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SEMI P10-0705 © SEMI 1990, 2005 27 <xs:attribute name="p10Start" type="xs:string" use="required" fixed="StartMaskSet"/> <xs:attribute name="p10End" type="xs…

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SEMI P10-0705 © SEMI 1990, 2005 26
[PRE_PELL_INSPECTION_ID] [PRE_PELL_INSPECTION_DATE_AND_TIME]
[POST_PELL_INSPECTION_ID] [POST_PELL_INSPECTION_DATE_AND_TIME]
[OPERATOR]
END_SURFACE_INSP_MEASUREMENTS
7.6 Mask Order Data Structure Syntax in Extensible Markup Language (XML) Format The following file
defines the Mask Order Data Structure Syntax (above) in Extensible Markup Language Schema Definition (XSD)
format. Should the user choose to implement the mask order data file in Extensible Markup Language (XML), the
file must validate against this XSD. For optimal viewing, paste the text into a program designed to read XML such
as an internet browser. The content of both versions of representation of mask order data should be entirely
equivalent. Since the XML schema is derived directly from the Mask Order Data Structure Syntax, in the event of a
discrepancy between the two, the Data Structure Syntax should be considered to be the more correct.
<xs:schema xmlns:xs="http://www.w3.org/2001/XMLSchema"
elementFormDefault="qualified" attributeFormDefault="unqualified"
version="P10-0705 ">
<xs:element name="MaskOrder" type="MaskOrderType"/>
<xs:annotation>
<xs:documentation>
<copyright>2005 SEMI. All rights reserved.</copyright>
<disclaimer/>
<purpose>SEMI P10 MaskOrder</purpose>
<creationDate>01-05-2005</creationDate>
<keyword/>
<lastUpdatedDate>01-05-2005</lastUpdatedDate>
</xs:documentation>
</xs:annotation>
<xs:complexType name="MaskOrderType">
<xs:sequence>
<xs:element name="SemiRevision" type="xs:string"/>
<xs:element name="Customer" type="xs:string"/>
<xs:element name="Vendor" type="xs:string"/>
<xs:element name="FileDateTime" type="xs:dateTime"/>
<xs:sequence minOccurs="0">
<xs:element name="OperatorName" type="xs:string"/>
</xs:sequence>
<xs:element name="MaskSet" type="MaskSetType"/>
<xs:element name="Checksum" type="xs:string"/>
</xs:sequence>
<xs:attribute name="groupName" type="xs:string" use="required"/>
<xs:attribute name="p10Start" type="xs:string" use="required"
fixed="StartMaskOrder"/>
<xs:attribute name="p10End" type="xs:string" use="required"
fixed="EndMaskOrder"/>
</xs:complexType>
<xs:complexType name="MaskSetType">
<xs:sequence>
<xs:element name="MaskSetOptions"
type="MaskSetOptionsType"/>
<xs:sequence minOccurs="0" maxOccurs="unbounded">
<xs:element name="MaskGroup" type="MaskGroupType"/>
</xs:sequence>
</xs:sequence>
<xs:attribute name="groupName" type="xs:string" use="required"/>
SEMI P10-0705 © SEMI 1990, 2005 27
<xs:attribute name="p10Start" type="xs:string" use="required"
fixed="StartMaskSet"/>
<xs:attribute name="p10End" type="xs:string" use="required"
fixed="EndMaskSet"/>
</xs:complexType>
<xs:complexType name="MaskSetOptionsType">
<xs:sequence>
<xs:sequence minOccurs="0">
<xs:element name="BusinessContact" type="xs:string"/>
</xs:sequence>
<xs:sequence minOccurs="0" maxOccurs="unbounded">
<xs:element name="BusinessAddress" type="xs:string"/>
</xs:sequence>
<xs:sequence minOccurs="0" maxOccurs="unbounded">
<xs:element name="BusinessPhone" type="xs:string"/>
