semi合集-English.pdf - 第5517页
SEMI P10-0705 © SEMI 1990, 2005 12 <opc_definition> = START_OPC [OPC_TYPE [OPC_MINIMUM_FEATU RE_SIZE] [OPC_MINIMUM_GAP] [OPC_PATTERN_SEPARATE] [OPC_PATTERN_MODIFIABLE] ] END_OPC <defect_definition> = ST ART_D…
SEMI P10-0705 © SEMI 1990, 2005 11
END_REGISTR
<cd_group> = START_CD
[<
cd_definition>]
[NUMBER_OF_CDS]
{ [
CD_SITE_ID] CD_LOCATION } [CD_MATRIX_FILE_NAME]
END_CD
<cd_definition> = [
CD_QUALITY_ID] [CD_DATA] [CD_DIGITIZED] [CD_TONE_CLEAR]
[
CD_MORPHOGRAPHY]
[
CD_PERCENT_CLEAR] [CD_PERCENT_CLEAR_WINDOW]
[CD_TARGET] [CD_ORIENTATION] [
CD_PITCH]
[
CD_FEATURE] [CD_LOCATION_DRAWING] [CD_DRAWING]
[CD_REFERENCE_ONLY]
[CD_TOLERANCE]
[CD_RANGE] [CD_THREE_SIGMA]
[CD_DEVIATION_FROM_TARGET] [CD_DEVIATION_FROM_MEAN]
[CD_STD] [CD_CORRELATION_ID]
{CD_EQUIP_REQD} {EQUIP_SITE_REQD}
<cd_set> = START_CD_SET
{
CD_GROUP_NAME}
[
CD_REFERENCE_ONLY]
[
CD_QUALITY_ID]
[
CD_TOLERANCE] [CD_RANGE] [CD_THREE_SIGMA]
[
CD_DEVIATION_FROM_TARGET] [CD_DEVIATION_FROM_MEAN]
[
CD_STD] [CD_CORRELATION_ID]
END_CD_SET
<cd_xy_definition> = START_CD_XY_DEFINITION
{CD_X_GROUP} {CD_Y_GROUP}
{<
cd_xy_site>}
[
CD_XY_TOLERANCE] [CD_XY_DEVIATION]
[
CD_XY_REFERENCE_ONLY]
END_CD_XY_DEFINITION
<cd_xy_site> = START_CD_XY_SITE
{ [
CD_HORIZONTAL_ID] CD_HORIZONTAL_LOCATION
[
CD_VERTICAL_ID] CD_VERTICAL_LOCATION }
END_CD_XY_SITE
<cd_iso_dense_definition> = START_CD_ISO_DENSE
{
CD_ISO_GROUP} {CD_DENSE_GROUP}
[
CD_ISO_DENSE_TOLERANCE]
[
CD_ISO_DENSE_REFERENCE_ONLY]
END_CD_ISO_DENSE
SEMI P10-0705 © SEMI 1990, 2005 12
<opc_definition> = START_OPC
[OPC_TYPE [OPC_MINIMUM_FEATURE_SIZE] [OPC_MINIMUM_GAP]
[OPC_PATTERN_SEPARATE] [OPC_PATTERN_MODIFIABLE] ]
END_OPC
<defect_definition> = START_DEFECT_DEFINITION [DEFECT_QUALITY_ID]
[VISUAL_INSPECTION_OK] [VISUAL_INSPECTION_REQD]
{VISUAL_INSP_CRITERIA}
[AUTO_INSPECTION_REQD] [DIE_TO_DIE_INSPECTION]
[DEFECT_SIZE] [DEFECT_SIZE_CL] [DEFECT_SIZE_DK]
[DEFECT_SIZE_CL_ADJ] [DEFECT_SIZE_CL_ADJ_REP]
[DEFECT_SIZE_DK_ADJ] [DEFECT_SIZE_DK_ADJ_REP]
[DEFECT_SIZE_CL_ISO] [DEFECT_SIZE_CL_ISO_REP]
[DEFECT_SIZE_DK_ISO] [DEFECT_SIZE_DK_ISO_REP]
[DEFECT_DENSITY] [DEFECT_COUNT] [DEFECT_COUNT_REP]
[DEFECTIVE_DIE_DENSITY] [DEFECTIVE_DIE_COUNT]
[DEFECTIVE_DIE_COUNT_REP]
[PERCENT_DEFECTIVE_DIE]
[EDGE_ROUGHNESS]
{INSPECTION_AREA} {INSPECTION_AREA_EXCLUDE}
