semi合集-English.pdf - 第5529页
SEMI P10-0705 © SEMI 1990, 2005 24 [ CD_DEVIATION_FROM_TARGET ] [ CD_DEVIATION_FROM_MEAN ] [MEASURED_CD_MEAN] [MEASURE D_CD_MIN] [MEASURED_CD_MAX] [MEASURED_CD_TOLERANCE] [MEASURED_CD_RANGE ] [MEASURED_CD_THREE_SIGMA] [M…
SEMI P10-0705 © SEMI 1990, 2005 23
END_CLOSURE_MEASUREMENTS
<cd_group_measurements> = START_CD_GROUP_MEASUREMENTS
[
CD_QUALITY_ID]
[
CD_TONE_CLEAR]
[
CD_MORPHOGRAPHY]
[
CD_PERCENT_CLEAR] [CD_PERCENT_CLEAR_WINDOW]
[
CD_TARGET]
[
CD_ORIENTATION]
[
CD_PITCH]
[
CD_FEATURE]
[
CD_REFERENCE_ONLY]
[CD_TOLERANCE]
[CD_RANGE] [CD_THREE_SIGMA]
[CD_DEVIATION_FROM_TARGET]
[CD_DEVIATION_FROM_MEAN]
[CD_STD] [CD_CORRELATION_ID]
{
CD_EQUIP_REQD} {EQUIP_SITE_REQD}
[
CD_EQUIP_USED] [EQUIP_SITE_USED]
[
CD_MEASUREMENT_DATE]
[NUMBER_OF_CDS]
{<
cd_measurement>}
[MEASURED_CD_MEAN] [MEASURED_CD_MIN] [MEASURED_CD_MAX]
[MEASURED_CD_TOLERANCE]
[MEASURED_CD_RANGE] [MEASURED_CD_THREE_SIGMA]
[MEASURED_CD_DEVIATION_FROM_TARGET]
[MEASURED_CD_DEVIATION_FROM_MEAN]
[
MEASURED_CD_FILE_NAME]
[OPERATOR]
END_CD_GROUP_MEASUREMENTS
<cd_measurement> = START_CD_MEASUREMENT
[ [
CD_SITE_ID] CD_LOCATION ]
MEASURED_CD_SITE_ID
MEASURED_CD_LOCATION
MEASURED_CD
END_CD_MEASUREMENT
<cd_set_results> = START_CD_SET_RESULTS
{
CD_GROUP_NAME}
[
CD_REFERENCE_ONLY]
[
CD_QUALITY_ID]
[CD_TOLERANCE] [CD_RANGE] [CD_THREE_SIGMA]
SEMI P10-0705 © SEMI 1990, 2005 24
[CD_DEVIATION_FROM_TARGET] [CD_DEVIATION_FROM_MEAN]
[MEASURED_CD_MEAN] [MEASURED_CD_MIN] [MEASURED_CD_MAX]
[MEASURED_CD_TOLERANCE]
[MEASURED_CD_RANGE] [MEASURED_CD_THREE_SIGMA]
[MEASURED_CD_DEVIATION_FROM_TARGET]
[MEASURED_CD_DEVIATION_FROM_MEAN]
END_CD_SET_RESULTS
<cd_xy_results> = START_CD_XY_RESULTS
{CD_X_GROUP} {CD_Y_GROUP}
{<
cd_xy_site>}
[
CD_XY_TOLERANCE] [CD_XY_DEVIATION] [CD_XY_REFERENCE_ONLY]
[MEASURED_CD_XY_TOLERANCE] [MEASURED_CD_XY_DEVIATION]
[MEASURED_CD_XY_MORPHOGRAPHY]
[MEASURED_CD_XY_TONE_CLEAR]
END_CD_XY_RESULTS
<cd_xy_site> = START_CD_XY_SITE
[
CD_HORIZONTAL_ID CD_HORIZONTAL_LOCATION ]
[
CD_HORIZONTAL_MORPHOGRAPHY] [CD_HORIZONTAL_TONE_CLEAR]
MEASURED_HORIZONTAL_CD
[
CD_VERTICAL_ID CD_VERTICAL_LOCATION ]
[
CD_VERTICAL_MORPHOGRAPHY] [CD_VERTICAL_TONE_CLEAR]
