL}

[<wafer_exposure_data> <aerial_image_data>]

[FAB_TECHNOLOGY] [WAFER_FAB]

[JOB_NAME] [JOB_LEVEL]

[RETROFIT_JOB_NAME] [RETROFIT_JOB_LEVEL]

[RETROFIT_MASK_SET_ID] [RETROFIT_MASK_ID]

[RETROFIT_MASK_SET_NAME [RETROFIT_MASK_SET_VERSION]

[RETROFIT_MASK_NAME] ]

title_data>}

barcode_data>}

[JOB_ONLY_APPROVAL_REQD] [JOB_WITH_PATTERNS_APPROVAL_REQD]

{PATTERN_APPROVAL_REQD} [ALL_PATTERNS_APPROVAL_REQD]

{APPROVAL_REQD}{REVIEW_REQD}

[SERIAL_NUMBER]

[MIRROR_MASK] [MASK_ROTATION]

substrate>

phase_shift>]

[UT1X_UNCUT] [PROCESS] [PROCESS_ETCHING_TYPE]

SEMI P10-0705 © SEMI 1990, 2005 8

[CUSTOMER_SPEC CUSTOMER_SPEC_REVISION]

{TOP_PELLICLE_TYPE [

TOP_PELLICLE_CENTRALITY_ERROR] [PRICE] }

{BOTTOM_PELLICLE_TYPE [

BOTTOM_PELLICLE_CENTRALITY_ERROR] [PRICE]}

[GUIDES_REQD [PRICE] ]

[CENTRALITY]

registration>}

[REGISTR_CLOSURE [REGISTR_CLOSURE_REFERENCE_ONLY]

{REGISTR_CLOSURE_EQUIP_REQD} {EQUIP_SITE_REQD}

[REGISTR_CLOSURE_BEGIN REGISTR_CLOSURE_END] ]

[BUTTING_ERROR [BUTTING_ERROR_METHOD] ]

cd_group>}

cd_set>}

cd_xy_definition>}

cd_iso_dense_definition>}

[MIN_MASK_FEATURE_SIZE] [

MIN_CORNER_TO_CORNER_GAP]

[PERCENT_CLEAR]

opc_definition>}

defect_definition>}

[INSPECTION_REF_LOCATION]

{<surface_definition>}

[INSPECT_THROUGH_PELLICLE <

defect_definition>]

{<sem_photo>}

[QUALITY_GROUP_ID]

[COMPACT_LABEL]

{PACKAGE [MAX_MASKS_IN_PACKAGE] }

{ADDITIONAL_MASK_INFO}

<wafer_exposure_data> = START_WAFER_EXPOSURE_DATA

WAFER_EXPOSURE_NUMERICAL_APERATURE

[WAFER_EXPOSURE_SIGMA]

[WAFER_EXPOSURE_SIGMA_INNER WAFER_EXPOSURE_SIGMA_OUTER]

WAFER_EXPOSURE_ILLUMINATION

END_WAFER_EXPOSURE_DATA

<aerial_image_data> = START_AERIAL_IMAGE_DATA

AIM_WAVELENGTH

[AIM_INTENSITY_VARIATION_DELTA]

[AIM_FLUX_INTENSITY_DELTA]

[AIM_CD_DELTA]

END_AERIAL_IMAGE_DATA

<title_data> = START_TITLE [TITLE_TEXT] [TITLE_TYPE] [

TITLE_FONT] [TITLE_HEIGHT]

[

TITLE_MAG] [TITLE_JUSTIFICATION] [TITLE_LOCATION] [MIRROR_TITLE]

SEMI P10-0705 © SEMI 1990, 2005 9

[ROTATE_TITLE] [ROTATE_TITLE_CHARACTERS] END_TITLE

<barcode_data> = START_BARCODE [BARCODE_TYPE] [BARCODE_TEXT] [BARCODE_LOCATION]

[BARCODE_ROTATION] END_BARCODE

<substrate> = START_SUBSTRATE

[

BLANK_SIZE] [BLANK_TYPE] [BLANK_GRADE] [BLANK_FLATNESS]

[

MASK_COATING] [RESIST_TYPE] [RESIST_THICKNESS]

[BLANK_BIREFRINGENCE_REQD]

[

ATTENUATOR] [COATING_GRADE]

euv_blank_type>]

END_SUBSTRATE

<euv_blank_type> = EUV_BLANK_TYPE

EUV_FLATNESS_FRONT

EUV_FLATNESS_BACK

EUV_MULTILAYER_COMPOSITION

EUV_CAPPING_COMPOSITION

EUV_MMR_WAVELENGTH

EUV_MEAN_PEAK_REFLECTIVITY

EUV_PEAK_REFLECTIVITY_UNIFORMITY

EUV_ABSORBER_COMPOSITION

EUV_ABSORBER_OPTICAL_PROPERTIES

EUV_BLANK_RESISTANCE

EUV_EXPANSION_COEFF

<ship_plot> = START_SHIP_PLOT

PLOT_TYPE PLOT_SCALE QUANTITY [PRICE]

[PLOT_FORMAT] [PATTERN_PLOT_NORMAL_TONE]

[<ship_to>]

END_SHIP_PLOT

<films> = SHIP_FILM [QUANTITY]

[FILM_SCALE] [FILM_SIZE] [FILM_COLOR] [FILM_NORMAL_TONE]

[PRICE] [<

ship_to>] END_SHIP_FILM

<phase_shift> =

START_PHASE_SHIFT [PHASE_SHIFT_QUALITY_ID]

PSM_WAVELENGTH

[TRANSMISSION_TARGET

[TRANSMISSION_REFERENCE_ONLY]

[TRANSMISSION_TOLERANCE]

[TRANSMISSION_RANGE] [TRANSMISSION_ERROR]

{TRANSMISSION_EQUIP_REQD [TRANSMISSION_MODE_REQD] }

{ [

TRANSMISSION_MARK_SITE_ID] TRANSMISSION_MARK_LOCATION }

[

TRANSMISSION_MARK_FEATURE]

[TRANSMISSION_MARK_LOCATION_DRAWING]