</xs:sequence>
<xs:sequence minOccurs="0" maxOccurs="unbounded">
<xs:element name="BusinessFax" type="xs:string"/>
</xs:sequence>
<xs:sequence minOccurs="0">
<xs:element name="BusinessEmail" type="xs:string"/>
</xs:sequence>
<xs:sequence minOccurs="0">
<xs:element name="BillingContact" type="xs:string"/>
</xs:sequence>
<xs:sequence minOccurs="0" maxOccurs="unbounded">
<xs:element name="BillingAddress" type="xs:string"/>
</xs:sequence>
<xs:sequence minOccurs="0" maxOccurs="unbounded">
<xs:element name="BillingPhone" type="xs:string"/>
</xs:sequence>
<xs:sequence minOccurs="0" maxOccurs="unbounded">
<xs:element name="BillingFax" type="xs:string"/>
</xs:sequence>
<xs:sequence minOccurs="0">
<xs:element name="BillingEmail" type="xs:string"/>
</xs:sequence>
<xs:sequence minOccurs="0">
<xs:element name="DesignRule" type="xs:string"/>
</xs:sequence>
<xs:sequence minOccurs="0">
<xs:element name="FabTechnology" type="xs:string"/>
</xs:sequence>
<xs:sequence minOccurs="0">
<xs:element name="WaferFab" type="xs:string"/>
</xs:sequence>
<xs:sequence minOccurs="0">
<xs:element name="CustomerSpec" type="xs:string"/>
<xs:element name="CustomerSpecRevision"
type="xs:string"/>
</xs:sequence>
<xs:sequence minOccurs="0" maxOccurs="unbounded">
<xs:element name="Waiver" type="xs:string"/>
</xs:sequence>
<xs:sequence minOccurs="0" maxOccurs="unbounded">
<xs:element name="WaiverOverride" type="xs:string"/>
</xs:sequence>
SEMI P10-0705 © SEMI 1990, 2005 28
<xs:sequence minOccurs="0">
<xs:element name="PriceUnits" type="xs:string"/>
</xs:sequence>
<xs:sequence minOccurs="0">
<xs:element name="SecurityClass" type="xs:string"/>
</xs:sequence>
<xs:sequence minOccurs="0">
<xs:element name="Qs9000" type="xs:boolean"/>
</xs:sequence>
<xs:sequence minOccurs="0">
<xs:element name="EngineeringContact"
type="xs:string"/>
</xs:sequence>
<xs:sequence minOccurs="0" maxOccurs="unbounded">
<xs:element name="EngineeringAddress"
type="xs:string"/>
</xs:sequence>
<xs:sequence minOccurs="0" maxOccurs="unbounded">
<xs:element name="EngineeringPhone"
type="xs:string"/>
</xs:sequence>
<xs:sequence minOccurs="0" maxOccurs="unbounded">
<xs:element name="EngineeringFax" type="xs:string"/>
</xs:sequence>
<xs:sequence minOccurs="0">
<xs:element name="EngineeringEmail"
type="xs:string"/>
</xs:sequence>
<xs:sequence minOccurs="0">
<xs:element name="ShippingContact" type="xs:string"/>
</xs:sequence>
<xs:sequence minOccurs="0" maxOccurs="unbounded">
<xs:element name="ShippingAddress" type="xs:string"/>
</xs:sequence>
<xs:sequence minOccurs="0" maxOccurs="unbounded">
<xs:element name="ShippingPhone" type="xs:string"/>
</xs:sequence>
<xs:sequence minOccurs="0" maxOccurs="unbounded">
<xs:element name="ShippingFax" type="xs:string"/>
</xs:sequence>
<xs:sequence minOccurs="0">
<xs:element name="ShippingEmail" type="xs:string"/>
</xs:sequence>
<xs:sequence minOccurs="0" maxOccurs="unbounded">
<xs:element name="ShippingMethod" type="xs:string"/>
</xs:sequence>
<xs:sequence minOccurs="0">
<xs:element name="RepairsAuthorized"
type="xs:boolean"/>
</xs:sequence>
<xs:sequence minOccurs="0">
<xs:element name="ShippableData"
type="ShippableDataType"/>
</xs:sequence>
<xs:sequence minOccurs="0" maxOccurs="unbounded">
<xs:element name="Data" type="DataType"/>
</xs:sequence>