MEASURED_VERTICAL_CD
END_CD_XY_SITE
<cd_iso_dense_results> = START_CD_ISO_DENSE_RESULTS
{
CD_ISO_GROUP} {CD_DENSE_GROUP}
[
CD_ISO_DENSE_TOLERANCE]
[
CD_ISO_DENSE_REFERENCE_ONLY]
[
MEASURED_CD_ISO_MEAN] [MEASURED_CD_ISO_RANGE]
[
MEASURED_CD_DENSE_MEAN] [MEASURED_CD_DENSE_RANGE]
[
MEASURED_CD_ISO_DENSE_TOLERANCE]
END_CD_ISO_DENSE_RESULTS
<defect_measurements> = START_DEFECT_MEASUREMENTS
[
DEFECT_QUALITY_ID]
{INSPECTION_AREA} {INSPECTION_AREA_EXCLUDE}
{VISUAL_INSP_CRITERIA}
DIE_TO_DIE_INSPECTION
DIE_TO_DIE_MEASUREMENTS
{DEFECT_EQUIP_REQD {EQUIP_SITE_REQD}
[
DEFECT_INSP_MODE_REQD] [DEFECT_INSP_PIXEL_SIZE_REQD]
{DEFECT_TYPE DEFECT_INSP_SENSITIVITY_REQD
SEMI P10-0705 © SEMI 1990, 2005 25
{BIN_SIZE SEVERITY_CRITERION_REQD } }
[DEFECT_SETUP_FILE_NAME_REQD] }
[DEFECT_EQUIP_USED [EQUIP_SITE_USED]
[
DEFECT_INSP_MODE_USED] [DEFECT_INSP_PIXEL_SIZE_USED]
{DEFECT_TYPE DEFECT_INSP_SENSITIVITY_USED
{BIN_SIZE SEVERITY_CRITERION_USED } }
[DEFECT_SETUP_FILENAME_USED ] ]
[
DEFECT_INSP_DATE]
{REPAIR_EQUIP_REQD {EQUIP_SITE_REQD} }
[REPAIR_EQUIP_USED [EQUIP_SITE_USED] ]
{MEASURED_INSPECTION_AREA} {MEASURED_INSPECTION_AREA_EXCLUDE}
[MEASURED_DEFECT_DENSITY]
[MEASURED_DEFECT_COUNT]
[MEASURED_DEFECT_COUNT_REP]
[
MEASURED_DEFECT_COUNT_WITHIN_SPEC]
[MEASURED_DEFECTIVE_DIE_DENSITY]
[MEASURED_DEFECTIVE_DIE_COUNT]
[MEASURED_DEFECTIVE_DIE_COUNT_REP]
[MEASURED_PERCENT_DEFECTIVE_DIE]
{
MEASURED_DEFECT_FILE_NAME}
[PRE_PELL_INSPECTION_ID] [PRE_PELL_INSPECTION_DATE_AND_TIME]
[POST_PELL_INSPECTION_ID] [POST_PELL_INSPECTION_DATE_AND_TIME]
[OPERATOR]
END_DEFECT_MEASUREMENTS
<surface_insp_measurements> =
START_SURFACE_INSP_MEASUREMENTS
[
SURFACE_QUALITY_ID]
{SURF_INSP_EQUIP_REQD {EQUIP_SITE_REQD}
[SURF_INSP_MODE_REQD] [SURF_INSP_PIXEL_SIZE_REQD]
{SURF_DEFECT_TYPE SURF_INSP_SENSITIVITY_REQD
{BIN_SIZE SEVERITY_CRITERION_REQD } }
[SURF_INSP_SETUP_FILE_NAME_REQD] }
[
SURF_INSP_EQUIP_USED [EQUIP_SITE_USED]
[
SURF_INSP_MODE_USED] [SURF_INSP_PIXEL_SIZE_USED]
{SURF_DEFECT_TYPE SURF_INSP_SENSITIVITY_USED
{ BIN_SIZE SEVERITY_CRITERION_USED } }
[SURF_INSP_SETUP_FILE_NAME_USED ] ]
[MEASURED_DEFECT_COUNT]
[MEASURED_DEFECT_COUNT_WITHIN_SPEC]
{MEASURED_SURF_INSP_FILE_NAME}