semi合集-English.pdf - 第5546页

SEMI P10-0705 © SEMI 1990, 2005 41 <xs:element name="ButtingError" type="xs:double"/> <xs:sequence minOccurs="0"> <xs:element name="ButtingErrorMethod" type="xs…

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SEMI P10-0705 © SEMI 1990, 2005 40
</xs:sequence>
<xs:sequence minOccurs="0" maxOccurs="unbounded">
<xs:element name="TopPellicleType" type="xs:string"/>
<xs:sequence minOccurs="0">
<xs:element name="TopPellicleCentralityError"
type="XYRType"/>
</xs:sequence>
<xs:sequence minOccurs="0">
<xs:element name="Price" type="xs:double"/>
</xs:sequence>
</xs:sequence>
<xs:sequence minOccurs="0" maxOccurs="unbounded">
<xs:element name="BottomPellicleType"
type="xs:string"/>
<xs:sequence minOccurs="0">
<xs:element
name="BottomPellicleCentralityError" type="XYRType"/>
</xs:sequence>
<xs:sequence minOccurs="0">
<xs:element name="Price" type="xs:double"/>
</xs:sequence>
</xs:sequence>
<xs:sequence minOccurs="0">
<xs:element name="GuidesReqd" type="xs:string"/>
<xs:sequence minOccurs="0">
<xs:element name="Price" type="xs:double"/>
</xs:sequence>
</xs:sequence>
<xs:sequence minOccurs="0">
<xs:element name="Centrality" type="XYRType"/>
</xs:sequence>
<xs:sequence minOccurs="0" maxOccurs="unbounded">
<xs:element name="Registration"
type="RegistrationType"/>
</xs:sequence>
<xs:sequence minOccurs="0">
<xs:element name="RegistrClosure" type="xs:string"/>
<xs:sequence minOccurs="0">
<xs:element name="RegistrClosureReferenceOnly"
type="xs:boolean"/>
</xs:sequence>
<xs:sequence minOccurs="0" maxOccurs="unbounded">
<xs:element name="RegistrClosureEquipReqd"
type="xs:string"/>
</xs:sequence>
<xs:sequence minOccurs="0" maxOccurs="unbounded">
<xs:element name="EquipSiteReqd"
type="xs:string"/>
</xs:sequence>
<xs:sequence minOccurs="0">
<xs:element name="RegistrClosureBegin"
type="xs:string"/>
<xs:element name="RegistrClosureEnd"
type="xs:string"/>
</xs:sequence>
</xs:sequence>
<xs:sequence minOccurs="0">
SEMI P10-0705 © SEMI 1990, 2005 41
<xs:element name="ButtingError" type="xs:double"/>
<xs:sequence minOccurs="0">
<xs:element name="ButtingErrorMethod"
type="xs:string"/>
</xs:sequence>
</xs:sequence>
<xs:sequence minOccurs="0" maxOccurs="unbounded">
<xs:element name="CdGroup" type="CdGroupType"/>
</xs:sequence>
<xs:sequence minOccurs="0" maxOccurs="unbounded">
<xs:element name="CdSet" type="CdSetType"/>
</xs:sequence>
<xs:sequence minOccurs="0" maxOccurs="unbounded">
<xs:element name="CdXyDefinition"
type="CdXyDefinitionType"/>
</xs:sequence>
<xs:sequence minOccurs="0" maxOccurs="unbounded">
<xs:element name="CdIsoDenseDefinition"
type="CdIsoDenseDefinitionType"/>
</xs:sequence>
<xs:sequence minOccurs="0">
<xs:element name="MinMaskFeatureSize"
type="xs:string"/>
</xs:sequence>
<xs:sequence minOccurs="0">
<xs:element name="MinCornerToCornerGap"
type="xs:double"/>
</xs:sequence>
<xs:sequence minOccurs="0">
<xs:element name="PercentClear" type="xs:double"/>
</xs:sequence>
<xs:sequence minOccurs="0" maxOccurs="unbounded">
<xs:element name="OpcDefinition"
type="OpcDefinitionType"/>
</xs:sequence>
<xs:sequence minOccurs="0" maxOccurs="unbounded">
<xs:element name="DefectDefinition"
type="DefectDefinitionType"/>
</xs:sequence>
<xs:sequence minOccurs="0">
<xs:element name="InspectionRefLocation"
type="XYType"/>
</xs:sequence>
<xs:sequence minOccurs="0" maxOccurs="unbounded">
<xs:element name="SurfaceDefinition"
type="SurfaceDefinitionType"/>
</xs:sequence>
<xs:sequence minOccurs="0">
<xs:element name="InspectThroughPellicle"
type="xs:boolean"/>
<xs:element name="DefectDefinition"
type="DefectDefinitionType"/>
</xs:sequence>
<xs:sequence minOccurs="0" maxOccurs="unbounded">
<xs:element name="SemPhoto" type="SemPhotoType"/>
</xs:sequence>
<xs:sequence minOccurs="0">
SEMI P10-0705 © SEMI 1990, 2005 42
<xs:element name="QualityGroupId" type="xs:string"/>
</xs:sequence>
<xs:sequence minOccurs="0">
<xs:element name="CompactLabel" type="xs:string"/>
</xs:sequence>
<xs:sequence minOccurs="0" maxOccurs="unbounded">
<xs:element name="Package" type="xs:string"/>
<xs:sequence minOccurs="0">
<xs:element name="MaxMasksInPackage"
type="xs:integer"/>
</xs:sequence>
</xs:sequence>
<xs:sequence minOccurs="0" maxOccurs="unbounded">
<xs:element name="AdditionalMaskInfo"
type="xs:string"/>
</xs:sequence>
</xs:sequence>
<xs:attribute name="groupName" type="xs:string" use="required"/>
<xs:attribute name="p10Start" type="xs:string" use="required"
fixed="StartMaskOptions"/>
<xs:attribute name="p10End" type="xs:string" use="required"
fixed="EndMaskOptions"/>
</xs:complexType>
<xs:complexType name="WaferExposureDataType">
<xs:sequence>
<xs:element name="WaferExposureNumericalAperature"
type="xs:double"/>
<xs:sequence minOccurs="0">
<xs:element name="WaferExposureSigma"
type="xs:string"/>
</xs:sequence>
<xs:sequence minOccurs="0">
<xs:element name="WaferExposureSigmaInner"
type="xs:string"/>
<xs:element name="WaferExposureSigmaOuter"
type="xs:string"/>
</xs:sequence>
<xs:element name="WaferExposureIllumination"
type="xs:string"/>
</xs:sequence>
<xs:attribute name="groupName" type="xs:string" use="required"/>
<xs:attribute name="p10Start" type="xs:string" use="required"
fixed="StartWaferExposureData"/>
<xs:attribute name="p10End" type="xs:string" use="required"
fixed="EndWaferExposureData"/>
</xs:complexType>
<xs:complexType name="AerialImageDataType">
<xs:sequence>
<xs:element name="AimWavelength" type="xs:double"/>
<xs:sequence minOccurs="0">
<xs:element name="AimIntensityVariationDelta"
type="xs:double"/>
</xs:sequence>
<xs:sequence minOccurs="0">
<xs:element name="AimFluxIntensityDelta"
type="xs:double"/>
</xs:sequence>