{SCRATCH_SIZE_FRONT {SCRATCH_INSP_AREA {SCRATCH_INSP_EXCLUDE }}}
{SCRATCH_SIZE_BACK {SCRATCH_INSP_AREA {SCRATCH_INSP_EXCLUDE }}}
[GOOD_FIELDS]
{DEFECT_EQUIP_REQD {EQUIP_SITE_REQD}
[DEFECT_INSP_MODE_REQD]
[DEFECT_INSP_PIXEL_SIZE_REQD]
{ DEFECT_TYPE DEFECT_INSP_SENSITIVITY_REQD
{ BIN_SIZE SEVERITY_CRITERION_REQD } }
[ DEFECT_SETUP_FILE_NAME_REQD] }
[<
database_inspection>]
[<repair_definition>]
END_DEFECT_DEFINITION
<database_inspection> = DATABASE_INSPECTION [PRICE]
[DATABASE_SOURCE]
[DATABASE_TOP_CELL DATABASE_LAYER]
[DATABASE_FILE_NAME]
[DATABASE_UNIT] [USER_UNIT]
[DATABASE_WITH_JOB [DATABASE_JOB_NAME DATABASE_JOB_LEVEL] ]
{DATABASE_AREA}
<repair_definition> = START_REPAIR_DEFINITION
{ REPAIR_EQUIP_REQD {EQUIP_SITE_REQD} }
END_REPAIR_DEFINITION
SEMI P10-0705 © SEMI 1990, 2005 13
<surface_definition> = START_SURFACE_DEFINITION
[SURFACE_INSPECTION] [
SURFACE_QUALITY_ID]
{ [SURF_INSP_EQUIP_REQD] {EQUIP_SITE_REQD} [SURF_INSP_MODE_REQD]
[SURF_INSP_PIXEL_SIZE_REQD]
{SURF_DEFECT_TYPE
SURF_INSP_SENSITIVITY_REQD
{
BIN_SIZE SEVERITY_CRITERION_REQD } }
[SURF_INSP_SETUP_FILE_NAME_REQD] }
[SURF_INSP_METHOD] [SURF_INSP_AREA]
[
SURF_INSP_PELL_TOP]
[
SURF_INSP_PELL_TOP_ON_CLEAR_PATTERN]
[
SURF_INSP_PELL_TOP_ON_OPAQUE_PATTERN]
[
SURF_INSP_PELL_TOP_OUTSIDE_FRAME]
[
SURF_INSP_PELL_TOP_OUTSIDE_ON_OPAQUE]
[
SURF_INSP_PELL_TOP_OUTSIDE_MEMBRANE]
[
SURF_INSP_PELL_TOP_INSIDE_MEMBRANE]
[
SURF_INSP_PELL_TOP_OUTSIDE_ON_FRAME]
[
SURF_INSP_PELL_TOP_INSIDE_ON_FRAME]
[SURF_INSP_PELL_BOTTOM]
[SURF_INSP_GLASS_SIDE] [SURF_INSP_PATTERN_SIDE]
[TRANSMISSION_DEFECT_CLEAR] [TRANSMISSION_DEFECT_DARK]
END_SURFACE_DEFINITION
<sem_photo> = {
START_SEM_PHOTO
{ [
SEM_PHOTO_SITE_ID] [SEM_PHOTO_LOCATION] }
[
SEM_PHOTO_MATRIX_FILENAME]
[CD_FEATURE] [CD_LOCATION_DRAWING] [CD_DRAWING]
[
SEM_PHOTO_SCALE]
[
SEM_PHOTO_TILT] [SEM_PHOTO_ROTATION]
END_SEM_PHOTO }
<mask_definition> = MASK_ID [MASK_NAME] DELIVERABLE_MASK
<
mask_options> END_MASK
<cell_definition> = CELL_ID [<
pattern_options>] END_CELL_OPTIONS
{<
cell_instance>} {<pattern_instance>} END_CELL
<pattern_group> = PATTERN_GROUP_ID [<
pattern_options>]
END_PATTERN_GROUP_OPTIONS {<
pattern_definitions>}
END_PATTERN_GROUP
<pattern_definitions> = LEVEL_ID
[PATTERN_NAME] [PATTERN_VISUAL_ID] [FIGURE_COUNT]
[MINIMUM_FEATURE_SIZE {MINIMUM_FEATURE_LOCATION} ]
{<
opc_definition>}